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plasma discharge reactions
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Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001319
EISBN: 978-1-62708-170-2
... Abstract This article provides an overview of plasma surface treatments for plastics. It covers the equipment and methods used in plasma processing, providing detailed explanations of the plasma discharge reactions and how they affect surface state and topography. It also provides information...
Abstract
This article provides an overview of plasma surface treatments for plastics. It covers the equipment and methods used in plasma processing, providing detailed explanations of the plasma discharge reactions and how they affect surface state and topography. It also provides information on contamination removal, plasma surface modification, plasma-induced grafting, and plasma film deposition.
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005793
EISBN: 978-1-62708-165-8
.... This article begins with an overview of the theoretical background and the range and limitations of glow-discharge plasma. It describes the plasma carburizing process, which is carried out with methane or propane. Plasma carburizing processes of sinter metals and stainless steels, and the influence of current...
Abstract
The plasma carburizing process is basically a low-pressure carburizing process making use of a high-voltage electrical field applied between the load to be treated and the furnace wall producing activated and ionized gas species responsible for carbon transfer to the workpieces. This article begins with an overview of the theoretical background and the range and limitations of glow-discharge plasma. It describes the plasma carburizing process, which is carried out with methane or propane. Plasma carburizing processes of sinter metals and stainless steels, and the influence of current pulse length on carbon input of low-pressure carburizing process are also described. The article presents the basic requirements and process parameters to be considered in plasma carburizing equipment. It also exemplifies a still-working plasma process in industrial measure.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... not to escape. The activation energy for chemical dissociation is typically lower for these plasma-enhanced reactions ( Fig. 1 ). Fig. 1 Activation energy diagram for thermally driven (solid line) and plasma-enhanced (dashed line) chemical vapor deposition reactions. A and B, initial and final...
Abstract
This article discusses the application of amorphous and crystalline films through plasma-enhanced chemical vapor deposition (PECVD) from the view point of microelectronic device fabrication. It describes the various types of PECVD reactors and deposition techniques. Plasma enhancement of the CVD process is discussed briefly. The article also describes the properties of amorphous and crystalline films deposited by the PECVD process for integrated circuit fabrication.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0007039
EISBN: 978-1-62708-170-2
... nitriding requires good analysis of possible physiochemical reactions related to the existence of sputtering, as well as the electrical parameters of the process ( Ref 18 ). Analysis and Recommendations Glow discharge used in the plasma/ion nitriding process generates energetic ions and radicals...
Abstract
Sputtering is a nonthermal vaporization process in which atoms are ejected from the surface of a solid by momentum transfer from energetic particles of atomic or molecular size. Ionized gases in plasma nitriding chambers often possess enough energy to sputter atoms from workload, fixturing, and racking surfaces that are then redeposited to the benefit or detriment of the nitriding process. This article explains how and why sputtering occurs during plasma nitriding and how to recognize and control its effects. It reviews the factors that influence the intensity of sputtering and its effects, whether positive or negative, on treated parts. It also provides recommendations for improving outcomes when nitriding titanium alloys, ferrous metals, particularly stainless steels, and components with complex geometries.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... 48 , 49 ). In reactive deposition, the extent of the reaction depends on the plasma conditions, bombardment conditions, and the availability of the reactive species. By limiting the availability, the composition of a deposit can be varied. For example, in the reactive ion plating of TiN, by reducing...
Abstract
This article begins with a list of the factors that influence the properties of physical vapor deposited films. It describes the steps involved in ion plating, namely, surface preparation, nucleation, interface formation, and film growth. The article discusses the factors influencing the properties of ion-plated films. The sources of potential applied on substrate surface, bombarding species, and depositing species are addressed. The article also provides information on the parameters that influence bombardment. It concludes with a discussion on the advantages, limitations, and applications of ion plating.
Series: ASM Handbook
Volume: 4E
Publisher: ASM International
Published: 01 June 2016
DOI: 10.31399/asm.hb.v04e.a0006273
EISBN: 978-1-62708-169-6
.... Equal success has been obtained with nitriding trials using simple direct current (dc) ( Ref 4 , 10 ), pulsed dc discharge plasma ( Ref 5 , 11 ), as well as high-frequency plasma ( Ref 6 ) and microwave discharge plasma ( Ref 7 , 12 ) ( Table 4 ). In addition, plasma immersion ion implantation (PIII...
Abstract
Aluminum and its alloys are characterized by their low hardness and less satisfactory tribological performance. These limits can be overcome by means of load-specific surface engineering. This article provides information on the structure and properties of nitrided layers, and the technologies and mechanisms used for nitriding aluminum and its alloys. It also describes the nitriding behavior of aluminum alloys. The article concludes by describing how a combination of technologies can be utilized to achieve aluminum nitride with the highest tribological properties.
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005791
EISBN: 978-1-62708-165-8
... Abstract Plasma (ion) nitriding is a method of surface hardening using glow-discharge technology to introduce nascent (elemental) nitrogen to the surface of a metal part for subsequent diffusion into the material. This article describes the procedures and applications of plasma nitriding...
Abstract
Plasma (ion) nitriding is a method of surface hardening using glow-discharge technology to introduce nascent (elemental) nitrogen to the surface of a metal part for subsequent diffusion into the material. This article describes the procedures and applications of plasma nitriding methods of steel. These methods include direct-current plasma nitriding, pulsed-current plasma nitriding, and active-screen plasma nitriding. The article reviews cold-walled and hot-walled furnaces used for plasma nitriding. It provides information on the importance of controlling three process parameters: atmosphere, pressure, and part temperature. The article includes a discussion on the influence of nitrogen concentration on case structure formation on nitrided steel, and explains the significance of microstructure, hardness, and fatigue strength on nitrided case. It also discusses processing, laboratory studies, and applications of nitrocarburizing of steel.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001288
EISBN: 978-1-62708-170-2
... the fundamentals of plasma formation and the interactions on the target surface. A comparison of reactive and nonreactive sputtering is also provided. The article concludes with a discussion on the several methods of process control and the applications of sputtered films. diode sputtering glow discharge...
Abstract
Sputtering is a nonthermal vaporization process in which the surface atoms are physically ejected from a surface by momentum transfer from an energetic bombarding species of atomic/molecular size. It uses a glow discharge or an ion beam to generate a flux of ions incident on the target surface. This article provides an overview of the advantages and limitations of sputter deposition. It focuses on the most common sputtering techniques, namely, diode sputtering, radio-frequency sputtering, triode sputtering, magnetron sputtering, and unbalanced magnetron sputtering. The article discusses the fundamentals of plasma formation and the interactions on the target surface. A comparison of reactive and nonreactive sputtering is also provided. The article concludes with a discussion on the several methods of process control and the applications of sputtered films.
Series: ASM Handbook
Volume: 4E
Publisher: ASM International
Published: 01 June 2016
DOI: 10.31399/asm.hb.v04e.a0006269
EISBN: 978-1-62708-169-6
... N y have higher electrical resistivity and therefore may not be produced very easily in plasma nitriding using glow discharge. No ternary Ti-N-O diagram could be found. Carbon has unlimited solubility in the TiC lattice in a very broad range of temperatures. Therefore, carbon can be used...
Abstract
This article describes the nitriding methods of titanium alloys such as plasma nitriding and gas nitriding. It focuses on the interaction of titanium alloys, interaction of titanium with nitrogen, and the interaction of titanium with oxygen, carbon, and hydrogen. The article provides information on the wear and fatigue properties and corrosion resistance of nitrided titanium alloys, as well as the effect of nitriding on the biocompatibility of titanium. It also compares plasma-nitrided titanium alloys with alloy steels. It concludes with a short discussion on the effect of nitriding on the surface properties of titanium and two-phase α + β alloys.
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006640
EISBN: 978-1-62708-213-6
...-voltage sparks, glow discharges, laser-induced plasma, electrical arcs, and combustion flames—has a set of physical characteristics with accompanying analytical assets and liabilities. They all can be classified as plasma sources. Background information on excitation mechanisms is cited in Ref 7...
Abstract
This article is a detailed account of optical emission spectroscopy (OES) for elemental analysis. It begins with a discussion on the historical background of OES and development trends in OES methods. This is followed by a description of the general principles and optical systems of OES, along with various types of emission sources commonly used for OES. Some of the processes involved in calibration and quantification of OES for direct solids analysis by the ratio method are then described. The article ends with a discussion on the applications of each type of emission sources.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001291
EISBN: 978-1-62708-170-2
... 8. Dorodnov A.M. , Technical Applications of Plasma Accelerators , Sov. Phys.-Tech. Phys. , Vol 23 ( No. 9 ), 1978 , p 1058 – 1065 9. Buhl R. , Moll E. , and Daxinger H. , Method and Apparatus for Evaporating Material Under Vacuum Using Both Arc Discharge...
Abstract
This article describes the characteristics of continuous cathodic arc sources and filtering process for removing macroparticles from a cathodic arc. It provides information on the types of arc sources and the properties of deposited materials. The advantages, limitations, and applications of arc deposition are also discussed.
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006651
EISBN: 978-1-62708-213-6
... frequency A typical ICP-MS instrument includes a peristaltic pump, nebulizer, spray chamber, torch/injector, RF coil, ion source (plasma), cones, and collision/reaction cells ( Fig. 3 ). Peristaltic Pump There are several pump sizes and rates (revolutions per minute) that various manufacturers...
Abstract
This article endeavors to familiarize the reader with a selection of different ionization designs and instrument components to provide knowledge for sorting the various analytical strategies in the field of solid analysis by mass spectrometry (MS). It begins with a description of the general principles of MS. This is followed by sections providing a basic understanding of instrumentation and discussing the operating requirements as well as practical considerations related to solid sample analysis by MS. Instrumentation discussed include the triple quadrupole mass spectrometer and the time-of-flight mass spectrometer. Inductively coupled plasma and thermal ionization MS provide atomic information, and direct analysis in real-time and matrix-assisted laser-desorption ionization MS are used to analyze molecular compositions. The article describes various factors pertinent to ionization methods, namely glow discharge mass spectrometry and secondary ion mass spectrometry. It concludes with a section on various examples of applications and interpretation of MS for various materials.
Series: ASM Handbook
Volume: 6
Publisher: ASM International
Published: 01 January 1993
DOI: 10.31399/asm.hb.v06.a0001421
EISBN: 978-1-62708-173-3
..., friction welding, transient liquid phase bonding, and capacitor discharge welding. aluminum metal-matrix composites capacitor discharge welding chemical reactions electron-beam welding friction welding gas-metal arc welding gas-tungsten arc welding laser-beam welding material selection...
Abstract
The effective integration of aluminum metal-matrix composites (Al-MMCs) into useful structures and devices often requires an understanding of the weldability of Al-MMCs that includes a thorough knowledge on the effects of various interactions between matrix and reinforcement. This article provides a detailed discussion on weldability and the effect of viscosity, chemical reactions, and solidification on weldability. It discusses different welding processes, namely, gas-tungsten arc welding, gas-metal arc welding, laser-beam welding, electron-beam welding, resistance welding, friction welding, transient liquid phase bonding, and capacitor discharge welding.
Series: ASM Handbook
Volume: 6
Publisher: ASM International
Published: 01 January 1993
DOI: 10.31399/asm.hb.v06.a0001336
EISBN: 978-1-62708-173-3
... arc between a nonconsumable tungsten-base electrode and the workpieces to be joined. C.E. Jackson defined a welding arc as “a sustained electrical discharge through a high-temperature conducting plasma producing sufficient thermal energy so as to be useful for the joining of metals by fusion...
Abstract
The gas-tungsten arc welding (GTAW) process is performed using a welding arc between a nonconsumable tungsten-base electrode and the workpieces to be joined. The arc discharge requires a flow of electrons from the cathode through the arc column to the anode. This article discusses two cases of electron discharge at the cathode: thermionic emission and nonthermionic emission, also called cold cathode, or field emission. It schematically illustrates relative heat transfer contributions to workpiece in the GTAW process. The article provides information on the effects of cathode tip shape and shielding gas composition in the GTAW process.
Series: ASM Handbook
Volume: 4D
Publisher: ASM International
Published: 01 October 2014
DOI: 10.31399/asm.hb.v04d.a0005986
EISBN: 978-1-62708-168-9
... plasma nitriding. Source: Ref 12 Because the primary purpose of this chapter is practical/industrial rather than theoretical/academic, focus is on the structure and properties of the nitrided layers produced by various technologies, and the complex reactions that produce them are largely ignored...
Abstract
Nitriding is a general term for all processes based on the addition of nitrogen to the surface of steel. When carbon is added along with the nitrogen, the process is called nitrocarburizing. This article provides a detailed discussion on the functional and structural properties of nitrided layers. It describes the structural changes on the surface of carbon steels, alloy steels, and austenitic stainless steels. The article explains the effects of the various nitriding processes, namely, gaseous nitriding, plasma nitriding, gaseous nitrocarburizing, and salt bath nitrocarburizing, on the structure and properties of nitrided layers.
Series: ASM Handbook
Volume: 4C
Publisher: ASM International
Published: 09 June 2014
DOI: 10.31399/asm.hb.v04c.a0005900
EISBN: 978-1-62708-167-2
... be established on a real industrial scale. New melting and refining processes such as vacuum arc remelting (VAR), electron beam melting (EBM), plasma melting, electroslag remelting (ESR), and vacuum degassing of steel were developed in parallel. Vacuum degassing became part of the secondary metallurgy...
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... Abstract This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions...
Abstract
This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions of materials related to hard, tribological, and high-temperature coatings and to free-standing structures. It concludes by reviewing the advantages, disadvantages, and applications of CVD.
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003219
EISBN: 978-1-62708-199-3
... a coating. Sputtering involves the electrical generation of a plasma between the coating species and the substrate. Ion plating is essentially a combination of these two processes. A fourth type of process is ion implantation, which does not produce a coating; instead, high energy ions are made to penetrate...
Abstract
Physical vapor deposition (PVD) coatings are harder than any metal and are used in applications that cannot tolerate even microscopic wear losses. This article describes the three most common PVD processes: thermal evaporation, sputtering, and ion plating. It also discusses ion implantation in the context of research and development applications.
Series: ASM Handbook
Volume: 4D
Publisher: ASM International
Published: 01 October 2014
DOI: 10.31399/asm.hb.v04d.a0005977
EISBN: 978-1-62708-168-9
... of an effective protective passive layer in stainless steels. It discusses hardness, fatigue and fretting properties, tribological properties, wear resistance, and corrosion-wear process of the S-phase layer. The article describes two thermochemical nitriding techniques of stainless steels: plasma-assisted...
Abstract
Stainless steels are essential for the modern industrial civilization because of their corrosion resistance, especially in the chemical, petrochemical, and food industries. This article discusses the classification of the various types of stainless steels, including martensitic, ferritic, austenitic, duplex (ferritic-austenitic), and precipitation-hardening stainless steels. It presents a checklist of characteristics to be considered in selecting the proper type of stainless steel for a specific application. The article also outlines the need to promote the formation of an effective protective passive layer in stainless steels. It discusses hardness, fatigue and fretting properties, tribological properties, wear resistance, and corrosion-wear process of the S-phase layer. The article describes two thermochemical nitriding techniques of stainless steels: plasma-assisted nitriding techniques and non-plasma assisted nitriding processes. It also describes the difficulties in stainless steel nitriding/carburizing.
Book Chapter
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003685
EISBN: 978-1-62708-182-5
... gases, such as oxygen or nitrogen, can also be used, but they may react chemically with the target. The sputtering process begins when an electric discharge is produced and the argon becomes ionized. The low-pressure electric discharge is known as glow discharge, and the ionized gas is termed plasma...
Abstract
Vapor-deposition processes fall into two major categories, namely, physical vapor deposition (PVD) and chemical vapor deposition (CVD). This article describes major deposition processes such as sputtering, evaporation, ion plating, and CVD. The list of materials that can be vapor deposited is extensive and covers almost any coating requirement. The article provides a table of some corrosion-resistant vapor deposited materials. It concludes with an overview of the applications of CVD and PVD coatings and a discussion on coatings for graphite, the aluminum coating of steel, and alloy coatings for aircraft turbines, marine turbines, and industrial turbines.
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