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single-wavelength ellipsometry

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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001295
EISBN: 978-1-62708-170-2
... with the calculated values using a model that includes a layer of a “mixture” consisting of oxide and silicon Abstract Abstract Measuring the thickness of thin films can be accomplished in many ways. This article focuses on the optical method of single-wavelength ellipsometry, two multiple-wavelength methods...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0005586
EISBN: 978-1-62708-170-2
... tunneling microscope/microscopy SUS Saybolt Universal Seconds (viscosity) SWE single-wavelength ellipsometry Sv sievert SZM structure-zone model t thickness; time T tesla T temperature; thickness T c contact temperature; critical...
Series: ASM Handbook
Volume: 17
Publisher: ASM International
Published: 01 August 2018
DOI: 10.31399/asm.hb.v17.a0006464
EISBN: 978-1-62708-190-0
.... The phase is most sensitive to a subsurface feature as the thermal wavelength approaches the depth of the feature. Fig. 12 Lock-in thermography (from left) with different modulation frequencies and flaw depth greater than, less than, and approximately equal to the thermal diffusion length...
Series: ASM Handbook
Volume: 17
Publisher: ASM International
Published: 01 August 2018
DOI: 10.31399/asm.hb.v17.a0006460
EISBN: 978-1-62708-190-0
... force dipoles can be associated ( Ref 4 , 5 ). When the surface is free and when light penetration is very small compared to the acoustic wavelength (which often is the case in metals), the dipole normal to the surface cancels, leaving only the in-plane dipoles. This situation has been extensively...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.9781627081788
EISBN: 978-1-62708-178-8
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.9781627082136
EISBN: 978-1-62708-213-6
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006402
EISBN: 978-1-62708-192-4
... of micrometers; depth direction 50 nm Stress due to slip, film-thickness changes, etc. EPMA Electron probe microanalysis Electron Characteristic x-ray Energy-dispersive x-ray, wavelength-dispersive x-ray quantitative analysis ≈0.5 µm; depth direction 0.3 to several micrometers Analysis of slip products...
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0001117
EISBN: 978-1-62708-162-7
... exposure to the atmosphere. Dielectric Constant Ellipsometry has been used to determine the real (ϵ 1 ) and imaginary (ϵ 2 ) parts of the complex dielectric constant as a function of vacuum wavelength (λ): Wavelength (λ), nm −ϵ 1 ϵ 2 1771.2 65.2 … 1549.8 51.8 11.7 1377.6...
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.9781627081627
EISBN: 978-1-62708-162-7