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single-wafer metal-etch systems

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Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004171
EISBN: 978-1-62708-184-9
... Abstract This article presents a detailed examination of corrosion at the various production stages of wafer fabrication. The corrosion issues related to batch metal-etch systems and single-wafer metal-etch systems are also discussed. The article provides a case study, which illustrates...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006641
EISBN: 978-1-62708-213-6
...-MS is useful in monitoring cleanroom air quality. A serious problem in semiconductor manufacturing is hazy wafers. Reasons for the occurrence of hazy wafers include particles, roughness, adsorbed organics and metal oxides, and salt formation. Cleanroom air monitoring for airborne molecular...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006670
EISBN: 978-1-62708-213-6
... for a device, such for single-crystal silicon photovoltaics, but in many other cases devices are patterned onto the outer surface of the wafer by means of lithographic patterning and a variety of growth, deposition, etching, diffusion, and implantation processes. Several semiconductor materials...
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006116
EISBN: 978-1-62708-175-7
... suggestions to promote and encourage the safety of those performing metallographic preparation and analysis. chemical etching drying ferrous powders grinding metallic specimens metallographic analysis metallographic preparation mounting polishing powder metallurgy sample selection sectioning...
Series: ASM Handbook
Volume: 12
Publisher: ASM International
Published: 30 January 2024
DOI: 10.31399/asm.hb.v12.a0006847
EISBN: 978-1-62708-387-4
... deposition of a heavy metal is implemented to enhance contrast. Fig. 1 Schematic diagram illustrating the single-stage replication technique Because thin single-stage plastic replicas are fragile and difficult to remove from rough fracture surfaces, their use is generally limited to polished...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006644
EISBN: 978-1-62708-213-6
... silicon wafer X-Ray Topographic Contour Mapping When a single crystal is illuminated by monochromatic x-ray radiation of certain divergence, only a limited region will diffract ( Ref 39 – 46 ). This is due to the existence of lattice deformation (effective misorientation) that deviates from...
Series: ASM Handbook Archive
Volume: 12
Publisher: ASM International
Published: 01 January 1987
DOI: 10.31399/asm.hb.v12.a0001836
EISBN: 978-1-62708-181-8
... and darkening in the electron image. An inadequate degree of contrast is usually provided by the use of plastic only; therefore, a shadowing technique involving the vacuum vapor deposition of a heavy metal is implemented to enhance contrast. Fig. 1 Schematic views illustrating the single-stage...
Series: ASM Handbook
Volume: 9
Publisher: ASM International
Published: 01 December 2004
DOI: 10.31399/asm.hb.v09.a0009074
EISBN: 978-1-62708-177-1
... sectioning and polishing into a single step. A thin diamond wafering blade is used to cut the mount through the midsection, as shown in Fig. 5 . This process will bypass the steps that cause the majority of damage to the sample. After the sample has been sectioned with the diamond saw, it is ready...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006656
EISBN: 978-1-62708-213-6
... planes. The position of the spots is dependent on the orientation and symmetry of the single crystal (in this case a (0001) single-crystal wafer). The powder diffraction pattern is comprised of rings also representing lattice planes and indicating there is a random orientation of the crystallites...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003245
EISBN: 978-1-62708-199-3
... and different product forms of steels. etching ferrous metals grinding metallurgical structure microstructural analysis mounting polishing Technique for Carbon and Alloy Steels THE PREPARATION OF SPECIMENS of carbon and alloy steels can require special consideration, and these special...
Series: ASM Handbook
Volume: 17
Publisher: ASM International
Published: 01 August 2018
DOI: 10.31399/asm.hb.v17.a0006466
EISBN: 978-1-62708-190-0
... between the microstructure of this sample and that of Fig. 20 . Field of view: 1 × 1 mm Metals In typical optical microscopy and metallography, it is necessary to polish and etch a sample to reveal the microstructural pattern. With SAM, this may not be necessary, as evidenced...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.9781627082136
EISBN: 978-1-62708-213-6
Book Chapter

By Pel Lynah
Book: Machining
Series: ASM Handbook
Volume: 16
Publisher: ASM International
Published: 01 January 1989
DOI: 10.31399/asm.hb.v16.a0002154
EISBN: 978-1-62708-188-7
... ( Fig. 12 ). The dynamic action of this system drives the rings in the same rotational direction as the lap ( Fig. 13 ). When abrasive is applied to the lap, the rings and the lap wear into intimate contact and are of ball-and-socket shape. This is the fundamental operation of the single-face lap...
Series: ASM Handbook
Volume: 9
Publisher: ASM International
Published: 01 December 2004
DOI: 10.31399/asm.hb.v09.a0003763
EISBN: 978-1-62708-177-1
... of proven etching techniques for plain carbon and low-alloy steels. cementite etching ferrite grinding high-carbon steel low-alloy steel macrostructural examination medium carbon steel metallography microstructural constituents microstructural examination microstructure mounting pearlite...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001286
EISBN: 978-1-62708-170-2
... a better surface for the deposition of the desired material. This is often done in the metallization systems used in micro-electronics and for interconnects in integrated circuit technology. In these cases a material is deposited on the oxide/semiconductor surface that forms a desirable oxide interface...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001760
EISBN: 978-1-62708-178-8
..., or sites of contact loading, can be examined. X-ray fractography has been used to investigate the failure modes for refractory metals and alloys by implementing the bright, polychromatic low-divergence radiation from a synchrotron source ( Ref 63 ). Precracked molybdenum single crystals, cleaved...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001300
EISBN: 978-1-62708-170-2
... specimen preparation for all structural analysis techniques cannot be overemphasized. In many cases, apparently featureless fracture or polished cross sections have been taken to indicate amorphous or single-phase coating. Subsequent etching or diffraction analysis has shown the presence of grain or phase...
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005708
EISBN: 978-1-62708-171-9
... at the present time, there are single functional layers for metal-substrate-supported cells that currently are thermally sprayed successfully. For the operation of a SOFC, a number of cells must be integrated into a stack, which allows for the gas supply, including sealing and the electrical contact...
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... substrates have been used for growing materials, for example, single-crystal or polycrystalline wafers, fibers, porous materials, particles, and so on. Sometimes, solid particles can even be grown in the gas phase without solid substrates (homogeneous nucleation). Growth is usually performed under vacuum...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006360
EISBN: 978-1-62708-192-4
... is a non-carbide-forming metal such as gold, silver, or copper, the metal may form nanometer-scale clusters within the a-C:H matrix ( Ref 12 ). Industrial systems use programmable logic controllers (PLC) to maintain consistency from batch to batch and effectively make these processes “black box” from...