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plasma-assisted chemical vapour deposited coatings

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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001320
EISBN: 978-1-62708-170-2
... or abrasive wear, builtup edge, depth-of-cut notching, and thermal cracks. The article provides information on the applicable methods for surface engineering of cutting tools, namely, chemical vapor deposited (CVD) coatings, physical vapor deposited coatings, plasma-assisted CVD coatings, diamond coatings...
Book Chapter

By S.L. Rohde
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001288
EISBN: 978-1-62708-170-2
.... On the other hand, unbalanced magnetron sputtering offers the possibility of depositing dense but rather low-stress coatings ( Ref 88 ). A combination of arc etching and unbalanced magnetron sputter deposition may open new avenues ( Ref 89 , 90 ). Another combined process, sputtering and plasma nitriding...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006360
EISBN: 978-1-62708-192-4
... vapor deposition processes using specialized vacuum equipment. Chemical vapor deposition is performed when gas phase chemical species are energetically manipulated to condense on the substrate and form a coating. Chemical vapor deposition may be performed using thermal or plasma-enhanced (PECVD) methods...
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005733
EISBN: 978-1-62708-171-9
... nm) , J. Therm. Spray Technol. , Vol 19 ( No. 1–2 ), 2010 , p 198 – 206 10.1007/s11666-009-9429-8 31. Guignard A. , Mauer G. , Vassen R. , and Stover D. , Deposition and Characteristics of Submicrometer-Structured Thermal Barrier Coatings by Suspension Plasma...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001286
EISBN: 978-1-62708-170-2
... the article “Vacuum Deposition, Reactive Evaporation, and Gas Evaporation” in this Volume). The plasma environment “activates” reactive species, making them more chemically reactive. Condensation and Nucleation Atoms that impinge on a surface in a vacuum environment either are reflected immediately...
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... widely used in combination with CVD in the so-called plasma-enhanced (or plasma-assisted) CVD processes. In plasma-assisted processes, reactions are initiated by charged species formed in the cold gas discharge (mainly electrons) rather than by thermal activation of the reactant molecules. The presence...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003563
EISBN: 978-1-62708-180-1
...) Note: PACVD, plasma-assisted chemical vapor deposition; PCVD, plasma chemical vapor deposition; PECVD, plasma-enhanced chemical vapor deposition Published findings for RCF performance of thermally sprayed coatings Table 4 Published findings for RCF performance of thermally sprayed coatings...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003054
EISBN: 978-1-62708-200-6
... hydrogen cyanide (HCN), which is also toxic. A final consideration concerning inert gas is the possibility of plasma formation. Plasmas are favored by high temperature, high voltage, and intermediate pressures. Typically, at temperatures in excess of 1400 °C (2550 °F) and argon pressures in the range...
Series: ASM Handbook
Volume: 4D
Publisher: ASM International
Published: 01 October 2014
DOI: 10.31399/asm.hb.v04d.a0005958
EISBN: 978-1-62708-168-9
... deposition or plasma-assisted chemical vapor deposition—PVD and PACVD) to enhance adhesion properties of hard coatings such as TiN, TiAlN, AlTiN, diamond(like) coatings, or oxide coatings. Plasma Nitriding Equipment Heat treatment of tool steels usually requires high flexibility combined with small...
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.9781627081719
EISBN: 978-1-62708-171-9
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006379
EISBN: 978-1-62708-192-4
... and vapor environments ( Ref 4 ). There has been some success in extending these measurements to a wider range of surfaces. One approach is to coat mica surfaces by various techniques, including Langmuir-Blodgett deposition, surfactant or polymer adsorption from solution, plasma modification...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.9781627082136
EISBN: 978-1-62708-213-6
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004190
EISBN: 978-1-62708-184-9
.... The article examines the corrosion problems in high-yield mechanical pulping, sulfite process, neutral sulfite semichemical pulping, chemical recovery, tall oil plants, wastewater treatment, and recovery boilers. It explains the stages of chlorine-based and nonchlorine bleaching, process water reuse...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.9781627081788
EISBN: 978-1-62708-178-8
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003822
EISBN: 978-1-62708-183-2
... depend on environmental conditions. In most aqueous environments, the oxide is typically TiO 2 but may consist of mixtures of other titanium oxides, including TiO 2 , Ti 2 O 3 , and TiO ( Ref 6 ). High-temperature oxidation tends to promote the formation of the denser, more chemically resistant form...