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secondary ion mass spectrometry

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Published: 01 January 2002
Fig. 16 Time-of-flight secondary ion mass spectrometry spectrum showing mass separation of Cu and C 5 H 3 peaks, both at a nominal mass of 63 More
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Published: 01 January 2002
Fig. 8 Time-of-flight secondary ion mass spectrometry positive ion spectrum of stainless steel surface More
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Published: 01 January 2002
Fig. 15 Time-of-flight secondary ion mass spectrometry negative ion spectrum of stainless steel surface. Postive ion spectrum is in Fig. 8 . More
Image
Published: 01 January 2002
Fig. 17 Time-of-flight secondary ion mass spectrometry images of 50 by 50 μm stainless steel surface area. (a) Map of Cr (b) Map of Fe, (c) Map of Na More
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006651
EISBN: 978-1-62708-213-6
... to ionization methods, namely glow discharge mass spectrometry and secondary ion mass spectrometry. It concludes with a section on various examples of applications and interpretation of MS for various materials. time-of-flight mass spectrometer mass spectrometry Overview Introduction Since its...
Series: ASM Handbook
Volume: 23
Publisher: ASM International
Published: 01 June 2012
DOI: 10.31399/asm.hb.v23.a0005685
EISBN: 978-1-62708-198-6
.... These methods include light microscopy, scanning electron microscopy, atomic force microscopy, energy-dispersive X-ray spectroscopy, Auger electron spectroscopy, secondary ion mass spectrometry, X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, and Raman spectroscopy. atomic force...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003534
EISBN: 978-1-62708-180-1
...Abstract Abstract This article provides information on the chemical characterization of surfaces by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), and time-of-flight secondary ion mass spectrometry (TOF-SIMS). It describes the basic theory behind each...
Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006771
EISBN: 978-1-62708-295-2
...Abstract Abstract This article covers the three most popular techniques used to characterize the very outermost layers of solid surfaces: Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), and time-of-flight secondary ion mass spectrometry (TOF-SIMS). Some of the more...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006683
EISBN: 978-1-62708-213-6
...Abstract Abstract This article focuses on the principles and applications of high-sputter-rate dynamic secondary ion mass spectroscopy (SIMS) for depth profiling and bulk impurity analysis. It begins with an overview of various factors pertinent to sputtering. This is followed by a discussion...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006652
EISBN: 978-1-62708-213-6
... be studied through a variety of techniques, such as secondary ion mass spectrometry (SIMS) (time-of-flight SIMS, for example) or microscopic imaging, such as atomic force microscopy or TEM. The extent of cure can be established through chemical analysis, such as by correlating the disappearance or appearance...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006648
EISBN: 978-1-62708-213-6
...-profile analysis of thin-coated samples was recently compared in terms of depth resolution, analysis time, and capability to detect light elements to that of other complementary reference techniques, such as secondary ion mass spectrometry (SIMS) and laser ablation inductively coupled plasma mass...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001774
EISBN: 978-1-62708-178-8
...Abstract Abstract In secondary ion mass spectroscopy (SIMS), an energetic beam of focused ions is directed at the sample surface in a high or ultrahigh vacuum (UHV) environment. The transfer of momentum from the impinging primary ions to the sample surface causes sputtering of surface atoms...
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006126
EISBN: 978-1-62708-175-7
... of EPMA is moderate only, being in most cases much poorer than that of secondary ion mass spectrometry. The key feature of EPMA is local analysis of a small regions on the specimen surface. The physical separation of microscopic specimen fragments from their surroundings, which would be impracticable...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001738
EISBN: 978-1-62708-178-8
... Introduction Gas analysis by mass spectrometry, or gas mass spectrometry, is a useful analytical tool for investigations performed in controlled atmospheres or in vacuum. A mass spectrometer may be defined as an analytical instrument that produces ions, then separates them according to their mass...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006641
EISBN: 978-1-62708-213-6
... increasing significantly. ICP-MS is more sensitive than the established atomic optical emission and atomic absorption spectrometers. ICP-MS analysis is also a more quantitative method compared with spark (or arc) source mass spectrometry, glow discharge mass spectrometry, secondary ion mass spectrometry...
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003710
EISBN: 978-1-62708-182-5
... bonding, and elemental depth profile Ion scattering spectroscopy (ISS) The energy of scattered primary ions from the surface allows identification of surface atoms. Chemical composition of the surface films at atomic and a molecular level Secondary ion mass spectrometry (SIMS) Incident ion beam...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0005693
EISBN: 978-1-62708-178-8
... (spectroscopy) GC gas chromatography GC-IR gas chromatography-infrared (spectroscopy) GC/MS gas chromatography/mass spectrometry GFAAS graphite furnace atomic absorption spectrometry HPLC high-performance liquid chromatography IC ion chromatography ICP-AES...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006663
EISBN: 978-1-62708-213-6
...Abstract Abstract Gas analysis by mass spectrometry, or gas mass spectrometry, is a general technique using a family of instrumentation that creates a charged ion from a gas phase chemical species and measures the mass-to-charge ratio. This article covers gas analysis applications that do...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006675
EISBN: 978-1-62708-213-6
... and Microanalysis,” in this Volume) Ion-scattering spectrometry (covered in Division 3, “Mass and Ion Spectrometry,” in this Volume) Contact angle, a surface-sensitive technique for single-layer atom detection and surface free-energy analysis White light interferometry, good for surface roughness analysis...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006678
EISBN: 978-1-62708-213-6
...: scanning electron microscopy; SIMS: secondary ion mass spectroscopy; TEM: transmission electron microscopy; UV/VIS: ultraviolet/visible absorption spectroscopy; XPS: x-ray photoelectron spectroscopy; XRD: x-ray diffraction; XRS: x-ray spectrometry. (a) Limited number of elements or groups. (b) Volatile...