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metal-organic chemical vapor deposition reactor systems
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Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
...-V, II-VI, and IV semiconductors. chemical vapor deposition epitaxial deposition group III-V semiconductors group II-VI semiconductors group IV semiconductors kinetics metal-organic chemical vapor deposition metal-organic chemical vapor deposition reactor systems semiconductor films...
Abstract
This article describes the vapor-phase growth techniques applied to the epitaxial deposition of semiconductor films and discusses the fundamental processes involved in metal-organic chemical vapor deposition (MOCVD). It reviews the thermodynamics that determine the driving force behind the overall growth process and the kinetics that define the rates at which the various processes occur. The article provides information on the reactor systems and hardware, MOCVD starting materials, engineering considerations that optimize growth, and the growth parameters for a variety of Group III-V, II-VI, and IV semiconductors.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... Abstract This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions...
Abstract
This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions of materials related to hard, tribological, and high-temperature coatings and to free-standing structures. It concludes by reviewing the advantages, disadvantages, and applications of CVD.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... in the growth rate was observed. Fig. 5 Reactor for plasma-enhanced chemical vapor deposition of epitaxial silicon films. QMS, quadruple mass spectrometer. Source: Ref 48 The deposition of refractory metals and their silicides with the PECVD process has been a subject of investigation...
Abstract
This article discusses the application of amorphous and crystalline films through plasma-enhanced chemical vapor deposition (PECVD) from the view point of microelectronic device fabrication. It describes the various types of PECVD reactors and deposition techniques. Plasma enhancement of the CVD process is discussed briefly. The article also describes the properties of amorphous and crystalline films deposited by the PECVD process for integrated circuit fabrication.
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... difficult task. Fig. 10 Structure of a chemical vapor deposition (CVD) reactor simulation. PDE, partial differential equation A few representative examples are now briefly presented to illustrate the interest and capability of CVD reactor modeling. Several very good review articles on transport...
Abstract
This article focuses on transport phenomena and modeling approaches that are specific to vapor-phase processes (VPP). It discusses the VPP for the synthesis of materials. The article reviews the basic notions of molecular collisions and gas flows, and presents transport equations. It describes the modeling of vapor-surface interactions and kinetics of hetereogeneous processes as well as the modeling and kinetics of homogenous reactions in chemical vapor deposition (CVD). The article provides information on the various stages of developing models for numerical simulation of the transport phenomena in continuous media and transition regime flows of VPP. It explains the methods used for molecular modeling in computational materials science. The article also presents examples that illustrate multiscale simulations of CVD or PVD processes and examples that focus on sputtering deposition and reactive or ion beam etching.
Series: ASM Handbook
Volume: 5B
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v05b.a0006059
EISBN: 978-1-62708-172-6
... copper copper alloys corrosion control ductile iron ferrous metals localized corrosion microbiologically influenced corrosion municipal wastewater systems protective coatings reinforced concrete pipes wastewater treatment THE PURPOSE OF THIS ARTICLE is to acquaint the reader with useful...
Abstract
This article provides information on the municipal wastewater system components such as piping, pump stations, headworks, clarifiers, aeration structures, digesters, biosolids dewatering equipment, and sludge stabilization. It explains the major corrosion damage mechanisms to which those component parts of the system are exposed. It presents useful guidelines for selecting and using protective coatings in municipal sewerage collection systems and water reclamation facilities in wastewater treatment plants. The article includes annotated flow diagrams of a wastewater collection system, wastewater treatment plants, and spreadsheets listing the most widely used generic coating systems by structure and substrate material. It concludes with a section on quality watchouts when selecting or using protective coatings in municipal wastewater systems.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001304
EISBN: 978-1-62708-170-2
..., hot-dip coating processes, electrogalvanizing, electroplating, metal cladding, organic coatings, zinc-rich coatings, porcelain enameling, thermal spraying, hardfacing, vapor-deposited coatings, surface modification, and surface hardening via heat treatment. alloy steel cadmium plating carbon...
Abstract
This article discusses the classifications, compositions, properties, advantages, disadvantages, limitations, and applications of the most commonly used methods for surface engineering of carbon and alloy steels. These include cleaning methods, finishing methods, conversion coatings, hot-dip coating processes, electrogalvanizing, electroplating, metal cladding, organic coatings, zinc-rich coatings, porcelain enameling, thermal spraying, hardfacing, vapor-deposited coatings, surface modification, and surface hardening via heat treatment.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001318
EISBN: 978-1-62708-170-2
..., coefficient of thermal expansion; CVD, chemical vapor deposition; EBPVD, electron-beam physical vapor deposition Fig. 3 Calculated thermal stresses for thin coatings on high-performance carbon-carbon laminates. Ratio of substrate thickness to coating thickness = 20 The coating system used on...
Abstract
Coating technology for carbon-carbon has been driven primarily by the aerospace and defense industries, in applications where the composite is exposed to high-temperature oxidizing environments. The most notable application of coated carbon-carbon is for the nose cap and wing leading edges of the Shuttle Orbiter vehicle. This article details the fundamentals of protecting carbon-carbon composites. It explains various coating deposition techniques: pack cementation, chemical vapor deposition, and slurry coatings. The article discusses typical coating architectures in accordance with the process used to deposit the primary oxygen barrier. It also provides information on the practical limitations of coatings for the composites.
Series: ASM Handbook
Volume: 5B
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v05b.a0006012
EISBN: 978-1-62708-172-6
... carbon nanotubes, silica, metals/metal oxides, ceramics, clays, buckyballs, graphene, polymers, titanium dioxide, and waxes. These can be produced by a variety of methods, including chemical vapor deposition, plasma arcing, electrodeposition, sol-gel synthesis, and ball milling. The application of...
Abstract
Nanotechnology and smart-coating technologies have been reported to show great promise for improved performance in critical areas such as corrosion resistance, durability, and conductivity. This article exemplifies nanofilms and nanomaterials used in coatings applications, including carbon nanotubes, silica, metals/metal oxides, ceramics, clays, buckyballs, graphene, polymers, titanium dioxide, and waxes. These can be produced by a variety of methods, including chemical vapor deposition, plasma arcing, electrodeposition, sol-gel synthesis, and ball milling. The application of nanotechnology and the development of smart coatings have been dependent largely on the availability of analytical and imaging techniques such as Raman spectroscopy, scanning and transmission electron microscopy, atomic force microscopy, and scanning tunneling microscopy.
Book: Corrosion: Materials
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003826
EISBN: 978-1-62708-183-2
... hafnium in specific media, namely, water, steam, hydrochloric acid, nitric acid, sulfuric acid, alkalis, organics, molten metals, and gases. Forms of corrosion, namely, galvanic corrosion, crevice corrosion, and pitting corrosion are included. The article explains the corrosion of hafnium alloys such as...
Abstract
This article describes the processes involved in the production of hafnium and its alloys. It discusses the physical, mechanical and chemical properties of hafnium. The aqueous corrosion testing of hafnium and its alloys is detailed. The article reviews the corrosion resistance of hafnium in specific media, namely, water, steam, hydrochloric acid, nitric acid, sulfuric acid, alkalis, organics, molten metals, and gases. Forms of corrosion, namely, galvanic corrosion, crevice corrosion, and pitting corrosion are included. The article explains the corrosion of hafnium alloys such as hafnium-zirconium alloys and hafnium-tantalum alloys. It also deals with the applications of hafnium and its alloys in the nuclear and chemical industries.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001310
EISBN: 978-1-62708-170-2
... cleaning methods include vapor degreasing, emulsion cleaning, alkaline soak cleaning, and water rinsing. Finally, the magnesium surface must be activated chemically before it can accept either of the recommended metal undercoatings. Organic finishes are used on magnesium alloys to...
Abstract
Surface treatments are applied to magnesium parts primarily to improve their appearance and corrosion resistance. Mechanical and chemical cleaning methods are used singly or in combination, depending on the specific application and product involved to ensure repetitive reliability. This article focuses on mechanical finishing methods, namely, barrel tumbling, polishing, buffing, vibratory finishing, fiber brushing, and shot blasting. It provides useful information on process control and difficulties with chemical and anodic treatments of magnesium alloys. The use and applications of plating and organic finishing of magnesium alloys are also reviewed. The article concludes with a description of health and safety precautions to be followed during the surface treatment process.
Book: Corrosion: Materials
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003821
EISBN: 978-1-62708-183-2
... corrosive media include: hydrochloric acid, sulfuric acid, phosphoric acid, hydrofluoric acid, hydrobromic acid, nitric acid, organic acids, salts, seawater, and alkalis. The modes of high-temperature corrosion include oxidation, carburization, metal dusting, sulfidation, nitridation, corrosion by halogens...
Abstract
This article reviews the corrosion behavior in various environments for seven important nickel alloy families: commercially pure nickel, Ni-Cu, Ni-Mo, Ni-Cr, Ni-Cr-Mo, Ni-Cr-Fe, and Ni-Fe-Cr. It examines the behavior of nickel alloys in corrosive media found in industrial settings. The corrosive media include: hydrochloric acid, sulfuric acid, phosphoric acid, hydrofluoric acid, hydrobromic acid, nitric acid, organic acids, salts, seawater, and alkalis. The modes of high-temperature corrosion include oxidation, carburization, metal dusting, sulfidation, nitridation, corrosion by halogens, and corrosion by molten salts. Applications where the corrosion properties of nickel alloys are important factors in materials selection include the petroleum, chemical, and electrical power industries. Most nickel alloys are much more resistant than the stainless steels to reducing acids, such as hydrochloric, and some are extremely resistant to the chloride-induced phenomena of pitting, crevice attack, and stress-corrosion cracking (to which the stainless steels are susceptible). Nickel alloys are also among the few metallic materials able to cope with hot hydrofluoric acid. The conditions where nickel alloys suffer environmentally assisted cracking are highly specific and therefore avoidable by proper design of the industrial components.
Book: Corrosion: Materials
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003828
EISBN: 978-1-62708-183-2
..., and environment because these differences often change crack growth rates more than the initiation K ISCC . Oxide, organic, and metallic coatings have been tested on uranium and lean uranium alloys for improved corrosion resistance. Of the numerous coating systems investigated, the most...
Abstract
This article reviews general corrosion of uranium and its alloys under atmospheric and aqueous exposure as well as with gaseous environments. It describes the dependence of uranium and uranium alloy corrosion on microstructure, alloying, solution chemistry, and temperature as well as galvanic interactions between uranium, its alloys, and other metals. The article provides information on the atmospheric corrosion of uranium based on oxidation in dry air or oxygen, water vapor, and oxygen-water vapor mixtures depending upon particular storage conditions. The mechanism and morphology of hydride corrosion of uranium are discussed. The article provides information on environmentally assisted cracking, protective coatings, and surface modification of uranium and its alloys. It also summarizes the environmental, safety, and health considerations for their use.
Book: Corrosion: Materials
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003812
EISBN: 978-1-62708-183-2
... 1970s to provide a systematic and encyclopedic listing of metal alloys, including the stainless steels. Although not perfect, the UNS numbering system has been successful in maintaining a degree of order during a period when many new grades were introduced. Most stainless steels—those having more than...
Abstract
This article provides an overview of the identification systems for various grades of wrought stainless steels, namely, the American Iron and Steel Institute numbering system, the Unified Numbering System, and proprietary designations. It elaborates on five major families of stainless steels, as defined by the crystallographic structure. These include ferritic stainless steels, austenitic stainless steels, martensitic stainless steels, and precipitation-hardening stainless steels. The mechanism of corrosion protection for stainless steels is reviewed. The article examines the effects of composition, processing, design, fabrication, and external treatments on the corrosion of stainless steels. Various forms of corrosion, namely, general, galvanic, pitting, crevice, intergranular, stress-corrosion cracking, erosion-corrosion, and oxidation, are reviewed. Corrosion testing for; corrosion in atmosphere, water, and chemical environments; and the applications of stainless steels in various industries are also discussed.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001319
EISBN: 978-1-62708-170-2
... for the deposition of plasma polymers have been varied. Glass and/or quartz reactors or aluminum chambers with metal parallel-plate electrodes seem to predominate in the literature, although several investigators have used inductively or capacitively coupled systems with external electrodes. High...
Abstract
This article provides an overview of plasma surface treatments for plastics. It covers the equipment and methods used in plasma processing, providing detailed explanations of the plasma discharge reactions and how they affect surface state and topography. It also provides information on contamination removal, plasma surface modification, plasma-induced grafting, and plasma film deposition.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001227
EISBN: 978-1-62708-170-2
... pressurized water reactor nuclear power plant steam generators, the accumulation of secondary side corrosion deposits and impurities forms sludges that are composed primarily of metal oxides and metallic copper deposits. To remove these deposits, the following solution has been found effective: Iron...
Abstract
This article focuses on the mineral and organic acid cleaning of iron and steel. It begins with a discussion on the application methods, process selection criteria, solution composition, equipment used, and control of process variables in mineral acid cleaning. The article then describes the advantages and disadvantages of organic acid cleaning. Applications, including boiler cleaning, stainless steel cleaning, and removal of iron- and copper-bearing deposits, are discussed. The article concludes with an overview of acid cleaning of nonferrous alloys.
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003054
EISBN: 978-1-62708-200-6
... type of material used as the resistance heating element: Graphite Refractory metal Nonoxide ceramics Oxide ceramics Graphite is an excellent material for resistance heating elements because it has an extremely low vapor pressure. Even at 4000 K (6740 °F), the vapor pressure of the...
Abstract
Sintering provides the interparticle bonding that generates the attractive forces needed to hold together the otherwise loose ceramic powder mass. It also improves hardness, strength, transparency, toughness, electrical conductivity, thermal expansion, magnetic saturation, corrosion resistance, and other properties. This article discusses the fundamentals of sintering and its effects on pore structures and particle density. It addresses some of the more common sintering methods, including solid-state, liquid-phase, and gas pressure sintering, and presents alternative processes such as reaction sintering and self-propagating, high-temperature synthesis. It also describes several pressure densification methods, including hot isostatic pressing, gas pressure sintering, molten particle deposition, and sol-gel processing. The article concludes with a section on grain growth that discusses the underlying mechanisms and kinetics and the relationship between grain growth and densification.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001264
EISBN: 978-1-62708-170-2
... ) ASTM B 656, Autocatalytic Nickel Deposition on Metals for Engineering Use ( Ref 43 ) Military Specification Requirements for Electroless Nickel Coatings ( Ref 52 ) In addition, an international standard has been drafted by the International Standards Organization ( Ref 50 ). Published standards...
Abstract
Electroless nickel plating is used to deposit nickel without the use of an electric current. This article provides an overview of the solution composition and characteristics of the electroless nickel bath. It focuses on the metallurgical, mechanical and physical properties of electroless nickel-phosphorus coatings and electroless nickel-boron coatings. The effect of electroless nickel coatings on the fatigue strength of steel is also described. The article includes information on the recommended pretreatment procedures for different ferrous alloys, aluminum alloys, and copper alloys. It presents a detailed account of the equipment and various processes—including bulk and barrel plating—involved in electroless nickel plating, and discusses hydrogen relief methods. The article includes a comprehensive table on nickel plating applications, and concludes with information on electroless nickel coatings on composites and plastics.
Book: Corrosion: Materials
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003827
EISBN: 978-1-62708-183-2
... can be applied over a cleaned metal surface but form a better bond with the substrate when applied over a chemical conversion coating or anodized surface. Organic coatings include paints, epoxy primers, and, more recently, powder coatings for improved corrosion protection. An advantage of organic...
Abstract
This article describes the four major conditions that can cause beryllium to corrode in air. These include beryllium carbide particles exposed at the surface; surface contaminated with halide, sulfate, or nitrate ions; surface contaminated with other electrolyte fluids; and atmosphere that contains halide, sulfate, or nitrate ions. The article provides information on the behavior of beryllium under the combined effects of high-purity water environment, stress and chemical environment, and high-temperature environment. The compositions of the structural grades for intentionally controlled elements and major impurities are tabulated. The article discusses in-process problems and procedures with beryllium and aluminum-beryllium composites to prevent corrosion during processing, handling, and storage. It also describes the types of coatings used on beryllium and aluminum-beryllium. These include chemical conversion coatings, anodized coatings, plated coatings, organic coatings, and plasma-sprayed coatings.
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003221
EISBN: 978-1-62708-199-3
... silicide and aluminide diffusion coatings, oxide, nickel-chromium, and chromium carbide coatings deposited by thermal spray techniques, and precious metal coatings. A guide to these coating systems can be found in the Section “Refractory Metals and Alloys” in this Handbook. Most polishing operations...
Abstract
This article discusses surface engineering of nonferrous metals including aluminum and aluminum alloys, copper and copper alloys, magnesium alloys, nickel and nickel alloys, titanium and titanium alloys, zirconium and hafnium, zinc alloys, and refractory metals and alloys. It describes various techniques to improve functional surface properties and enhance the appearance of product forms. The article discusses various cleaning and finishing techniques such as abrasive blast cleaning, polishing and buffing, barrel burnishing, chemical cleaning, pickling, etching and bright dipping, electrochemical cleaning, mechanical cleaning, and mass finishing. It also examines coating processes such as plating, anodizing, chemical conversion coating, and thermal spray, and concludes with a discussion on oxidation-resistant coatings for refractory metals.
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003052
EISBN: 978-1-62708-200-6
... 2 O 8 Barium, strontium, calcium salts (chlorides, carbonates, nitrates, and peroxides) Superconductivity Very low insertion losses Microwave filters Bi 2 Sr 2 Ca 2 Cu 3 O 10 stabilized with PbO High-purity oxides Coprecipitation, sol-gel, metal alkoxides, sputtering, chemical vapor...
Abstract
This article explains how ceramic powders are made. It begins by briefly describing the raw materials used in structural clay products, whitewares, refractories, and advanced ceramics. It then examines various additives that promote uniformity at different stages of the process. After a description of the comminution process (wet and dry milling methods), it discusses batching and mixing operations and granulation methods. The article also deals with the effect of process variables and the steps involved in chemical synthesis, including preparation from solution and gas-phase reactions, filtration and washing, and powder recovery techniques. It concludes with a discussion on characterization, centering on size distribution analysis, specific surface area, density, porosity chemical composition, phase, and surface composition.