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metal-organic chemical vapor deposition reactor systems

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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
..., and IV semiconductors. chemical vapor deposition epitaxial deposition group III-V semiconductors group II-VI semiconductors group IV semiconductors kinetics metal-organic chemical vapor deposition metal-organic chemical vapor deposition reactor systems semiconductor films thermodynamics...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... Abstract This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... infrared heat. Fig. 3 Schematic of a remote plasma-enhanced chemical vapor deposition reactor for depositing compound semiconductor films. TMG, trimethylgallium. Source: Ref 23 Hybrid PECVD Systems Hybrid PECVD systems are a combination of the direct and remote PECVD systems. One example...
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003610
EISBN: 978-1-62708-182-5
... Abstract This article provides information on the liquid lithium systems that are exposed to liquid metal. It discusses the forms in which liquid-metal corrosion is manifested. The influence of several key factors on the corrosion of metals and alloys by liquid-metal systems or liquid-vapor...
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004132
EISBN: 978-1-62708-184-9
... in the supercritical regime do not deposit on the reactor walls. This modification has been adopted in Europe by Chematur Engineering ( Ref 1 ). Ultimately, to reduce degradation to an acceptable level in the various regions of SCWO systems handling aggressive influents, it may be necessary to adopt a synergistic...
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004143
EISBN: 978-1-62708-184-9
... Abstract This article describes the eight chemical cleaning methods, namely, circulation, fill and soak, cascade, foam, vapor-phase organic, steam-injected, on-line chemical, and mechanical cleaning. It presents information on deposit types, solvents used to remove them, and construction...
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... chemical vapor deposition, where the main role of the ion beam is to dissociate a gaseous precursor molecule (usually an organometallic compound). A well-known and widely used hybrid CVD-PVD process is reactive magnetron sputtering. In this case, some of the film components, such as metals, are sputtered...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001319
EISBN: 978-1-62708-170-2
... radiation, and therefore the effectiveness of the treatment will vary. The types of reactors used for the deposition of plasma polymers have been varied. Glass and/or quartz reactors or aluminum chambers with metal parallel-plate electrodes seem to predominate in the literature, although several...
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004225
EISBN: 978-1-62708-184-9
... cient (constant) coef cient of thermal expansion electrical discharge machining Stern-Geary constant; boron chlorotri uoroethylene energy-dispersive spectroscopy; balance or remainder corrosion under insulation energy-dispersive x-ray barrel chemical vapor deposition spectroscopy body-centered cubic...
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.9781627081849
EISBN: 978-1-62708-184-9
Series: ASM Handbook
Volume: 5B
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v05b.a0006059
EISBN: 978-1-62708-172-6
... by chemical pretreatment such as through the addition of organic polyelectrolytes and/or organic or inorganic coagulants. There are several versions of media filtration processes. Most are not especially corrosive to the concrete or metals used for filter construction. Fig. 7 Typical tertiary treatment...
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004204
EISBN: 978-1-62708-184-9
... and hydrofluorine silicic acid, which are absorbed by the condensing water vapor. When this contaminated condensate reaches the heated vessel wall in the vapor space, it evaporates, depositing silicon dioxide and liberating the hydrofluorine silicic acid, which then disintegrates into silicon tetrafluoride and HF...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003827
EISBN: 978-1-62708-183-2
... exposure of beryllium that has been studied includes gaseous and liquid metal corrosion. High-Temperature Gas Oxidation The oxidation of beryllium exposed to gases at high temperature has been studied for applications in gas-cooled reactor systems ( Ref 28 , Ref 29 , Ref 30 , Ref 31 , Ref 32...
Series: ASM Handbook
Volume: 21
Publisher: ASM International
Published: 01 January 2001
DOI: 10.31399/asm.hb.v21.a0003421
EISBN: 978-1-62708-195-5
... reactions. The solid materials are deposited from gaseous reactants onto a heated substrate. A typical CVD or CVI process would require a reactor with the following parts: A vapor feed system A CVD reactor in which the substrate is heated and gaseous reactants are fed An effluent system where...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001227
EISBN: 978-1-62708-170-2
... then describes the advantages and disadvantages of organic acid cleaning. Applications, including boiler cleaning, stainless steel cleaning, and removal of iron- and copper-bearing deposits, are discussed. The article concludes with an overview of acid cleaning of nonferrous alloys. acid cleaning boiler...
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0005549
EISBN: 978-1-62708-162-7
... precious metal SHE standard hydrogen electrode MMIC monolithic microwave integrated P/M powder metallurgy SI Systeme International d'Unites circuit PMS PbM06Ss SIS superconductor/insulating! MOCVD metallo-organic chemical vapor POC products of combustion deposition ppb parts per billion superconductor mPa...
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004211
EISBN: 978-1-62708-184-9
... stress, and stress-oriented hydrogen-induced cracking. The article considers hydrogen attack, corrosion fatigue, and liquid metal embrittlement and the methods of combating them. It explains the causes of velocity-accelerated corrosion and erosion-corrosion. The article summarizes some corrective...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003169
EISBN: 978-1-62708-199-3
...) are either an oxide or a sulfide deposit. Several of the oxides or sulfides are present together in a chemically combined form in the deposit. While the oxide or sulfide of a particular metal (usually the highest weight percent) is the primary component being extracted, it must be separated from the others...
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0001091
EISBN: 978-1-62708-162-7
... MOCVD and MBE have advantages and disadvantages. Metal-organic chemical vapor deposition can coat multiple wafers at a time, whereas MBE systems can coat only one. Molecular beam epitaxy requires a vacuum, whereas MOCVD can be performed at atmospheric pressure. The cost of MOCVD equipment...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001318
EISBN: 978-1-62708-170-2
... of the fundamentals of protecting carbon-carbon composites and explains the various coating deposition techniques, namely, pack cementation, chemical vapor deposition, and slurry coatings. It includes information on the practical limitations of coatings for the carbon-carbon composites. aerospace and defense...