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plasma discharge reactions

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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001319
EISBN: 978-1-62708-170-2
... Abstract This article provides an overview of plasma surface treatments for plastics. It covers the equipment and methods used in plasma processing, providing detailed explanations of the plasma discharge reactions and how they affect surface state and topography. It also provides information...
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005793
EISBN: 978-1-62708-165-8
.... This article begins with an overview of the theoretical background and the range and limitations of glow-discharge plasma. It describes the plasma carburizing process, which is carried out with methane or propane. Plasma carburizing processes of sinter metals and stainless steels, and the influence of current...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... not to escape. The activation energy for chemical dissociation is typically lower for these plasma-enhanced reactions ( Fig. 1 ). Fig. 1 Activation energy diagram for thermally driven (solid line) and plasma-enhanced (dashed line) chemical vapor deposition reactions. A and B, initial and final...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0007039
EISBN: 978-1-62708-170-2
... nitriding requires good analysis of possible physiochemical reactions related to the existence of sputtering, as well as the electrical parameters of the process ( Ref 18 ). Analysis and Recommendations Glow discharge used in the plasma/ion nitriding process generates energetic ions and radicals...
Book Chapter

By Donald M. Mattox
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... 48 , 49 ). In reactive deposition, the extent of the reaction depends on the plasma conditions, bombardment conditions, and the availability of the reactive species. By limiting the availability, the composition of a deposit can be varied. For example, in the reactive ion plating of TiN, by reducing...
Series: ASM Handbook
Volume: 4E
Publisher: ASM International
Published: 01 June 2016
DOI: 10.31399/asm.hb.v04e.a0006273
EISBN: 978-1-62708-169-6
.... Equal success has been obtained with nitriding trials using simple direct current (dc) ( Ref 4 , 10 ), pulsed dc discharge plasma ( Ref 5 , 11 ), as well as high-frequency plasma ( Ref 6 ) and microwave discharge plasma ( Ref 7 , 12 ) ( Table 4 ). In addition, plasma immersion ion implantation (PIII...
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005791
EISBN: 978-1-62708-165-8
... Abstract Plasma (ion) nitriding is a method of surface hardening using glow-discharge technology to introduce nascent (elemental) nitrogen to the surface of a metal part for subsequent diffusion into the material. This article describes the procedures and applications of plasma nitriding...
Book Chapter

By S.L. Rohde
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001288
EISBN: 978-1-62708-170-2
... the fundamentals of plasma formation and the interactions on the target surface. A comparison of reactive and nonreactive sputtering is also provided. The article concludes with a discussion on the several methods of process control and the applications of sputtered films. diode sputtering glow discharge...
Series: ASM Handbook
Volume: 4E
Publisher: ASM International
Published: 01 June 2016
DOI: 10.31399/asm.hb.v04e.a0006269
EISBN: 978-1-62708-169-6
... N y have higher electrical resistivity and therefore may not be produced very easily in plasma nitriding using glow discharge. No ternary Ti-N-O diagram could be found. Carbon has unlimited solubility in the TiC lattice in a very broad range of temperatures. Therefore, carbon can be used...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006640
EISBN: 978-1-62708-213-6
...-voltage sparks, glow discharges, laser-induced plasma, electrical arcs, and combustion flames—has a set of physical characteristics with accompanying analytical assets and liabilities. They all can be classified as plasma sources. Background information on excitation mechanisms is cited in Ref 7...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001291
EISBN: 978-1-62708-170-2
... 8. Dorodnov A.M. , Technical Applications of Plasma Accelerators , Sov. Phys.-Tech. Phys. , Vol 23 ( No. 9 ), 1978 , p 1058 – 1065 9. Buhl R. , Moll E. , and Daxinger H. , Method and Apparatus for Evaporating Material Under Vacuum Using Both Arc Discharge...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006651
EISBN: 978-1-62708-213-6
... frequency A typical ICP-MS instrument includes a peristaltic pump, nebulizer, spray chamber, torch/injector, RF coil, ion source (plasma), cones, and collision/reaction cells ( Fig. 3 ). Peristaltic Pump There are several pump sizes and rates (revolutions per minute) that various manufacturers...
Series: ASM Handbook
Volume: 6
Publisher: ASM International
Published: 01 January 1993
DOI: 10.31399/asm.hb.v06.a0001421
EISBN: 978-1-62708-173-3
..., friction welding, transient liquid phase bonding, and capacitor discharge welding. aluminum metal-matrix composites capacitor discharge welding chemical reactions electron-beam welding friction welding gas-metal arc welding gas-tungsten arc welding laser-beam welding material selection...
Series: ASM Handbook
Volume: 6
Publisher: ASM International
Published: 01 January 1993
DOI: 10.31399/asm.hb.v06.a0001336
EISBN: 978-1-62708-173-3
... arc between a nonconsumable tungsten-base electrode and the workpieces to be joined. C.E. Jackson defined a welding arc as “a sustained electrical discharge through a high-temperature conducting plasma producing sufficient thermal energy so as to be useful for the joining of metals by fusion...
Series: ASM Handbook
Volume: 4D
Publisher: ASM International
Published: 01 October 2014
DOI: 10.31399/asm.hb.v04d.a0005986
EISBN: 978-1-62708-168-9
... plasma nitriding. Source: Ref 12 Because the primary purpose of this chapter is practical/industrial rather than theoretical/academic, focus is on the structure and properties of the nitrided layers produced by various technologies, and the complex reactions that produce them are largely ignored...
Series: ASM Handbook
Volume: 4C
Publisher: ASM International
Published: 09 June 2014
DOI: 10.31399/asm.hb.v04c.a0005900
EISBN: 978-1-62708-167-2
... be established on a real industrial scale. New melting and refining processes such as vacuum arc remelting (VAR), electron beam melting (EBM), plasma melting, electroslag remelting (ESR), and vacuum degassing of steel were developed in parallel. Vacuum degassing became part of the secondary metallurgy...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... Abstract This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003219
EISBN: 978-1-62708-199-3
... a coating. Sputtering involves the electrical generation of a plasma between the coating species and the substrate. Ion plating is essentially a combination of these two processes. A fourth type of process is ion implantation, which does not produce a coating; instead, high energy ions are made to penetrate...
Series: ASM Handbook
Volume: 4D
Publisher: ASM International
Published: 01 October 2014
DOI: 10.31399/asm.hb.v04d.a0005977
EISBN: 978-1-62708-168-9
... of an effective protective passive layer in stainless steels. It discusses hardness, fatigue and fretting properties, tribological properties, wear resistance, and corrosion-wear process of the S-phase layer. The article describes two thermochemical nitriding techniques of stainless steels: plasma-assisted...
Book Chapter

Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003685
EISBN: 978-1-62708-182-5
... gases, such as oxygen or nitrogen, can also be used, but they may react chemically with the target. The sputtering process begins when an electric discharge is produced and the argon becomes ionized. The low-pressure electric discharge is known as glow discharge, and the ionized gas is termed plasma...