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physical vapor deposited films

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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001286
EISBN: 978-1-62708-170-2
..., and postdeposition changes. It also discusses the effects and causes of growth-related properties of films deposited by physical vapor deposition processes, including residual film stress, density, and adhesion. adhesion atomistic film growth atomistically deposited films composite materials condensation...
Book Chapter

By Donald M. Mattox
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... Abstract This article begins with a list of the factors that influence the properties of physical vapor deposited films. It describes the steps involved in ion plating, namely, surface preparation, nucleation, interface formation, and film growth. The article discusses the factors influencing...
Image
Published: 01 January 1994
Fig. 9 Hall-Williamson plots for physical and chemical vapor deposited titanium nitride, showing increased strain in the physical vapor deposited films More
Book Chapter

Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003685
EISBN: 978-1-62708-182-5
.... , Ion Implantation , p 605 – 610 • Horwitz J.S. , Pulsed-Laser Deposition , p 621 – 626 • Mattox D.M. , Growth and Growth-Related Properties of Films Formed by Physical Vapor Deposition , p 538 – 555 • Mattox D.M. , Ion Plating , p 582 – 592...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001290
EISBN: 978-1-62708-170-2
... Abstract Ion-beam-assisted deposition (IBAD) refers to the process wherein evaporated atoms produced by physical vapor deposition are simultaneously struck by an independently generated flux of ions. This article discusses the energy utilization of this process. It describes the physical...
Series: ASM Handbook
Volume: 9
Publisher: ASM International
Published: 01 December 2004
DOI: 10.31399/asm.hb.v09.a0003749
EISBN: 978-1-62708-177-1
... and describes several methods for film formation, namely, heat tinting, color etching, anodizing, potentiostatic etching, vapor deposition, and film deposition by sputtering. It provides information on the general procedures and precautions for etchants and reagents used in metallographic microetching...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001287
EISBN: 978-1-62708-170-2
... Properties of Films Formed by Physical Vapor Deposition Processes” in this Volume. Deposition of Materials Deposition of Elements Elements are typically deposited by vaporization of the elemental material directly. The purity of the deposited film depends on the purity of the starting material...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003219
EISBN: 978-1-62708-199-3
...-resistant coatings—are discussed below. The coatings used for wear applications are usually hard compounds, and, from the engineer's point of view, thin-film wear coatings can be used for the same type of applications as chromium electroplate. Physical vapor deposition coatings have hardnesses greater than...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001300
EISBN: 978-1-62708-170-2
... thin film vapor deposition X-ray diffraction BOTH METALLURGY AND MATERIALS SCIENCE are concerned with the relationship between structure and the macroscopic properties of materials. Structure can be important at different levels. For example, on the atomic scale, structure dictates the strength...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001311
EISBN: 978-1-62708-170-2
... physical vapor deposition plating polishing scale removal semi-fabricated products soils removal sol-gel coatings sprayed coatings surface modification tarnish films removal titanium titanium alloys wear resistance wire brushing TITANIUM AND ITS ALLOYS are characterized by low density...
Book Chapter

By S.L. Rohde
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001288
EISBN: 978-1-62708-170-2
... bombardment during the condensation process resulted in increased film density of sputter-deposited refractory tantalum with increasing negative bias ( Ref 15 , 16 ). The evolution of film morphology is covered in detail in the article “Growth and Growth-Related Properties of Films Formed by Physical Vapor...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001294
EISBN: 978-1-62708-170-2
... superconductors and ferroelectric materials. angular distribution ferroelectric materials high-temperature superconductors particulates pulsed-laser deposition pulsed-laser deposition equipment PULSED-LASER DEPOSITION (PLD) is a physical vapor deposition (PVD) technique that has gained popularity...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001291
EISBN: 978-1-62708-170-2
... with an ion-component beam uniformity of about 2%. The deposition rate was reported to be approximately 100 nm/s (4 μin./s). The approach taken by Ehrich et al. ( Ref 16 ) used a cathodic arc to supply ionization electrons to the vapor stream ( Fig. 4 ). In this configuration, copper and zinc films were...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... Abstract This article discusses the application of amorphous and crystalline films through plasma-enhanced chemical vapor deposition (PECVD) from the view point of microelectronic device fabrication. It describes the various types of PECVD reactors and deposition techniques. Plasma enhancement...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0005586
EISBN: 978-1-62708-170-2
... PAO polyalphaolefin PAPVD plasma-assisted physical vapor deposition PBT polybutylene terephthalate PCD polycrystalline diamond Pe Péclet number PECVD plasma-enhanced chemical vapor deposition PEM plasma emission monitor PES polyether sulfone...
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0001114
EISBN: 978-1-62708-162-7
... employed conventional physical deposition approaches such as radio frequency (rf) magnetron sputtering, laser ablation, and evaporation and chemical techniques such as metallo-organic chemical vapor deposition (MOCVD). The vapor deposition approach offers some advantages in that the deposition can...
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
...). Physical Vapor Deposition and Related Processes In most PVD processes, film growth units are single atoms or ions emitted from a solid source or target that is simply sublimated by heating or sputtered by energetic ion beam (liquid sources can also be used and evaporated by heating). For deposition...
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005707
EISBN: 978-1-62708-171-9
... (carburizing, nitriding, and boriding) surface modifications, electrochemical treatments (electroplating, and anodizing), chemical treatments (electroless plating, phosphating, and hot dip coating), hardfacing, and thermal spray processes. It provides information on chemical and physical vapor deposition...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006360
EISBN: 978-1-62708-192-4