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secondary ion mass spectroscopy

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Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001774
EISBN: 978-1-62708-178-8
...Abstract Abstract In secondary ion mass spectroscopy (SIMS), an energetic beam of focused ions is directed at the sample surface in a high or ultrahigh vacuum (UHV) environment. The transfer of momentum from the impinging primary ions to the sample surface causes sputtering of surface atoms...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006683
EISBN: 978-1-62708-213-6
...Abstract Abstract This article focuses on the principles and applications of high-sputter-rate dynamic secondary ion mass spectroscopy (SIMS) for depth profiling and bulk impurity analysis. It begins with an overview of various factors pertinent to sputtering. This is followed by a discussion...
Image
Published: 31 August 2017
Fig. 8 Secondary ion mass spectroscopy step-scans across duplex graphite nodules. (a) Duplex graphite nodule. Reprinted with permission from Cambridge University Press. (b) 80% nodularity iron produced through the addition of 0.19% Ce-mischmetal (0.081% Ce). (c) 60% nodularity iron produced More
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001301
EISBN: 978-1-62708-170-2
... of common surface analysis methods, namely, Auger electron spectroscopy, X-ray photoelectron spectroscopy, ion scattering spectroscopy, secondary ion mass spectroscopy, and Rutherford backscattering spectroscopy. It also provides useful information on the applications of surface analysis. Auger...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003522
EISBN: 978-1-62708-180-1
... microanalysis, Auger electron spectroscopy, secondary ion mass spectroscopy, and X-ray powder diffraction. The article discusses the analysis and interpretation of base material composition and microstructures. Preparation and examination of metallographic specimens in failure analysis are also discussed...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003253
EISBN: 978-1-62708-199-3
...Abstract Abstract This article describes the operation and capabilities of surface analysis methods of metals, including scanning electron microscopy, electron probe microanalysis, transmission electron microscopy, secondary ion mass spectroscopy, and X-ray photoelectron spectroscopy...
Image
Published: 01 January 1986
Fig. 21 FMR in amorphous FeB showing the difference between (a) a homogeneous sample and (b) an inhomogeneous sample. Secondary ion mass spectroscopy suggested that both samples were identical. More
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006652
EISBN: 978-1-62708-213-6
... metallography; RS, Raman spectroscopy; SAXS, small-angle x-ray scattering; SEM, scanning electron microscopy; SIMS, secondary ion mass spectroscopy; TEM, transmission electron microscopy; UV/VIS, ultraviolet/visible absorption spectroscopy; XPS, x-ray photoelectron spectroscopy; XRD, x-ray diffraction; XRS, x...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006675
EISBN: 978-1-62708-213-6
... that involves understanding, characterization, and manipulating surfaces at atomic or nanometer scale Secondary ion mass spectroscopy (SIMS) Ion beam Secondary ions Elemental, isotopic, or molecular composition of the surface through detection of the species with different mass-to-charge ratios 50 nm–10...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006678
EISBN: 978-1-62708-213-6
... … … … … … … … • • … … … … … • Raman spectroscopy N D, • D,• … D,• D,• D,• • • S • • … • … Scanning electron microscopy … … … … … … … … • … N N … … • Secondary ion mass spectroscopy • … S • • N … … • • • • • N N,S Small-angle x-ray scattering...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.9781627081801
EISBN: 978-1-62708-180-1
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006126
EISBN: 978-1-62708-175-7
... are summarized in Table 5 . Surface analytical techniques Table 5 Surface analytical techniques Testing parameters Auger electron spectroscopy/scanning Auger microscopy X-ray photoelectron spectroscopy or electron spectroscopy for chemical analysis Secondary ion mass spectroscopy Ion-scattering...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0005693
EISBN: 978-1-62708-178-8
... SANS small-angle neutron scattering SAM scanning Auger microscopy SAXS small-angle x-ray scattering SEM scanning electron microscopy SERS surface-enhanced Raman spectroscopy SFC supercritical fluid chromatography SIMS secondary ion mass spectroscopy...
Series: ASM Handbook
Volume: 23
Publisher: ASM International
Published: 01 June 2012
DOI: 10.31399/asm.hb.v23.a0005685
EISBN: 978-1-62708-198-6
.... These methods include light microscopy, scanning electron microscopy, atomic force microscopy, energy-dispersive X-ray spectroscopy, Auger electron spectroscopy, secondary ion mass spectrometry, X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, and Raman spectroscopy. atomic force...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003534
EISBN: 978-1-62708-180-1
...Abstract Abstract This article provides information on the chemical characterization of surfaces by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), and time-of-flight secondary ion mass spectrometry (TOF-SIMS). It describes the basic theory behind each...
Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006771
EISBN: 978-1-62708-295-2
...Abstract Abstract This article covers the three most popular techniques used to characterize the very outermost layers of solid surfaces: Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), and time-of-flight secondary ion mass spectrometry (TOF-SIMS). Some of the more...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006671
EISBN: 978-1-62708-213-6
..., optical emission spectroscopy; OM, optical metallography; RBS, Rutherford backscattering spectrometry; RS, Raman spectroscopy; SEM, scanning electron microscopy; SIMS, secondary ion mass spectroscopy, SSMS, spark source mass spectrometry; TEM, transmission electron microscopy; XPS, x-ray photoelectron...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001773
EISBN: 978-1-62708-178-8
...), and secondary ion mass spectroscopy (SIMS), which are discussed in articles elsewhere in this Volume. The primary advantages of LEISS are its sampling depth of only 1 to 2 monolayers (0.2 to 0.4 nm, or 2 to 4 Å), its ability to analyze insulators, its ability to depth profile ultrathin films, and its ability...
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003710
EISBN: 978-1-62708-182-5
... bonding, and elemental depth profile Ion scattering spectroscopy (ISS) The energy of scattered primary ions from the surface allows identification of surface atoms. Chemical composition of the surface films at atomic and a molecular level Secondary ion mass spectrometry (SIMS) Incident ion beam...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006402
EISBN: 978-1-62708-192-4
... Electron Electron (transmission, diffraction) Shape, structure elements 10 nm; 0.1 nm Transition cell structure, reaction products, etc. TOF-SIMS Time-of-flight secondary ion mass spectroscopy Ion beam Secondary ion Heat of adsorption, heat of transition 100 µm; depth direction 1 nm...