This article presents a detailed examination of corrosion at the various production stages of wafer fabrication. The corrosion issues related to batch metal-etch systems and single-wafer metal-etch systems are also discussed. The article provides a case study, which illustrates that the factors outside the normal processing of wafers or tool-specific problems can contribute to metal-line corrosion.

This article discusses the basic principles of inductively coupled plasma mass spectrometry (ICP-MS), covering different instruments used for performing ICP-MS analysis. The instruments covered include the sample-introduction system, ICP ion source, mass analyzer, and ion detector. Emphasis is placed on ICP-MS applications in the semiconductor, photovoltaic, materials science, and other electronics and high-technology areas.

This article introduces various techniques commonly used in the characterization of semiconductors, namely single-crystal, polycrystalline, amorphous, oxide, organic, and low-dimensional semiconductors and semiconductor devices. The discussion covers material classification, fabrication methods, sample preparation, bulk/elemental characterization methods, microstructural characterization methods, surface characterization methods, and electronic characterization methods.

Metallographic analysis is primarily a collection of visual and imaging techniques that provide an insight into the background of a material or part and its behavior. Metallic specimens, both porous and pore-free, are opaque, and as a result, an optical examination must be performed on carefully prepared planar (two-dimensional) surfaces. This article discusses the preparation sequence of ferrous powders, which is normally separated into several well-defined steps: sample selection, sectioning, mounting, grinding, polishing, drying, and chemical etching and/or coating. It provides several suggestions to promote and encourage the safety of those performing metallographic preparation and analysis.

The introduction of focused ion beam (FIB) microscopy in the 1990s added the capability of studying fracture surfaces in the third dimension and making site-specific and stress-free transmission electron microscope (TEM) specimens in situ. This article reviews the methods for preparing replicas and the site-specific FIB thin-foil preparation technique. It provides an overview of FIB-TEM specimen preparation.

X-ray topography is the general term for a family of x-ray diffraction imaging techniques capable of providing information on the nature and distribution of imperfections. This article provides a detailed account of x-ray topography techniques, providing information on the historical background and development trends in x-ray diffraction topography. The discussion covers the general principles, components of systems, and applications of x-ray topography techniques, namely conventional X-ray topographic techniques and synchrotron x-ray topographic techniques.

The application of transmission electron microscope to the study of fracture surfaces and related phenomena has made it possible to obtain magnifications and depths of field much greater than those possible with light (optical) microscopes. This article reviews the methods for preparing single-stage, double-stage, and extraction replicas of fracture surfaces. It discusses the types of artifacts and their effects on these replicas, and provides information on shadowing of replicas. The article concludes with a comparison of the transmission electron and scanning electron fractographs with illustrations.

This article focuses on the sample preparation methods for titanium honeycomb composites, boron fiber composites, and titanium/polymeric composite hybrids. These include mounting, sectioning, grinding, and polishing. The article also provides information on the sample preparation of unstaged and staged prepreg materials for optical analysis.

This article discusses various concepts of micro x-ray diffraction (XRD) used for the examination of materials in situ. The discussion covers the principles, equipment used, sample preparation procedure, considerations for calibrating a detector, steps for performing data analysis, and applications and interpretation of micro-XRD.

Proper sectioning of the surface to be examined is a very important step in preparing steel specimens. The first step in preventing damage to the metallurgical structure is to minimize the amount of sectioning that is done. This article discusses the various metallographic techniques, namely mounting, grinding, polishing, and etching involved in the microstructural analysis of carbon and alloy steels, case hardening steels, cast iron, ferrous powder metallurgy alloys, wrought and cast stainless steels, tool materials, steel castings, iron-chromium-nickel heat-resistant casting alloys and different product forms of steels.

This article discusses the fundamentals and operating principles of the following acoustic microscopy methods: scanning laser acoustic microscopy, C-mode scanning acoustic microscopy, and scanning acoustic microscopy. It describes the applications of acoustic microscopy for detecting defects in metals, ceramics, glasses, polymers, and composites with examples.

Lapping is the lower-pressure, lower-speed, and lower-power application of the use of fixed abrasives. This article begins with a discussion on the process capabilities of lapping and reviews the selection of abrasive and vehicle for lapping. It describes the methods of lapping outer cylindrical surfaces, namely, ring lapping, machine lapping between plates, centerless roll lapping with loose abrasives, and centerless lapping with bonded abrasives. In addition, the article discusses the methods employed for lapping of outer surfaces of piston rings, crankshafts, inner cylindrical surfaces, flat surfaces, end surfaces, spherical surfaces, balls, spring like parts, and gears. It also reviews the problems in flat and end lapping. The article concludes information on the use of lapping in accelerated wearing-in process for matching and aligning components of bearing assemblies.

This article describes the microstructure and metallographic practices used for medium- to high-carbon steels as well as for low-alloy steels. It explains the microstructural constituents of plain carbon and low-alloy steels, including ferrite, pearlite, and cementite. The article provides information on how to reveal the various constituents using proven metallographic procedures for both macrostructural and microstructural examination. Emphasis is placed on the specimen preparation procedures such as sectioning, mounting, grinding, and polishing. The article illustrates the use of proven etching techniques for plain carbon and low-alloy steels.

This article describes eight stages of the atomistic film growth: vaporization of the material, transport of the material to the substrate, condensation and nucleation of the atoms, nuclei growth, interface formation, film growth, changes in structure during the deposition, and postdeposition changes. It also discusses the effects and causes of growth-related properties of films deposited by physical vapor deposition processes, including residual film stress, density, and adhesion.

X-ray topography is a technique that comprises topography and x-ray diffraction. This article provides a description of the kinematical theory and the dynamical theory of diffraction. It provides useful information on the configurations of reflection and transmission topography. The article explains various topographic methods, namely, divergent beam method, polycrystal rocking curve analysis, line broadening analysis, microbeam method, and polycrystal scattering topography, as well as their instrumentation. It also describes the applications of x-ray topography.

This article describes the structure of coatings produced by plasma spraying, vapor deposition, and electrodeposition processes. The main techniques used for microstructure assessment are introduced. The relationship between the microstructure and property is also discussed. The experimental techniques for microstructural characterization include metallographic technique, X-ray diffraction, electron, microscopies, and porosimetry.

The use of renewable energy has grown strongly in all end-use sectors such as power, heat, and transport. This article describes thermal spray applications that improve efficiency, lower maintenance costs, and prolong operational life in the renewable energy technologies, including wind power, hydro power, biomass and biofuels, solar energy, and fuel cells.

This article focuses on transport phenomena and modeling approaches that are specific to vapor-phase processes (VPP). It discusses the VPP for the synthesis of materials. The article reviews the basic notions of molecular collisions and gas flows, and presents transport equations. It describes the modeling of vapor-surface interactions and kinetics of hetereogeneous processes as well as the modeling and kinetics of homogenous reactions in chemical vapor deposition (CVD). The article provides information on the various stages of developing models for numerical simulation of the transport phenomena in continuous media and transition regime flows of VPP. It explains the methods used for molecular modeling in computational materials science. The article also presents examples that illustrate multiscale simulations of CVD or PVD processes and examples that focus on sputtering deposition and reactive or ion beam etching.

This article describes two variations of carbon-base coatings: diamondlike carbon (DLC) coatings and polycrystalline diamond (PCD) coatings. It discusses the basics of a few deposition methods as they apply to industrially relevant coatings. The methods include deposition of tungsten-containing hydrogenated amorphous carbon films, deposition of tetrahedral amorphous carbon films, and deposition of silicon-incorporated hydrogenated amorphous carbon films. The most common deposition technologies for diamond films are also discussed. The article provides information on surface preparation for DLC and diamond deposition. It also provides a discussion on the coating composition and structure, mechanical and tribological properties, and applications of DLC and diamond coatings. The quality control techniques for DLC and diamond coatings are specified to meet customer requirements and ensure repeatable quality.