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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001287
EISBN: 978-1-62708-170-2
... Abstract This article discusses the fundamentals of thermal vaporization and condensation and provides information on the various vaporization sources and methods of vacuum deposition. It offers an overview of reactive evaporation and its deposition techniques. The article also explains...
Image
Published: 01 January 1994
Fig. 4 Relative effect of deposition temperature and bias on reactively sputter-deposited titanium nitride. A lower resistivity rating indicates that the titanium film is more dense (that is, hard) and stoichiometric. Source: Ref 46 More
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001286
EISBN: 978-1-62708-170-2
... crystallographic orientation density film growth growth-related properties interface formation intermetallic materials lattice defects nucleation nuclei growth physical vapor deposition reactive deposition residual film stress surface area surface coverage transport vaporization voids...
Book Chapter

By Donald M. Mattox
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... surface and the growing film are subjected to a continuous or periodic flux of energetic massive bombarding particles (ions, radicals, atoms, or molecules—reactive or inert) sufficient to cause changes in the film formation process and the properties of the deposited film ( Ref 1 , 2 , 3 , 4...
Book Chapter

By S.L. Rohde
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001288
EISBN: 978-1-62708-170-2
... sputtering magnetron sputtering nonreactive sputtering plasma formation process control radio-frequency sputtering reactive sputtering sputter deposition sputtered films triode sputtering unbalanced magnetron sputtering SPUTTERING is a nonthermal vaporization process in which surface atoms...
Book Chapter

By David M. Sanders, Joseph W. Glaser, Steven Falabella
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001291
EISBN: 978-1-62708-170-2
... to compound coatings in which better stoichiometry is produced when deposition occurs in the presence of a reactive gas. For instance, when compared with electron-beam evaporation and magnetron sputtering, the cathodic arc can produce stoichiometric titanium nitride over a much wider range of nitrogen partial...
Book Chapter

By Graham K. Hubler, James K. Hirvonen
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001290
EISBN: 978-1-62708-170-2
... describing the use of chromium nitride ( Ref 100 ), titanium nitride ( Ref 100 ), and silicon nitride ( Ref 76 ) to protect titanium alloys. This seems to be a promising area for further research. Ion-Induced Chemical Vapor Deposition (CVD) Several researchers have used reactive IBAD (mode 3 of Table...
Book Chapter

By Alain Dollet
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... and reactive or ion beam etching. vapor-phase process vapor-surface interaction hetereogeneous process homogenous reaction chemical vapor deposition numerical simulation molecular modeling multiscale simulation sputtering deposition ion beam etching VAPOR-PHASE PROCESSES (VPP) involve...
Image
Published: 01 January 1994
Fig. 4 (a) Nitrogen partial pressure vs. reactive gas flow in a mixed Ar-N 2 discharge under mass flow control, at a target power of 10 kW. (b) Deposition rate vs. flow hysteresis behavior for TiN x deposition, at a target power of 10 kW, in a mixed Ar-N 2 discharge. Source: Ref 18 More
Book Chapter

By Ryan D. Evans
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006360
EISBN: 978-1-62708-192-4
... specialized vacuum equipment. Chemical vapor deposition is performed when gas phase chemical species are energetically manipulated to condense on the substrate and form a coating. Chemical vapor deposition may be performed using thermal or plasma-enhanced (PECVD) methods for creating the reactive gas...
Book Chapter

Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003219
EISBN: 978-1-62708-199-3
... or BN RT, room temperature; ARE, activated reactive evaporation; T m , absolute melting temperature. (a) Compounds: oxides, nitrides, carbides, silicides, and borides of Al, B, Cr, Hf, Mo, Nb, Ni, Re, Si, Ta, Ti, V, W, Zr Originally PVD was used to deposit single metal elements...
Book Chapter

Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003685
EISBN: 978-1-62708-182-5
... ) can be synthesized at very low temperatures. Furthermore, adjustment of the ratio of reactive ions to atoms arriving at the substrate surface allows adjustment of the stoichiometry of solid solutions. Fig. 4 Ion-beam-assisted deposition (IBAD) It is generally accepted that plasma plays...
Series: ASM Handbook
Volume: 23A
Publisher: ASM International
Published: 12 September 2022
DOI: 10.31399/asm.hb.v23A.a0006884
EISBN: 978-1-62708-392-8
... was deposited on it when DCPD was added to the C-P-F solution. Furthermore, the amount of FAp that was deposited increased with the number of repeated immersions in the solution. The reactivity of the FAp/DCPD hybrid (obtained from the C-P-F solution) with fluoride ions increased, and the lag time decreased...
Image
Published: 01 December 2004
Fig. 21 Gas-discharge methods for deposition of interference films (a) and (b) and physical etching (c) and (d) by ion bombardment. (a) Reactive sputtering. (b) Cathodic discharge or sputtering. (c) Cathodic ion etching. (d) Ion etching. Source: adapted from Ref 1 More
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0005586
EISBN: 978-1-62708-170-2
... Ref reference rf radio frequency RH relative humidity RHEED reflection high-energy electron diffraction RIBAD reactive ion-beam-assisted deposition RIP reactive ion plating rms root mean square rpm revolutions per minute R q rms...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... have a lower energy barrier to physical and chemical reactions than the parent species and consequently react at lower temperatures. Thus in the PECVD process, these reactive species lead to lower deposition temperatures and higher deposition rates than are possible with only thermally driven CVD...
Book Chapter

By R.C. Tucker, Jr.
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005707
EISBN: 978-1-62708-171-9
... (carburizing, nitriding, and boriding) surface modifications, electrochemical treatments (electroplating, and anodizing), chemical treatments (electroless plating, phosphating, and hot dip coating), hardfacing, and thermal spray processes. It provides information on chemical and physical vapor deposition...
Book Chapter

By James S. Horwitz
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001294
EISBN: 978-1-62708-170-2
... of the interaction of the radiation field with solids, primarily to determine the origin of optical damage ( Ref 6 ). These studies included an analysis of the vapor created by lasers focused to ablation energy densities. Film growth studies included the deposition of complex materials (ReB 22 ) ( Ref 7 ), reactive...
Book Chapter

Series: ASM Handbook
Volume: 6A
Publisher: ASM International
Published: 31 October 2011
DOI: 10.31399/asm.hb.v06a.a0005597
EISBN: 978-1-62708-174-0
...; achieves good pulsed spray stability over a wide range of arc characteristics and deposition ranges Ar-1O 2 Ar-2O 2 Aluminum, titanium, and other reactive metals ≤13 ≤ 1 2 in. Spray arc Argon Best metal transfer, arc stability, and plate cleaning; little or no spatter; removes...
Book Chapter

By Om S. Kolluri
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001319
EISBN: 978-1-62708-170-2
.... The distinguishing factor is the absence of reactive gases, such as unsaturated hydrocarbons or saturated hydrocarbons, or any other materials that would result in the deposition of a film on the substrate. In many industries, surface chemical interactions play a central role in the functional performance...