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time of flight static secondary ion mass spectroscopy

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Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006683
EISBN: 978-1-62708-213-6
... of time-of-flight SIMS are covered. Instrumental features required for secondary ion imaging are presented and the differences between quadrupole and high-resolution magnetic mass filters are described. The article also reviews the optimum method for analysis of nonmetallic samples and high detection...
Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006771
EISBN: 978-1-62708-295-2
... Abstract This article covers the three most popular techniques used to characterize the very outermost layers of solid surfaces: Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), and time-of-flight secondary ion mass spectrometry (TOF-SIMS). Some of the more important...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003534
EISBN: 978-1-62708-180-1
... Abstract This article provides information on the chemical characterization of surfaces by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), and time-of-flight secondary ion mass spectrometry (TOF-SIMS). It describes the basic theory behind each of these techniques...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006648
EISBN: 978-1-62708-213-6
... discharge time-of-flight mass spectrometry, (b) time-of-flight secondary ion mass spectrometry, and (c) laser ablation inductively coupled plasma mass spectrometry. Source: Ref 85 , 86 Acknowledgments The authors would like to acknowledge the financial support from the Government...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006628
EISBN: 978-1-62708-213-6
... particles cannot be detected by an electrical energy analyzer. In order to overcome the neutralization problem, both noble-gas ions and neutrals have been detected by a time-of-flight (TOF) method ( Ref 5 , 6 ). Furthermore, low-energy atom-scattering spectroscopy can be used for analyzing insulator...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006663
EISBN: 978-1-62708-213-6
... technologies for gas mass spectrometry, namely quadrupole mass filters, magnetic sector mass filters, and time-of-flight mass analyzers are covered. Common factors to consider in choosing an analyzer for static or continuous gas measurement are also described. In addition, the article presents some examples...
Series: ASM Handbook
Volume: 23
Publisher: ASM International
Published: 01 June 2012
DOI: 10.31399/asm.hb.v23.a0005685
EISBN: 978-1-62708-198-6
... fragments from the sample surface. The mass-to-charge ratio of the ejected particles (i.e., secondary ions) is analyzed, typically via time-of-flight (TOF) mass spectrometry. In the TOF analyzer, ejected ions are accelerated into the analyzer with a common energy but at different velocities, depending...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006651
EISBN: 978-1-62708-213-6
... to ionization methods, namely glow discharge mass spectrometry and secondary ion mass spectrometry. It concludes with a section on various examples of applications and interpretation of MS for various materials. time-of-flight mass spectrometer mass spectrometry Overview Introduction Since its...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001772
EISBN: 978-1-62708-178-8
... and operation, mass spectra and their interpretation, and applications of AP microanalysis. electric field field ion microscopy field ionization point defects quantitative analysis sample preparation semiconductors spatial resolution stress time-of-flight mass spectrometry Overview...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006671
EISBN: 978-1-62708-213-6
..., optical emission spectroscopy; OM, optical metallography; RBS, Rutherford backscattering spectrometry; RS, Raman spectroscopy; SEM, scanning electron microscopy; SIMS, secondary ion mass spectroscopy, SSMS, spark source mass spectrometry; TEM, transmission electron microscopy; XPS, x-ray photoelectron...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006641
EISBN: 978-1-62708-213-6
... significantly reduces mass interferences from the polyatomic species present in the ion beam, improves the signal-to-background ratios and the detection limit for critical but challenging elements, and ultimately increases the analysis throughput by eliminating the need for the cold-plasma run. Time-of-Flight...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006402
EISBN: 978-1-62708-192-4
... Transition cell structure, reaction products, etc. TOF-SIMS Time-of-flight secondary ion mass spectroscopy Ion beam Secondary ion Heat of adsorption, heat of transition 100 µm; depth direction 1 nm Lubrication distribution, deterioration TDS Thermal desorption spectroscopy Thermal energy...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001737
EISBN: 978-1-62708-178-8
... to a power density of 10 9 W/cm 2 on a location 1 μm in diameter coupled to a time-of-flight mass spectrometer with an electron multiplier detector. Each laser pulse produces a burst of ions that are separated in time according to their mass as they traverse the time-of-flight mass spectrometer. All ions...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006677
EISBN: 978-1-62708-213-6
... isolation valve is closed when the FIB system is idle. Transit Time Transit time of the ions through the column sometimes is an important point of consideration for high-speed applications. Due to the larger mass of ions compared to electrons, the transit time of the ion from source to sample...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.9781627082136
EISBN: 978-1-62708-213-6
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.9781627081788
EISBN: 978-1-62708-178-8
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.9781627082006
EISBN: 978-1-62708-200-6
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003671
EISBN: 978-1-62708-182-5
... versus oxidation time. Fig. 5 Linear oxidation kinetics showing relationship between oxide mass and time Parabolic Kinetics Parabolic kinetics describe high-temperature corrosion reactions where the rate-determining step is the diffusion of ions, either inward toward or outward from...
Series: ASM Handbook
Volume: 11B
Publisher: ASM International
Published: 15 May 2022
DOI: 10.31399/asm.hb.v11B.a0006917
EISBN: 978-1-62708-395-9
... chromatography/mass spectroscopy may be useful. Examples of the testing methods and procedures typically used to confirm ESC fracture modes are described in the next section, “Failure Analysis of ESC Fractures,” in this article. This section focuses on the testing and evaluation of materials for resistance...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003068
EISBN: 978-1-62708-200-6
... involving multiple layers or parts, the age change in the unit length of a body per unit change assembly time begins with the spreading of the adhe- in temperature over a prescribed temperature range. Glossaryof Terms/ 7 average molecular weight. The molecular weight of ball clay. A secondary clay, commonly...