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Upright (a) and inverted (b) bench-type microscopes. Courtesy of Carl Zeiss...

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in Light Microscopy > Metallography and Microstructures
Published: 01 December 2004
Fig. 2 Upright (a) and inverted (b) bench-type microscopes. Courtesy of Carl Zeiss, Inc. and Leica, Inc. More
Image

Light path in an incident-light DIC microscope. Courtesy of C. Zeiss, Inc.

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in Light Microscopy > Metallography and Microstructures
Published: 01 December 2004
Fig. 37 Light path in an incident-light DIC microscope. Courtesy of C. Zeiss, Inc. More
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Axio Imager.Z2m upright light microscope. Courtesy of Zeiss Microscopy

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in Light Optical Metallography > Materials Characterization
Published: 15 December 2019
Fig. 4 Axio Imager.Z2m upright light microscope. Courtesy of Zeiss Microscopy More
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(a) Helium ion microscope column from a Zeiss NanoFab microscope. Source: Ref 20. (b) Orion NanoFab machine

(a) Helium ion microscope column from a Zeiss NanoFab microscope. Source: ...

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in Imaging Methods for Fracture Surface Observation and Interpretation > Fractography
Published: 01 June 2024
Fig. 14 (a) Helium ion microscope column from a Zeiss NanoFab microscope. Source: Ref 20 . (b) Orion NanoFab machine More
Book Chapter

Focused Ion Beam Instruments

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By Nabil Bassim, John Notte
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006677
EISBN: 978-1-62708-213-6
... note the gas injection system nozzle for gas delivery to the same area. Courtesy of H. Schulz of Zeiss Microscopy GmbH and A. Rummel of Kleindiek, GmbH Gas Injection System This accessory delivers a gas-phase precursor chemistry through a small nozzle that is directed at the sample surface...
Abstract
This article is intended to provide the reader with a good understanding of the underlying science, technology, and the most common applications of focused ion beam (FIB) instruments. It begins with a survey of the various types of FIB instruments and their configurations, discusses the essential components, and explains their function only to the extent that it helps the operator obtain the desired results. An explanation of how the components of ion optical column shape and steer the ion beam to the desired target locations is then provided. The article also reviews the many diverse accessories and options that enable the instrument to realize its full potential across all of the varied applications. This is followed by a detailed analysis of the physical processes associated with the ion beam interacting with the sample. Finally, a complete survey of the most prominent FIB applications is presented.
View PDF for content titled, Focused Ion Beam Instruments
Image

Schematic of the light path in an upright light microscope. Courtesy of the...

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in Light Optical Metallography > Materials Characterization
Published: 15 December 2019
Fig. 1 Schematic of the light path in an upright light microscope. Courtesy of the Carl Zeiss Co. More
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Focused-ion-beam-deposited insulating silicon oxide pads. Courtesy of Carl ...

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in Focused Ion Beam Instruments > Materials Characterization
Published: 15 December 2019
Fig. 58 Focused-ion-beam-deposited insulating silicon oxide pads. Courtesy of Carl Zeiss More
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Upright (a) and inverted (b) research-quality bench microscopes. Courtesy o...

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in Light Microscopy > Metallography and Microstructures
Published: 01 December 2004
Fig. 3 Upright (a) and inverted (b) research-quality bench microscopes. Courtesy of Carl Zeiss, Inc. and Leica, Inc. More
Image

Schematic of the light path through a light microscope in bright-field illu...

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in Light Optical Metallography > Materials Characterization
Published: 15 December 2019
Fig. 5 Schematic of the light path through a light microscope in bright-field illumination. Courtesy of the Carl Zeiss Co. More
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Relationship between the numerical aperture and the color of light on the d...

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in Light Optical Metallography > Materials Characterization
Published: 15 December 2019
Fig. 3 Relationship between the numerical aperture and the color of light on the depth of focus of a light microscope. Courtesy of the Carl Zeiss Co. More
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Relationship between the numerical aperture of the objective lens and the c...

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in Light Optical Metallography > Materials Characterization
Published: 15 December 2019
Fig. 2 Relationship between the numerical aperture of the objective lens and the color of the light on the resolution of a light microscope. Courtesy of the Carl Zeiss Co. More
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Schematic of the light path through a light microscope in dark-field illumi...

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in Light Optical Metallography > Materials Characterization
Published: 15 December 2019
Fig. 30 Schematic of the light path through a light microscope in dark-field illumination, which detects the scattered light. Courtesy of the Carl Zeiss Co. More
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The Otsu method. (a) Original image. (b) Otsu segmentation. (c) Minimum poi...

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in Digital Imaging > Metallography and Microstructures
Published: 01 December 2004
Fig. 37 The Otsu method. (a) Original image. (b) Otsu segmentation. (c) Minimum point segmentation. Original image, courtesy of Vito Smolej, Carl Zeiss Vision More
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Schematic of the light path through a light microscope in polarized light. ...

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in Light Optical Metallography > Materials Characterization
Published: 15 December 2019
Fig. 10 Schematic of the light path through a light microscope in polarized light. (The lambda plate, No. 6a, is another term for a sensitive tint plate, an optional accessory.) Courtesy of the Carl Zeiss Co. More
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Probes making electrical contact with a sample. Also note the gas injection...

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in Focused Ion Beam Instruments > Materials Characterization
Published: 15 December 2019
Fig. 19 Probes making electrical contact with a sample. Also note the gas injection system nozzle for gas delivery to the same area. Courtesy of H. Schulz of Zeiss Microscopy GmbH and A. Rummel of Kleindiek, GmbH More
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The Canny edge detector applied to the same image as Fig. 40 (a) Edges de...

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in Digital Imaging > Metallography and Microstructures
Published: 01 December 2004
Fig. 41 The Canny edge detector applied to the same image as Fig. 40 (a) Edges detected with σ = 0.5. (b) Objects detected after suitable postprocessing. Original image, courtesy of Vito Smolej, Carl Zeiss Vision More
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Schematic of the light path through a light microscope in Nomarski DIC, whi...

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in Light Optical Metallography > Materials Characterization
Published: 15 December 2019
Fig. 34 Schematic of the light path through a light microscope in Nomarski DIC, which uses polarized light (the lambda plate, No. 7a, is another term for a sensitive tint plate, an optional accessory). Courtesy of the Carl Zeiss Co. More
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Neon secondary ion mass spectrometry image of the anode of a commercial lit...

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in Focused Ion Beam Instruments > Materials Characterization
Published: 15 December 2019
Fig. 62 Neon secondary ion mass spectrometry image of the anode of a commercial lithium ion battery. The underlying gray-scale image is based on helium-generated secondary electrons (SEs); the colorization is based on the detected elements, as shown. Courtesy of B. Lewis, Carl Zeiss More
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Curtaining effects demonstrated in a cross section of a semiconductor devic...

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in Focused Ion Beam Instruments > Materials Characterization
Published: 15 December 2019
below them. Courtesy of H. Schulz, Zeiss Microscopy GmbH More
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The watershed method. (a) Original image. (b) Binary image with touching ob...

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in Digital Imaging > Metallography and Microstructures
Published: 01 December 2004
Fig. 45 The watershed method. (a) Original image. (b) Binary image with touching objects. (c) The EDM of the binary image (with contrast enhancement). (d) The watersheds derived from (c). (e) The boundaries superimposed on the original image. Original image, courtesy of Vito Smolej, Carl Zeiss More