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metal-organic chemical vapor deposition reactor systems

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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
...-V, II-VI, and IV semiconductors. chemical vapor deposition epitaxial deposition group III-V semiconductors group II-VI semiconductors group IV semiconductors kinetics metal-organic chemical vapor deposition metal-organic chemical vapor deposition reactor systems semiconductor films...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... Abstract This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... in the growth rate was observed. Fig. 5 Reactor for plasma-enhanced chemical vapor deposition of epitaxial silicon films. QMS, quadruple mass spectrometer. Source: Ref 48 The deposition of refractory metals and their silicides with the PECVD process has been a subject of investigation...
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... difficult task. Fig. 10 Structure of a chemical vapor deposition (CVD) reactor simulation. PDE, partial differential equation A few representative examples are now briefly presented to illustrate the interest and capability of CVD reactor modeling. Several very good review articles on transport...
Series: ASM Handbook
Volume: 5B
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v05b.a0006059
EISBN: 978-1-62708-172-6
... copper copper alloys corrosion control ductile iron ferrous metals localized corrosion microbiologically influenced corrosion municipal wastewater systems protective coatings reinforced concrete pipes wastewater treatment THE PURPOSE OF THIS ARTICLE is to acquaint the reader with useful...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001304
EISBN: 978-1-62708-170-2
..., hot-dip coating processes, electrogalvanizing, electroplating, metal cladding, organic coatings, zinc-rich coatings, porcelain enameling, thermal spraying, hardfacing, vapor-deposited coatings, surface modification, and surface hardening via heat treatment. alloy steel cadmium plating carbon...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001318
EISBN: 978-1-62708-170-2
..., coefficient of thermal expansion; CVD, chemical vapor deposition; EBPVD, electron-beam physical vapor deposition Fig. 3 Calculated thermal stresses for thin coatings on high-performance carbon-carbon laminates. Ratio of substrate thickness to coating thickness = 20 The coating system used on...
Series: ASM Handbook
Volume: 5B
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v05b.a0006012
EISBN: 978-1-62708-172-6
... carbon nanotubes, silica, metals/metal oxides, ceramics, clays, buckyballs, graphene, polymers, titanium dioxide, and waxes. These can be produced by a variety of methods, including chemical vapor deposition, plasma arcing, electrodeposition, sol-gel synthesis, and ball milling. The application of...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003826
EISBN: 978-1-62708-183-2
... hafnium in specific media, namely, water, steam, hydrochloric acid, nitric acid, sulfuric acid, alkalis, organics, molten metals, and gases. Forms of corrosion, namely, galvanic corrosion, crevice corrosion, and pitting corrosion are included. The article explains the corrosion of hafnium alloys such as...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001310
EISBN: 978-1-62708-170-2
... cleaning methods include vapor degreasing, emulsion cleaning, alkaline soak cleaning, and water rinsing. Finally, the magnesium surface must be activated chemically before it can accept either of the recommended metal undercoatings. Organic finishes are used on magnesium alloys to...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003821
EISBN: 978-1-62708-183-2
... corrosive media include: hydrochloric acid, sulfuric acid, phosphoric acid, hydrofluoric acid, hydrobromic acid, nitric acid, organic acids, salts, seawater, and alkalis. The modes of high-temperature corrosion include oxidation, carburization, metal dusting, sulfidation, nitridation, corrosion by halogens...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003828
EISBN: 978-1-62708-183-2
..., and environment because these differences often change crack growth rates more than the initiation K ISCC . Oxide, organic, and metallic coatings have been tested on uranium and lean uranium alloys for improved corrosion resistance. Of the numerous coating systems investigated, the most...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003812
EISBN: 978-1-62708-183-2
... 1970s to provide a systematic and encyclopedic listing of metal alloys, including the stainless steels. Although not perfect, the UNS numbering system has been successful in maintaining a degree of order during a period when many new grades were introduced. Most stainless steels—those having more than...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001319
EISBN: 978-1-62708-170-2
... for the deposition of plasma polymers have been varied. Glass and/or quartz reactors or aluminum chambers with metal parallel-plate electrodes seem to predominate in the literature, although several investigators have used inductively or capacitively coupled systems with external electrodes. High...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001227
EISBN: 978-1-62708-170-2
... pressurized water reactor nuclear power plant steam generators, the accumulation of secondary side corrosion deposits and impurities forms sludges that are composed primarily of metal oxides and metallic copper deposits. To remove these deposits, the following solution has been found effective: Iron...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003054
EISBN: 978-1-62708-200-6
... type of material used as the resistance heating element: Graphite Refractory metal Nonoxide ceramics Oxide ceramics Graphite is an excellent material for resistance heating elements because it has an extremely low vapor pressure. Even at 4000 K (6740 °F), the vapor pressure of the...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001264
EISBN: 978-1-62708-170-2
... ) ASTM B 656, Autocatalytic Nickel Deposition on Metals for Engineering Use ( Ref 43 ) Military Specification Requirements for Electroless Nickel Coatings ( Ref 52 ) In addition, an international standard has been drafted by the International Standards Organization ( Ref 50 ). Published standards...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003827
EISBN: 978-1-62708-183-2
... can be applied over a cleaned metal surface but form a better bond with the substrate when applied over a chemical conversion coating or anodized surface. Organic coatings include paints, epoxy primers, and, more recently, powder coatings for improved corrosion protection. An advantage of organic...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003221
EISBN: 978-1-62708-199-3
... silicide and aluminide diffusion coatings, oxide, nickel-chromium, and chromium carbide coatings deposited by thermal spray techniques, and precious metal coatings. A guide to these coating systems can be found in the Section “Refractory Metals and Alloys” in this Handbook. Most polishing operations...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003052
EISBN: 978-1-62708-200-6
... 2 O 8 Barium, strontium, calcium salts (chlorides, carbonates, nitrates, and peroxides) Superconductivity Very low insertion losses Microwave filters Bi 2 Sr 2 Ca 2 Cu 3 O 10 stabilized with PbO High-purity oxides Coprecipitation, sol-gel, metal alkoxides, sputtering, chemical vapor...