Skip Nav Destination
Close Modal
Search Results for
metal-organic chemical vapor deposition reactor systems
Update search
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
NARROW
Format
Topics
Book Series
Date
Availability
1-20 of 134 Search Results for
metal-organic chemical vapor deposition reactor systems
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
1
Sort by
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
..., and IV semiconductors. chemical vapor deposition epitaxial deposition group III-V semiconductors group II-VI semiconductors group IV semiconductors kinetics metal-organic chemical vapor deposition metal-organic chemical vapor deposition reactor systems semiconductor films thermodynamics...
Abstract
This article describes the vapor-phase growth techniques applied to the epitaxial deposition of semiconductor films and discusses the fundamental processes involved in metal-organic chemical vapor deposition (MOCVD). It reviews the thermodynamics that determine the driving force behind the overall growth process and the kinetics that define the rates at which the various processes occur. The article provides information on the reactor systems and hardware, MOCVD starting materials, engineering considerations that optimize growth, and the growth parameters for a variety of Group III-V, II-VI, and IV semiconductors.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... Abstract This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions...
Abstract
This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions of materials related to hard, tribological, and high-temperature coatings and to free-standing structures. It concludes by reviewing the advantages, disadvantages, and applications of CVD.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... infrared heat. Fig. 3 Schematic of a remote plasma-enhanced chemical vapor deposition reactor for depositing compound semiconductor films. TMG, trimethylgallium. Source: Ref 23 Hybrid PECVD Systems Hybrid PECVD systems are a combination of the direct and remote PECVD systems. One example...
Abstract
This article discusses the application of amorphous and crystalline films through plasma-enhanced chemical vapor deposition (PECVD) from the view point of microelectronic device fabrication. It describes the various types of PECVD reactors and deposition techniques. Plasma enhancement of the CVD process is discussed briefly. The article also describes the properties of amorphous and crystalline films deposited by the PECVD process for integrated circuit fabrication.
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003610
EISBN: 978-1-62708-182-5
... Abstract This article provides information on the liquid lithium systems that are exposed to liquid metal. It discusses the forms in which liquid-metal corrosion is manifested. The influence of several key factors on the corrosion of metals and alloys by liquid-metal systems or liquid-vapor...
Abstract
This article provides information on the liquid lithium systems that are exposed to liquid metal. It discusses the forms in which liquid-metal corrosion is manifested. The influence of several key factors on the corrosion of metals and alloys by liquid-metal systems or liquid-vapor metal coolants is described. Some information on safety precautions for handling liquid metals, operating circulating systems, dealing with fire and spillage, and cleaning contaminated components, are also provided.
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004132
EISBN: 978-1-62708-184-9
... in the supercritical regime do not deposit on the reactor walls. This modification has been adopted in Europe by Chematur Engineering ( Ref 1 ). Ultimately, to reduce degradation to an acceptable level in the various regions of SCWO systems handling aggressive influents, it may be necessary to adopt a synergistic...
Abstract
Supercritical water oxidation (SCWO) is an effective process for the destruction of military and industrial wastes including wastewater sludge. This article discusses the unique properties of supercritical water and lists the main technological advantages of SCWO. For many waste streams, corrosion continues to be one of the central challenges to the full development of the SCWO technology. The article presents a summary of selected materials exposed to various environments as well as the observed form of corrosion in a table. It also illustrates the necessity to adopt a synergistic approach incorporating feed chemistry control, reactor design modifications, and intelligent materials selection, for mitigating degradation of SCWO systems.
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004143
EISBN: 978-1-62708-184-9
... Abstract This article describes the eight chemical cleaning methods, namely, circulation, fill and soak, cascade, foam, vapor-phase organic, steam-injected, on-line chemical, and mechanical cleaning. It presents information on deposit types, solvents used to remove them, and construction...
Abstract
This article describes the eight chemical cleaning methods, namely, circulation, fill and soak, cascade, foam, vapor-phase organic, steam-injected, on-line chemical, and mechanical cleaning. It presents information on deposit types, solvents used to remove them, and construction material incompatibilities in a table. The article summarizes the uses of chemical cleaning solutions, including hydrochloric acid, phosphoric acid, and sulfamic acid, as well as the additives used to neutralize their impact on corrosion. It discusses the chemical cleaning procedures, including selection of cleaning method and solvent, documentation of cleaning, and corrosion monitoring in chemical cleaning.
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... chemical vapor deposition, where the main role of the ion beam is to dissociate a gaseous precursor molecule (usually an organometallic compound). A well-known and widely used hybrid CVD-PVD process is reactive magnetron sputtering. In this case, some of the film components, such as metals, are sputtered...
Abstract
This article focuses on transport phenomena and modeling approaches that are specific to vapor-phase processes (VPP). It discusses the VPP for the synthesis of materials. The article reviews the basic notions of molecular collisions and gas flows, and presents transport equations. It describes the modeling of vapor-surface interactions and kinetics of hetereogeneous processes as well as the modeling and kinetics of homogenous reactions in chemical vapor deposition (CVD). The article provides information on the various stages of developing models for numerical simulation of the transport phenomena in continuous media and transition regime flows of VPP. It explains the methods used for molecular modeling in computational materials science. The article also presents examples that illustrate multiscale simulations of CVD or PVD processes and examples that focus on sputtering deposition and reactive or ion beam etching.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001319
EISBN: 978-1-62708-170-2
... radiation, and therefore the effectiveness of the treatment will vary. The types of reactors used for the deposition of plasma polymers have been varied. Glass and/or quartz reactors or aluminum chambers with metal parallel-plate electrodes seem to predominate in the literature, although several...
Abstract
This article provides an overview of plasma surface treatments for plastics. It covers the equipment and methods used in plasma processing, providing detailed explanations of the plasma discharge reactions and how they affect surface state and topography. It also provides information on contamination removal, plasma surface modification, plasma-induced grafting, and plasma film deposition.
Book Chapter
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004225
EISBN: 978-1-62708-184-9
... cient (constant) coef cient of thermal expansion electrical discharge machining Stern-Geary constant; boron chlorotri uoroethylene energy-dispersive spectroscopy; balance or remainder corrosion under insulation energy-dispersive x-ray barrel chemical vapor deposition spectroscopy body-centered cubic...
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.9781627081849
EISBN: 978-1-62708-184-9
Series: ASM Handbook
Volume: 5B
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v05b.a0006059
EISBN: 978-1-62708-172-6
... by chemical pretreatment such as through the addition of organic polyelectrolytes and/or organic or inorganic coagulants. There are several versions of media filtration processes. Most are not especially corrosive to the concrete or metals used for filter construction. Fig. 7 Typical tertiary treatment...
Abstract
This article provides information on the municipal wastewater system components such as piping, pump stations, headworks, clarifiers, aeration structures, digesters, biosolids dewatering equipment, and sludge stabilization. It explains the major corrosion damage mechanisms to which those component parts of the system are exposed. It presents useful guidelines for selecting and using protective coatings in municipal sewerage collection systems and water reclamation facilities in wastewater treatment plants. The article includes annotated flow diagrams of a wastewater collection system, wastewater treatment plants, and spreadsheets listing the most widely used generic coating systems by structure and substrate material. It concludes with a section on quality watchouts when selecting or using protective coatings in municipal wastewater systems.
Book Chapter
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004204
EISBN: 978-1-62708-184-9
... and hydrofluorine silicic acid, which are absorbed by the condensing water vapor. When this contaminated condensate reaches the heated vessel wall in the vapor space, it evaporates, depositing silicon dioxide and liberating the hydrofluorine silicic acid, which then disintegrates into silicon tetrafluoride and HF...
Abstract
This article discusses the materials of construction found in pharmaceutical production facilities. The materials discussed are different stainless steels, nickel and nickel-base alloys, titanium, zirconium, impervious graphite, fluoropolymers, and glass-lined steel. The article describes the three primary causes of failure in the manufacture of pharmaceuticals: embedded iron, failures of glass linings, and corrosion under thermal insulation.
Book: Corrosion: Materials
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003827
EISBN: 978-1-62708-183-2
... exposure of beryllium that has been studied includes gaseous and liquid metal corrosion. High-Temperature Gas Oxidation The oxidation of beryllium exposed to gases at high temperature has been studied for applications in gas-cooled reactor systems ( Ref 28 , Ref 29 , Ref 30 , Ref 31 , Ref 32...
Abstract
This article describes the four major conditions that can cause beryllium to corrode in air. These include beryllium carbide particles exposed at the surface; surface contaminated with halide, sulfate, or nitrate ions; surface contaminated with other electrolyte fluids; and atmosphere that contains halide, sulfate, or nitrate ions. The article provides information on the behavior of beryllium under the combined effects of high-purity water environment, stress and chemical environment, and high-temperature environment. The compositions of the structural grades for intentionally controlled elements and major impurities are tabulated. The article discusses the in-process problems and procedures that are common but avoidable when processing beryllium and aluminum-beryllium composites. It also describes the types of coatings used on beryllium and aluminum-beryllium. These include chemical conversion coatings, anodized coatings, plated coatings, organic coatings, and plasma-sprayed coatings.
Book: Composites
Series: ASM Handbook
Volume: 21
Publisher: ASM International
Published: 01 January 2001
DOI: 10.31399/asm.hb.v21.a0003421
EISBN: 978-1-62708-195-5
... reactions. The solid materials are deposited from gaseous reactants onto a heated substrate. A typical CVD or CVI process would require a reactor with the following parts: A vapor feed system A CVD reactor in which the substrate is heated and gaseous reactants are fed An effluent system where...
Abstract
Ceramic-matrix composites (CMCs) have ability to withstand high temperatures and have superior damage tolerance over monolithic ceramics. This article describes important processing techniques for CMCs: cold pressing, sintering, hot pressing, reaction-bonding, directed oxidation, in situ chemical reaction techniques, sol-gel techniques, pyrolysis, polymer infiltration, self-propagating high-temperature synthesis, and electrophoretic deposition. The advantages and disadvantages of each technique are highlighted to provide a comprehensive understanding of the achievements and challenges that remain in this area.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001227
EISBN: 978-1-62708-170-2
... then describes the advantages and disadvantages of organic acid cleaning. Applications, including boiler cleaning, stainless steel cleaning, and removal of iron- and copper-bearing deposits, are discussed. The article concludes with an overview of acid cleaning of nonferrous alloys. acid cleaning boiler...
Abstract
This article focuses on the mineral and organic acid cleaning of iron and steel. It begins with a discussion on the application methods, process selection criteria, solution composition, equipment used, and control of process variables in mineral acid cleaning. The article then describes the advantages and disadvantages of organic acid cleaning. Applications, including boiler cleaning, stainless steel cleaning, and removal of iron- and copper-bearing deposits, are discussed. The article concludes with an overview of acid cleaning of nonferrous alloys.
Book Chapter
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0005549
EISBN: 978-1-62708-162-7
... precious metal SHE standard hydrogen electrode MMIC monolithic microwave integrated P/M powder metallurgy SI Systeme International d'Unites circuit PMS PbM06Ss SIS superconductor/insulating! MOCVD metallo-organic chemical vapor POC products of combustion deposition ppb parts per billion superconductor mPa...
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004211
EISBN: 978-1-62708-184-9
... stress, and stress-oriented hydrogen-induced cracking. The article considers hydrogen attack, corrosion fatigue, and liquid metal embrittlement and the methods of combating them. It explains the causes of velocity-accelerated corrosion and erosion-corrosion. The article summarizes some corrective...
Abstract
This article presents the primary considerations and mechanisms for corrosion and explains how they are involved in the selection of materials for process equipment in refineries and petrochemical plants. It discusses the material selection criteria for a number of ferrous and nonferrous alloys used in petroleum refining and petrochemical applications. The article reviews the mechanical properties, fabricability, and corrosion resistance of refinery steels. It describes low- and high-temperature corrosion, hydrogen embrittlement, and cracking such as stress-corrosion, sulfide stress, and stress-oriented hydrogen-induced cracking. The article considers hydrogen attack, corrosion fatigue, and liquid metal embrittlement and the methods of combating them. It explains the causes of velocity-accelerated corrosion and erosion-corrosion. The article summarizes some corrective measures that can be implemented to control corrosion. The applicable standards for materials used in corrosive service conditions in upstream and downstream petroleum service are presented in a tabular form.
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003169
EISBN: 978-1-62708-199-3
...) are either an oxide or a sulfide deposit. Several of the oxides or sulfides are present together in a chemically combined form in the deposit. While the oxide or sulfide of a particular metal (usually the highest weight percent) is the primary component being extracted, it must be separated from the others...
Abstract
Ores, which consist of the primary valuable mineral, predominant gangue content, valuable by-products, and detrimental impurities, are extracted and directed to mineral processing. This article describes the mineral processing facilities, such as crushers, grinders, concentrators, separators, and flotation devices that are used for particle size reduction, separation of particles according to their settling rates in fluids and dewatering of concentrate particles. It explains the basic principles, flow diagrams, ore concentrate preparation methods, and equipment of major types of metallurgical processes, including pyrometallurgical, hydrometallurgical, and electrometallurgical processes.
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0001091
EISBN: 978-1-62708-162-7
... MOCVD and MBE have advantages and disadvantages. Metal-organic chemical vapor deposition can coat multiple wafers at a time, whereas MBE systems can coat only one. Molecular beam epitaxy requires a vacuum, whereas MOCVD can be performed at atmospheric pressure. The cost of MOCVD equipment...
Abstract
Gallium-base components can be found in a variety of products ranging from compact disk players to advanced military electronic warfare systems, owing to the factor that it can emit light, has a greater resistance to radiation and operates at faster speeds and higher temperatures. This article discusses the uses of gallium in optoelectronic devices and integrated circuits and applications of gallium. The article discusses the properties and grades of gallium arsenide and also provides information on resources of gallium. The article talks about the recovery techniques, including recovery from bauxite, zinc ore and secondary recovery process and purification. The article briefly describes the fabrication process of gallium arsenide crystals. Furthermore, the article gives a short note on world supply and demand of gallium and concludes with research and development on gallium arsenide integrated circuits.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001318
EISBN: 978-1-62708-170-2
... of the fundamentals of protecting carbon-carbon composites and explains the various coating deposition techniques, namely, pack cementation, chemical vapor deposition, and slurry coatings. It includes information on the practical limitations of coatings for the carbon-carbon composites. aerospace and defense...
Abstract
Carbon-carbon is a unique composite material in which a nonstructural carbonaceous matrix is reinforced by carbon fibers to create a heat-resistant structural material that finds application in the aerospace and defense industries. This article provides a detailed account of the fundamentals of protecting carbon-carbon composites and explains the various coating deposition techniques, namely, pack cementation, chemical vapor deposition, and slurry coatings. It includes information on the practical limitations of coatings for the carbon-carbon composites.
1