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Published: 01 August 2013
Image
Published: 01 January 1994
Fig. 3 Chemical potential in metal-organic chemical vapor deposition processes. (a) General case. (b) Mass-transport limited growth. Source: Ref 48
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Published: 01 November 1995
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003218
EISBN: 978-1-62708-199-3
... Abstract Chemical vapor deposition (CVD) involves the formation of a coating by the reaction of the coating substance with the substrate. Serving as an introduction to CVD, the article provides information on metals, ceramics, and diamond films formed by the CVD process. It further discusses...
Abstract
Chemical vapor deposition (CVD) involves the formation of a coating by the reaction of the coating substance with the substrate. Serving as an introduction to CVD, the article provides information on metals, ceramics, and diamond films formed by the CVD process. It further discusses the characteristics of different pack cementation processes, including aluminizing, siliconizing, chromizing, boronizing, and multicomponent coating.
Book Chapter
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003685
EISBN: 978-1-62708-182-5
... Abstract Vapor-deposition processes fall into two major categories, namely, physical vapor deposition (PVD) and chemical vapor deposition (CVD). This article describes major deposition processes such as sputtering, evaporation, ion plating, and CVD. The list of materials that can be vapor...
Abstract
Vapor-deposition processes fall into two major categories, namely, physical vapor deposition (PVD) and chemical vapor deposition (CVD). This article describes major deposition processes such as sputtering, evaporation, ion plating, and CVD. The list of materials that can be vapor deposited is extensive and covers almost any coating requirement. The article provides a table of some corrosion-resistant vapor deposited materials. It concludes with an overview of the applications of CVD and PVD coatings and a discussion on coatings for graphite, the aluminum coating of steel, and alloy coatings for aircraft turbines, marine turbines, and industrial turbines.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001286
EISBN: 978-1-62708-170-2
..., and postdeposition changes. It also discusses the effects and causes of growth-related properties of films deposited by physical vapor deposition processes, including residual film stress, density, and adhesion. adhesion atomistic film growth atomistically deposited films composite materials condensation...
Abstract
This article describes eight stages of the atomistic film growth: vaporization of the material, transport of the material to the substrate, condensation and nucleation of the atoms, nuclei growth, interface formation, film growth, changes in structure during the deposition, and postdeposition changes. It also discusses the effects and causes of growth-related properties of films deposited by physical vapor deposition processes, including residual film stress, density, and adhesion.
Series: ASM Handbook
Volume: 20
Publisher: ASM International
Published: 01 January 1997
DOI: 10.31399/asm.hb.v20.a0002466
EISBN: 978-1-62708-194-8
... costly materials. It describes solidification surface treatments such as hot dip coatings, weld overlays, and thermal spray coatings. The article discusses deposition surface treatments such as electrochemical plating, chemical vapor deposition, and physical vapor deposition processes. It explains...
Abstract
Surface treatments are used in a variety of ways to improve the material properties of a component. This article provides information on surface treatments that improve service performance so that the design engineer may consider surface-engineered components as an alternative to more costly materials. It describes solidification surface treatments such as hot dip coatings, weld overlays, and thermal spray coatings. The article discusses deposition surface treatments such as electrochemical plating, chemical vapor deposition, and physical vapor deposition processes. It explains surface hardening and diffusion coatings such as carburizing, nitriding, and carbonitriding. The article also tabulates typical characteristics of carburizing, nitriding, and carbonitriding diffusion treatments.
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005772
EISBN: 978-1-62708-165-8
... bath boriding, and fluidized-bed boriding. The article briefly describes the chemical vapor deposition process, which has emerged to be dominant among metal-boride deposition processes. borides boriding cermets chemical vapor deposition ferrous metals nonferrous metals pack cementation...
Abstract
Boriding is a thermochemical diffusion-based surface-hardening process that can be applied to a wide variety of ferrous, nonferrous, and cermet materials. It is performed on metal components as a solution for extending the life of metal parts that wear out too quickly in applications involving severe wear. This article presents a variety of methods and media used for boriding of ferrous materials, and explains their advantages, limitations, and applications. These methods include pack cementation boriding, gas boriding, plasma boriding, electroless salt bath boriding, electrolytic salt bath boriding, and fluidized-bed boriding. The article briefly describes the chemical vapor deposition process, which has emerged to be dominant among metal-boride deposition processes.
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0001114
EISBN: 978-1-62708-162-7
..., including powder-in-tube processing, vapor deposition processing, and melt processing. It further discusses the microstructural, anisotropy and weak link influences on these processes. high-temperature superconductors melt processing oxide powder precursor powder precursor preparation powder...
Abstract
The discovery of the high-critical-temperature oxide superconductors has accelerated the interest for superconducting applications due to its higher-temperature operation at liquid nitrogen or above and thus reduces the refrigeration and liquid helium requirement. It also permits usage of the high-critical-temperature oxides in magnets or power applications in high-current-carrying wire or tape with acceptable mechanical capability. This article discusses the powder techniques mainly based on the production of an oxide powder precursor, which is then subjected to various processing, including powder-in-tube processing, vapor deposition processing, and melt processing. It further discusses the microstructural, anisotropy and weak link influences on these processes.
Image
Published: 01 January 1994
Fig. 2 Fundamental processes involved in metal-organic chemical vapor deposition. Source: Ref 47
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Image
Published: 01 August 2013
Fig. 3 Advantages and disadvantages of physical and chemical vapor deposition processes. HT-CVD, high-temperature chemical vapor deposition; MT-CVD, mid-temperature chemical vapor deposition; PA-CVD, plasma-assisted chemical vapor deposition. Source: H. G. Prengel et al., 1998
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Image
Published: 01 August 2013
Fig. 13 High-pressure compressor blades coated with physical vapor deposition process for improved wear resistance. Source: Ref 22
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in Crystallography and Engineering Properties of Ceramics
> Engineered Materials Handbook Desk Edition
Published: 01 November 1995
Fig. 29 Room-temperature bending strength as a function of composition between 67 and 79 wt% Al 2 O 3 of mullite-based ceramics produced via chemical vapor deposition processes in a combustion flame and sintered at 1600 °C (2900 °F) for 2 h. Source: Ref 69
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Published: 01 December 2004
Fig. 21 90.5WC-3.5(Ta,Ti,Nb)C-6Co alloy, 92 HRA, coated with multilayer hard coating. Microstructure shows (from bottom) cemented carbide substrate, TiN, TiCN, Al 2 O 3 , and TiN layers coated by the chemical vapor deposition process. Murakami's reagent, 1 min. 1500×.
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Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001287
EISBN: 978-1-62708-170-2
... condensation thermal vaporization vacuum deposition VACUUM DEPOSITION, or vacuum evaporation, is a physical vapor deposition process in which the atoms or molecules from a vaporization source reach the substrate without colliding with residual gas molecules. Generally, the vaporization source is one...
Abstract
This article discusses the fundamentals of thermal vaporization and condensation and provides information on the various vaporization sources and methods of vacuum deposition. It offers an overview of reactive evaporation and its deposition techniques. The article also explains the advantages, limitations, and applications of vacuum deposition processes. Finally, it provides information on the gas evaporation process, its processing chamber, and related systems.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... of ion plating. bombardment film growth interface formation ion plated films ion plating nucleation physical vapor deposited films plasma-based ion plating substrate potential surface preparation ION PLATING is a generic term applied to film deposition processes in which the substrate...
Abstract
This article begins with a list of the factors that influence the properties of physical vapor deposited films. It describes the steps involved in ion plating, namely, surface preparation, nucleation, interface formation, and film growth. The article discusses the factors influencing the properties of ion-plated films. The sources of potential applied on substrate surface, bombarding species, and depositing species are addressed. The article also provides information on the parameters that influence bombardment. It concludes with a discussion on the advantages, limitations, and applications of ion plating.
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
.... It describes the modeling of vapor-surface interactions and kinetics of hetereogeneous processes as well as the modeling and kinetics of homogenous reactions in chemical vapor deposition (CVD). The article provides information on the various stages of developing models for numerical simulation of the transport...
Abstract
This article focuses on transport phenomena and modeling approaches that are specific to vapor-phase processes (VPP). It discusses the VPP for the synthesis of materials. The article reviews the basic notions of molecular collisions and gas flows, and presents transport equations. It describes the modeling of vapor-surface interactions and kinetics of hetereogeneous processes as well as the modeling and kinetics of homogenous reactions in chemical vapor deposition (CVD). The article provides information on the various stages of developing models for numerical simulation of the transport phenomena in continuous media and transition regime flows of VPP. It explains the methods used for molecular modeling in computational materials science. The article also presents examples that illustrate multiscale simulations of CVD or PVD processes and examples that focus on sputtering deposition and reactive or ion beam etching.
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005808
EISBN: 978-1-62708-165-8
..., and thermokinetic phase transformations. It also describes the influence of cooling rate on laser heat treatment and the effect of processing parameters on temperature, microstructure, and case depth hardness. chemical vapor deposition electroless plating electroplating glazing hardening hardness heat...
Abstract
Laser surface hardening is a noncontact process that provides a chemically inert and clean environment as well as flexible integration with operating systems. This article provides a brief discussion on the various conventional surface-modification techniques to enhance the surface and mechanical properties of ferrous and nonferrous alloys. The techniques are physical vapor deposition, chemical vapor deposition, sputtering, ion plating, electroplating, electroless plating, and displacement plating. The article describes five categories of laser surface modification, namely, laser surface heat treatment, laser surface melting such as skin melting or glazing, laser direct metal deposition such as cladding, alloying, and hardfacing, laser physical vapor deposition, and laser shock peening. The article provides detailed information on absorptivity, laser scanning technology, and thermokinetic phase transformations. It also describes the influence of cooling rate on laser heat treatment and the effect of processing parameters on temperature, microstructure, and case depth hardness.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001320
EISBN: 978-1-62708-170-2
... by the application of a thin (∼5 μm) layer of hard TiC coating to the cemented carbide tool by chemical vapor deposition (CVD) ( Ref 13 ). In the CVD coating process, the tools are heated in a sealed reactor to about 1000 °C (1830 °F) with gaseous hydrogen at atmospheric or lower pressure; volatile compounds...
Abstract
The classes of tool materials for machining operations are high-speed tool steels, carbides, cermets, ceramics, polycrystalline cubic boron nitrides, and polycrystalline diamonds. This article discusses the expanding role of surface engineering in increasing the manufacturing productivity of carbide, cermet, and ceramic cutting tool materials used in machining operations. The useful life of cutting tools may be limited by a variety of wear processes, such as crater wear, flank wear or abrasive wear, builtup edge, depth-of-cut notching, and thermal cracks. The article provides information on the applicable methods for surface engineering of cutting tools, namely, chemical vapor deposited (CVD) coatings, physical vapor deposited coatings, plasma-assisted CVD coatings, diamond coatings, and ion implantation.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001300
EISBN: 978-1-62708-170-2
... Abstract This article describes the structure of coatings produced by plasma spraying, vapor deposition, and electrodeposition processes. The main techniques used for microstructure assessment are introduced. The relationship between the microstructure and property is also discussed...
Abstract
This article describes the structure of coatings produced by plasma spraying, vapor deposition, and electrodeposition processes. The main techniques used for microstructure assessment are introduced. The relationship between the microstructure and property is also discussed. The experimental techniques for microstructural characterization include metallographic technique, X-ray diffraction, electron, microscopies, and porosimetry.
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