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plasma-based ion plating
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Image
Published: 01 January 1994
Fig. 2 Schematic showing typical ion plating installations. (a) Plasma-based configuration with resistively heated vaporization source. (b) Vacuum-based configuration with electron-beam evaporation source
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Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... of ion plating. bombardment film growth interface formation ion plated films ion plating nucleation physical vapor deposited films plasma-based ion plating substrate potential surface preparation ION PLATING is a generic term applied to film deposition processes in which the substrate...
Abstract
This article begins with a list of the factors that influence the properties of physical vapor deposited films. It describes the steps involved in ion plating, namely, surface preparation, nucleation, interface formation, and film growth. The article discusses the factors influencing the properties of ion-plated films. The sources of potential applied on substrate surface, bombarding species, and depositing species are addressed. The article also provides information on the parameters that influence bombardment. It concludes with a discussion on the advantages, limitations, and applications of ion plating.
Image
Published: 01 January 1994
Fig. 9 Anodic polarization curves for selected coating systems. (a) TiN deposited on 304 stainless steel by plasma-assisted chemical vapor deposition. Curves for TiN deposited on glass and for the uncoated base metal are provided for comparison. Environment: 1 M /L HCl. Source: Ref 25 . (b
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Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0005586
EISBN: 978-1-62708-170-2
...) in pounds per square inch PSII plasma-source ion implantation PSZ partially stabilized zirconia PTFE polytetrafluoroethylene PTH plated-through-hole (printed wiring board) PVC polyvinyl chloride PVD physical vapor deposition PWB printed wiring board...
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001291
EISBN: 978-1-62708-170-2
... deposited at rates between 23 and 65 nm/s (0.9 and 2.6 μin./s) (below that reported by Dorodnov). The films were found to be homogeneous, with film purities up to 99.9% ( Ref 14 ). The researchers determined an ion temperature of approximately 0.7 eV at plasma densities between 10 15 and 10 17 /m 3 ( Ref...
Abstract
This article describes the characteristics of continuous cathodic arc sources and filtering process for removing macroparticles from a cathodic arc. It provides information on the types of arc sources and the properties of deposited materials. The advantages, limitations, and applications of arc deposition are also discussed.
Book Chapter
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003685
EISBN: 978-1-62708-182-5
...; chromium and stainless steel are also widely used. Evaporation is not generally used for critical corrosion-control applications. Ion Plating Ion plating is a generic term for the hybrid process based on the evaporation (or sputtering) mechanism coupled with a flux of high-energy particles ( Fig. 3...
Abstract
Vapor-deposition processes fall into two major categories, namely, physical vapor deposition (PVD) and chemical vapor deposition (CVD). This article describes major deposition processes such as sputtering, evaporation, ion plating, and CVD. The list of materials that can be vapor deposited is extensive and covers almost any coating requirement. The article provides a table of some corrosion-resistant vapor deposited materials. It concludes with an overview of the applications of CVD and PVD coatings and a discussion on coatings for graphite, the aluminum coating of steel, and alloy coatings for aircraft turbines, marine turbines, and industrial turbines.
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006651
EISBN: 978-1-62708-213-6
... Typical analytes Typical uses (a) Spatial resolution Laser-ablation inductively coupled plasma LA-ICP-MS Solid Quadrupole Hard Elemental ions B, P 100–10 μm Inductively coupled plasma ICP Solid, liquid Quadrupole Hard Elemental ions B … Direct analysis in real-time DART...
Abstract
This article endeavors to familiarize the reader with a selection of different ionization designs and instrument components to provide knowledge for sorting the various analytical strategies in the field of solid analysis by mass spectrometry (MS). It begins with a description of the general principles of MS. This is followed by sections providing a basic understanding of instrumentation and discussing the operating requirements as well as practical considerations related to solid sample analysis by MS. Instrumentation discussed include the triple quadrupole mass spectrometer and the time-of-flight mass spectrometer. Inductively coupled plasma and thermal ionization MS provide atomic information, and direct analysis in real-time and matrix-assisted laser-desorption ionization MS are used to analyze molecular compositions. The article describes various factors pertinent to ionization methods, namely glow discharge mass spectrometry and secondary ion mass spectrometry. It concludes with a section on various examples of applications and interpretation of MS for various materials.
Book: Thermal Spray Technology
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005707
EISBN: 978-1-62708-171-9
... techniques such as conventional CVD, laser-assisted CVD, cathodic arc deposition, molecular beam epitaxy, ion plating, and sputtering. anodizing case hardening chemical vapor deposition corrosion electroplating hardfacing hot dip coating ion implantation ion plating physical vapor deposition...
Abstract
Coatings and other surface modifications are used for a variety of functional, economic, and aesthetic purposes. Two major applications of thermal spray coatings are for wear resistance and corrosion resistance. This article discusses thermal (surface hardening) and thermochemical (carburizing, nitriding, and boriding) surface modifications, electrochemical treatments (electroplating, and anodizing), chemical treatments (electroless plating, phosphating, and hot dip coating), hardfacing, and thermal spray processes. It provides information on chemical and physical vapor deposition techniques such as conventional CVD, laser-assisted CVD, cathodic arc deposition, molecular beam epitaxy, ion plating, and sputtering.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001311
EISBN: 978-1-62708-170-2
... and oxidation resistance through the use of polishing, buffing, and wire brushing operations. The article also covers a wide range of surface modification and coating processes, including ion implantation, diffusion, chemical and physical vapor deposition, plating, anodizing, and chemical conversion coatings...
Abstract
This article reviews cleaning and finishing operations that have proven to be effective on titanium, its alloys, and semi-fabricated titanium products. It explains how to remove scale, tarnish films, grease, and other soils and how to achieve required finishes and/or improve wear and oxidation resistance through the use of polishing, buffing, and wire brushing operations. The article also covers a wide range of surface modification and coating processes, including ion implantation, diffusion, chemical and physical vapor deposition, plating, anodizing, and chemical conversion coatings as well as sprayed and sol-gel coatings and laser and electron-beam treatments.
Series: ASM Handbook
Volume: 20
Publisher: ASM International
Published: 01 January 1997
DOI: 10.31399/asm.hb.v20.a0002466
EISBN: 978-1-62708-194-8
... costly materials. It describes solidification surface treatments such as hot dip coatings, weld overlays, and thermal spray coatings. The article discusses deposition surface treatments such as electrochemical plating, chemical vapor deposition, and physical vapor deposition processes. It explains...
Abstract
Surface treatments are used in a variety of ways to improve the material properties of a component. This article provides information on surface treatments that improve service performance so that the design engineer may consider surface-engineered components as an alternative to more costly materials. It describes solidification surface treatments such as hot dip coatings, weld overlays, and thermal spray coatings. The article discusses deposition surface treatments such as electrochemical plating, chemical vapor deposition, and physical vapor deposition processes. It explains surface hardening and diffusion coatings such as carburizing, nitriding, and carbonitriding. The article also tabulates typical characteristics of carburizing, nitriding, and carbonitriding diffusion treatments.
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005791
EISBN: 978-1-62708-165-8
... Abstract Plasma (ion) nitriding is a method of surface hardening using glow-discharge technology to introduce nascent (elemental) nitrogen to the surface of a metal part for subsequent diffusion into the material. This article describes the procedures and applications of plasma nitriding...
Abstract
Plasma (ion) nitriding is a method of surface hardening using glow-discharge technology to introduce nascent (elemental) nitrogen to the surface of a metal part for subsequent diffusion into the material. This article describes the procedures and applications of plasma nitriding methods of steel. These methods include direct-current plasma nitriding, pulsed-current plasma nitriding, and active-screen plasma nitriding. The article reviews cold-walled and hot-walled furnaces used for plasma nitriding. It provides information on the importance of controlling three process parameters: atmosphere, pressure, and part temperature. The article includes a discussion on the influence of nitrogen concentration on case structure formation on nitrided steel, and explains the significance of microstructure, hardness, and fatigue strength on nitrided case. It also discusses processing, laboratory studies, and applications of nitrocarburizing of steel.
Book Chapter
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006663
EISBN: 978-1-62708-213-6
... electron emission, which can occur when an electron or charged ion strikes an electrode surface (dynode), typically an active layer on a metal plate, with enough kinetic energy to cause the release of secondary electrons. An avalanche of this process occurs when an electric potential is applied...
Abstract
Gas analysis by mass spectrometry, or gas mass spectrometry, is a general technique using a family of instrumentation that creates a charged ion from a gas phase chemical species and measures the mass-to-charge ratio. This article covers gas analysis applications that do not use chromatographic separation to physically isolate components of the sample prior to analysis. It is intended to provide an understanding of gas analysis instrumentation and terminology that will help make informed decisions in choosing an instrument and methodology appropriate for the data needed. Mass-analyzer technologies for gas mass spectrometry, namely quadrupole mass filters, magnetic sector mass filters, and time-of-flight mass analyzers are covered. Common factors to consider in choosing an analyzer for static or continuous gas measurement are also described. In addition, the article presents some examples of applications of gas mass spectrometry.
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005771
EISBN: 978-1-62708-165-8
... of steels Layer additions Hardfacing: Fusion hardfacing (welded overlay) Thermal spray (nonfusion-bonded overlay) Coatings: Electrochemical plating Chemical vapor deposition (electroless plating) Thin films (physical vapor deposition, sputtering, ion plating) Ion...
Abstract
Surface hardening improves the wear resistance of steel parts. This article focuses exclusively on the methods that involve surface and subsurface modification without any intentional buildup or increase in part dimensions. These include diffusion methods, such as carburizing, nitriding, carbonitriding, and austenitic and ferritic nitrocarburizing, as well as selective-hardening methods, such as laser transformation hardening, electron beam hardening, ion implantation, selective carburizing, and surface hardening with arc lamps. The article also discusses the factors affecting the choice of these surface-hardening methods.
Book Chapter
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006436
EISBN: 978-1-62708-192-4
..., and ion plating surface modification treatments. The thermochemical conversion surface treatments include nitriding, carburizing, boriding, and solid lubrication. friction wear titanium alloys physical vapor deposition thermochemical conversion treatments ion implantation sputtering...
Abstract
This article describes the surface modification treatments used to modify the tribological properties of titanium alloys. These include physical vapor deposition and thermochemical conversion treatments. The physical vapor deposition includes ion implantation, sputtering, evaporation, and ion plating surface modification treatments. The thermochemical conversion surface treatments include nitriding, carburizing, boriding, and solid lubrication.
Series: ASM Handbook
Volume: 20
Publisher: ASM International
Published: 01 January 1997
DOI: 10.31399/asm.hb.v20.a0002494
EISBN: 978-1-62708-194-8
..., and the absence of free ions between the gun and the part promotes better coverage of all surfaces ( Ref 7 ). Inorganic Finishing Processes Inorganic finishes—including metal- and ceramic-based coatings—are applied by a variety of techniques, such as electroplating, electroless plating, thermal spraying...
Abstract
This article presents general design principles for different types of surface-finishing processes, such as cleaning, organic coatings, and inorganic coatings applied by a variety of techniques. It discusses the factors that influence the selection of surface-finishing processes. These include fabrication processes, size, weight, functional requirements, and design features. The article discusses the design as an integral part of manufacturing. It contains tables that summarize the design limitations for selected surface-preparation, organic finishing, and inorganic finishing processes.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001288
EISBN: 978-1-62708-170-2
... into the negative glow region where they expend most of their energy creating additional ions, approximately 10 to 20 ions/electron. It is these secondary electrons that are primarily responsible for sustaining the discharge, in this case, a cold cathode discharge. In the case of self-sustaining plasmas...
Abstract
Sputtering is a nonthermal vaporization process in which the surface atoms are physically ejected from a surface by momentum transfer from an energetic bombarding species of atomic/molecular size. It uses a glow discharge or an ion beam to generate a flux of ions incident on the target surface. This article provides an overview of the advantages and limitations of sputter deposition. It focuses on the most common sputtering techniques, namely, diode sputtering, radio-frequency sputtering, triode sputtering, magnetron sputtering, and unbalanced magnetron sputtering. The article discusses the fundamentals of plasma formation and the interactions on the target surface. A comparison of reactive and nonreactive sputtering is also provided. The article concludes with a discussion on the several methods of process control and the applications of sputtered films.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001323
EISBN: 978-1-62708-170-2
... Abstract This article focuses on alternatives to chromium in both hard chromium plating and chromate conversion coating. These include electroless nickel plating, nickel-tungsten composite electroplating, spray coating applications, and cobalt/molybdenum-base conversion coating. The article...
Abstract
This article focuses on alternatives to chromium in both hard chromium plating and chromate conversion coating. These include electroless nickel plating, nickel-tungsten composite electroplating, spray coating applications, and cobalt/molybdenum-base conversion coating. The article discusses the material and process substitutions that can be used to eliminate the use or emissions of chromium in industrial processes. It describes the physical characteristics of each coating, economics, environmental impacts, advantages, and disadvantages of alternative processes.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0007039
EISBN: 978-1-62708-170-2
... effects, whether positive or negative, on treated parts. It also provides recommendations for improving outcomes when nitriding titanium alloys, ferrous metals, particularly stainless steels, and components with complex geometries. ferrous alloys glow discharge ion nitriding iron atoms plasma...
Abstract
Sputtering is a nonthermal vaporization process in which atoms are ejected from the surface of a solid by momentum transfer from energetic particles of atomic or molecular size. Ionized gases in plasma nitriding chambers often possess enough energy to sputter atoms from workload, fixturing, and racking surfaces that are then redeposited to the benefit or detriment of the nitriding process. This article explains how and why sputtering occurs during plasma nitriding and how to recognize and control its effects. It reviews the factors that influence the intensity of sputtering and its effects, whether positive or negative, on treated parts. It also provides recommendations for improving outcomes when nitriding titanium alloys, ferrous metals, particularly stainless steels, and components with complex geometries.
Series: ASM Handbook
Volume: 5B
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v05b.a0006027
EISBN: 978-1-62708-172-6
... and chip. Electroplating Electroplating involves the electrodeposition of a metallic coating onto a base metal to improve the corrosion resistance, appearance, or properties of that base metal. Electroplating commonly is done to improve corrosion resistance, and examples include: Chrome-plated...
Abstract
This article provides a brief discussion on the common types of overlayers that can be used on a metal surface to protect it from corrosion. These overlayers include phosphate, chromate, and chromate-free conversion coatings; hot dip galvanizing; cementitious linings; glass and porcelain enamels; electroplating; thermal spray coatings; and rubber linings.
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001737
EISBN: 978-1-62708-178-8
... mixed with a conductive matrix. A high-voltage spark in a vacuum produces positive ions of the sample material that are extracted into a mass spectrometer and separated according to their mass. The spectrum is recorded on a photographic plate or measured using an electronic ion detector. The position...
Abstract
Spark source mass spectrometry (SSMS) is an analytical technique used for determining the concentration of elements in a wide range of solid samples, including metals, semiconductors, ceramics, geological and biological materials, and air and water pollution samples. This article discusses the basic principles of spark source technique; SSMS instrumentation such as ion source, electric sector, and magnetic sector; sample preparation; and test procedures of SSMS. Some of the related techniques to SSMS are laser ionization mass spectrometry and laser-induced resonance ionization mass spectrometry. The ions produced in SSMS are detected by either the photometric method or electrical detection method and quantitatively measured by techniques such as internal standardization techniques, isotope dilution, multi element isotope dilution, and dry spike isotope dilution. The detected spark source spectrum contains all the elemental data of the tested sample. Finally, the article exemplifies the applications of SSMS.
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