High-entropy alloys (HEA) are multinary alloys obtained by blending at least five metallic elements in compositions close to their isoatomic fractions (5–35 at%). Generally, HEAs are produced by arc melting and casting. However, the cast specimens undergo phase separation and have a non-uniform microstructure. In contrast to ingot metallurgy, powder metallurgy has several advantages such as the possibility of alloying metals with high melting points and large differences in melting points and specific gravity. Therefore, we investigated the preparation of HEAs by mechanical alloying (MA), which produces an alloy powder with a uniform microstructure, followed by consolidation by spark plasma sintering (SPS). In this study, CoCrFeNiTi HEA sintered after MA-SPS was subjected to direct current plasma nitriding with screen (S-DCPN) to evaluate the characteristics of the nitrided layer as a function of nitriding temperature. Ball milling with heptane in an argon atmosphere using pure powders of Co, Cr, Fe, Ni, and Ti as raw materials was performed for 50 h. Subsequently, sintered compacts were prepared by SPS and treated with S-DCPN at 673, 773, and 873 K for 15 h in 75% N2–25% H2 at a gas pressure of 200 Pa. A screen made of austenitic stainless steel SUS316L was installed as an auxiliary cathode to ensure uniform heating and nitrogen supply during the plasma nitridation process. Then, X-ray diffraction test, cross-sectional microstructure observation, surface microstructure observation, cross-sectional hardness test, roughness test, glow discharge optical emission spectrometry, corrosion test, and wear test were performed on the nitrided samples. The corrosion test results demonstrated that corrosion resistance increased with decreasing nitriding temperature. Furthermore, the results of the roughness and wear tests confirmed that abrasive wear occurred on the specimens nitrided at 873 K.

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