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plasma generation techniques

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Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006647
EISBN: 978-1-62708-213-6
... Abstract This article provides a clear but nonexhaustive description of the general principle of atomic emission, with a particular focus on instrumentation, and summarizes the main characteristics of the inductively coupled plasma optical emission spectrometer technique. Basic atomic theory...
Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006766
EISBN: 978-1-62708-295-2
... wavelength intervals. These intervals, termed emission lines, form a pattern—the emission spectrum—that is characteristic of the atom generating it. For OES, the energetic environment is typically a plasma, and the device used to produce such a plasma is commonly termed an emission source ( Ref 2...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001729
EISBN: 978-1-62708-178-8
... for atomic absorption spectroscopy to improve detection limits for these elements. A commercial hydride generator for ICP spectrometers is available. Solid-Sample Analysis The techniques for efficient, simple, and reliable introduction of solid samples into the plasma remain predominantly experimental...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006678
EISBN: 978-1-62708-213-6
... Abstract This article briefly discusses popular techniques for metals characterization. It begins with a description of the most common techniques for determining chemical composition of metals, namely X-ray fluorescence, optical emission spectroscopy, inductively coupled plasma optical...
Book Chapter

By S.L. Rohde
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001288
EISBN: 978-1-62708-170-2
... in the formation of compounds on either the target or the substrate, is used to generate a plasma and sputter material from the target. The inert gas is also sometimes termed the working gas . Argon is used in most cases because its mass is high enough to ensure adequate sputtering yields and it is less expensive...
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006126
EISBN: 978-1-62708-175-7
... can be any solid or liquid having a low vapor pressure (greater than ∼10 −3 torr, or 0.13 Pa). Sample size is limited by the chamber size of the microscope. In general, sample preparation by standard metallographic polishing and etching techniques are adequate when examining electrically conductive...
Book: Casting
Series: ASM Handbook
Volume: 15
Publisher: ASM International
Published: 01 December 2008
DOI: 10.31399/asm.hb.v15.a0005205
EISBN: 978-1-62708-187-0
... Abstract Plasma melting is a material-processing technique in which the heat of thermal plasma is used to melt a material. This article discusses two typical design principles of plasma torches in the transferred mode: the tungsten tip design and the hollow copper electrode design. It describes...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001294
EISBN: 978-1-62708-170-2
... be used to cast these materials in thin film form. Ceramic superconductors are generally complex multicomponent oxides containing three or more metals (e.g., YBa 2 Cu 3 O 7 , or YBCO) with anisotropic electrical properties. PLD was among the techniques surveyed for possible application in the fabrication...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001282
EISBN: 978-1-62708-170-2
... deposition range from about 300 to 550 m/s. Temperatures are usually at or slightly above the melting point. Generally, higher particle velocities and temperatures above the melting point, but without excessive superheating, yield coatings with the highest densities and bond strengths. The density of plasma...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... Abstract This article discusses the application of amorphous and crystalline films through plasma-enhanced chemical vapor deposition (PECVD) from the view point of microelectronic device fabrication. It describes the various types of PECVD reactors and deposition techniques. Plasma enhancement...
Series: ASM Handbook
Volume: 6A
Publisher: ASM International
Published: 31 October 2011
DOI: 10.31399/asm.hb.v06a.a0005582
EISBN: 978-1-62708-174-0
..., this task is facilitated by a general-purpose tool designed for nozzle removal and replacement and for electrode set-back adjustment. Equipment A basic PAW system consists of a power source, a plasma control console, a water cooler, a welding torch, and a gas supply system for the plasma...
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005733
EISBN: 978-1-62708-171-9
... used to deposit the ceramic topcoat on TBCs is APS. However, APS also can be used to deposit the metallic bond coat. Low-pressure plasma spray (also called vacuum plasma spray) and HVOF are the state-of-the-art techniques employed to spray high-quality bond coats ( Ref 1 , 3 , 4 ). Air Plasma...
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005791
EISBN: 978-1-62708-165-8
.... The plasma technique also arrived in the United States during the 1950s, with General Electric as one of the first U.S. companies to recognize the usefulness of the process on a wide variety of materials ( Ref 7 ). Fig. 1 Bernhard Berghaus in 1947 at his institute with a pit furnace developed...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001291
EISBN: 978-1-62708-170-2
... can readily be controlled. Similarly, the monocharged nature of the anodic-arc-generated ions simplifies stream focusing and control. This facilitates usage in materials processing and as a plasma source in space research. Rate of Deposition The rate of deposition, using arc technology...
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005745
EISBN: 978-1-62708-171-9
... of the thermal spray torch can be a plasma, combustion flame, or combustion exhaust, as in the high-velocity oxyfuel (HVOF) process. The technique is chosen on the basis of the polymer-melting characteristics. A simple combustion torch is well suited for low-melting-point polymers with a large processing window...
Series: ASM Handbook
Volume: 6
Publisher: ASM International
Published: 01 January 1993
DOI: 10.31399/asm.hb.v06.a0001357
EISBN: 978-1-62708-173-3
..., with respect to the nozzle orifice, is required to maintain consistent results. However, this task is facilitated by a general-purpose tool designed for nozzle removal and replacement and for electrode set-back adjustment. Equipment A basic PAW system consists of a power source, a plasma control console...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006640
EISBN: 978-1-62708-213-6
... Laser-induced breakdown spectroscopy (LIBS) is a technique based on the optical emission from a laser-induced plasma (laser spark), generated in the very intense electromagnetic field of a laser pulse. As such, it cannot be described as a certain type of emission source in the same way as the other...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001300
EISBN: 978-1-62708-170-2
... Abstract This article describes the structure of coatings produced by plasma spraying, vapor deposition, and electrodeposition processes. The main techniques used for microstructure assessment are introduced. The relationship between the microstructure and property is also discussed...
Book Chapter

By Donald M. Mattox
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... of ion plating. bombardment film growth interface formation ion plated films ion plating nucleation physical vapor deposited films plasma-based ion plating substrate potential surface preparation ION PLATING is a generic term applied to film deposition processes in which the substrate...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... is the merging of these two techniques. For instance, CVD now makes extensive use of plasma (a physical phenomenon), whereas PVD is often carried out in a chemical environment (reactive evaporation and reactive sputtering). Likewise, CVD and PVD operations are often processed in the same integrated equipment...