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metal-organic chemical vapor deposition
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Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
... Abstract This article describes the vapor-phase growth techniques applied to the epitaxial deposition of semiconductor films and discusses the fundamental processes involved in metal-organic chemical vapor deposition (MOCVD). It reviews the thermodynamics that determine the driving force behind...
Abstract
This article describes the vapor-phase growth techniques applied to the epitaxial deposition of semiconductor films and discusses the fundamental processes involved in metal-organic chemical vapor deposition (MOCVD). It reviews the thermodynamics that determine the driving force behind the overall growth process and the kinetics that define the rates at which the various processes occur. The article provides information on the reactor systems and hardware, MOCVD starting materials, engineering considerations that optimize growth, and the growth parameters for a variety of Group III-V, II-VI, and IV semiconductors.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... Abstract This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions...
Abstract
This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions of materials related to hard, tribological, and high-temperature coatings and to free-standing structures. It concludes by reviewing the advantages, disadvantages, and applications of CVD.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... in the growth rate was observed. Fig. 5 Reactor for plasma-enhanced chemical vapor deposition of epitaxial silicon films. QMS, quadruple mass spectrometer. Source: Ref 48 The deposition of refractory metals and their silicides with the PECVD process has been a subject of investigation...
Abstract
This article discusses the application of amorphous and crystalline films through plasma-enhanced chemical vapor deposition (PECVD) from the view point of microelectronic device fabrication. It describes the various types of PECVD reactors and deposition techniques. Plasma enhancement of the CVD process is discussed briefly. The article also describes the properties of amorphous and crystalline films deposited by the PECVD process for integrated circuit fabrication.
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003219
EISBN: 978-1-62708-199-3
... vacuum without involving a chemical reaction. Today, PVD technology has evolved so that a wide array of inorganic materials (including metals, alloys, compounds, or their mixtures) and organic compounds can be deposited. The PVD process occurs in a vacuum chamber and involves a vapor source and the...
Abstract
Physical vapor deposition (PVD) coatings are harder than any metal and are used in applications that cannot tolerate even microscopic wear losses. This article describes the three most common PVD processes: thermal evaporation, sputtering, and ion plating. It also discusses ion implantation in the context of research and development applications.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001286
EISBN: 978-1-62708-170-2
... electropositive and electronegative metals that chemically bond to form compounds with a specific composition and crystalline structure. Intermetallic films are often formed by depositing the film material on a hot surface so that the adatoms diffuse and react with the surface material, converting it into a...
Abstract
This article describes eight stages of the atomistic film growth: vaporization of the material, transport of the material to the substrate, condensation and nucleation of the atoms, nuclei growth, interface formation, film growth, changes in structure during the deposition, and postdeposition changes. It also discusses the effects and causes of growth-related properties of films deposited by physical vapor deposition processes, including residual film stress, density, and adhesion.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001223
EISBN: 978-1-62708-170-2
... recovery solvent waste solvent waste disposal spray system equipment surface preparation temperature baths vapor degreasing SOLVENT CLEANING is a surface preparation process that is especially adept at removing organic compounds such as grease or oil from the surface of a metal. Most organic...
Abstract
Solvent cleaning is a surface preparation process that can be accomplished in room temperature baths (cold cleaning ) or by condensing vapors of a solvent on a workpiece (vapor degreasing). This article provides a detailed discussion on solvents, equipment, process limitations and applications, and safety and health hazards of cold cleaning and vapor degreasing. It also includes information on control of contamination, conservation and recovery of solvent, and disposal of solvent wastes.
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... in this Handbook. Vapor-phase processes are versatile processes that can be used for preparing a wide number of materials, such as metallic (tungsten, copper, aluminum, gold, platinum, etc.), semiconducting (silicon, germanium, diamond carbon, GaAs, CdTe, etc...
Abstract
This article focuses on transport phenomena and modeling approaches that are specific to vapor-phase processes (VPP). It discusses the VPP for the synthesis of materials. The article reviews the basic notions of molecular collisions and gas flows, and presents transport equations. It describes the modeling of vapor-surface interactions and kinetics of hetereogeneous processes as well as the modeling and kinetics of homogenous reactions in chemical vapor deposition (CVD). The article provides information on the various stages of developing models for numerical simulation of the transport phenomena in continuous media and transition regime flows of VPP. It explains the methods used for molecular modeling in computational materials science. The article also presents examples that illustrate multiscale simulations of CVD or PVD processes and examples that focus on sputtering deposition and reactive or ion beam etching.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001287
EISBN: 978-1-62708-170-2
... Vacuum deposition has advantages and limitations relative to other physical vapor deposition (PVD) techniques. Applications of evaporation processes include: Electrically conductive coatings for ceramic metallization (for example, Ti-Au, Ti-Pd-Au, Al, Al-Cu-Si, Cr-Au, Ti-Ag), semiconductor...
Abstract
This article discusses the fundamentals of thermal vaporization and condensation and provides information on the various vaporization sources and methods of vacuum deposition. It offers an overview of reactive evaporation and its deposition techniques. The article also explains the advantages, limitations, and applications of vacuum deposition processes. Finally, it provides information on the gas evaporation process, its processing chamber, and related systems.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001324
EISBN: 978-1-62708-170-2
... fluid and rinse water to drain away when the parts are removed from the tank. If these fluids do not drain away properly, it could lead to corrosion of ferrous metals and excessive depletion of the cleaning chemical from the wash tank. The proper racking of parts will help to eliminate this possibility...
Abstract
The chemicals that have been used in traditional vapor degreasing have serious health and environmental hazards that have prompted the search for modified and alternative techniques. This article provides a detailed discussion on the regulatory mandates that affect the use of industrial degreasing methods. It describes the aqueous degreasing technique, which forms an attractive alternative to the traditional vapor degreasing process. The article includes information on the materials and equipment used in the process, and discusses the advantages and disadvantages of hot and dip tank systems of aqueous degreasing. It explains how to convert an existing vapor degreaser to an aqueous cleaning system.
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003217
EISBN: 978-1-62708-199-3
... significant changes in the appearance and properties of the coating. The chemical compositions of irons and steels, and even the forms in which certain elements such as carbon and silicon are present, determine the suitability of ferrous metals for hot dip galvanizing and may markedly influence the...
Abstract
There are various coating techniques in practice to prevent the deterioration of steels. This article focuses on dip, barrier, and chemical conversion coatings and describes hot-dip processes for coating carbon steels with zinc, aluminum, lead-tin, and other alloys. It describes continuous electrodeposition for steel strip and babbitting and discusses phosphate and chromate conversion coatings as well. It also addresses painting, discussing types and selection, surface preparation, and application methods. In addition, the article describes rust-preventive compounds and their application. It also provides information on weld-overlay and thermal spray coating, porcelain enameling, and the preparation of enamel frits for steels. The article closes by describing methods and materials for ceramic coating.
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006635
EISBN: 978-1-62708-213-6
... identify metal ions, many of which give similar color changes when tested with a particular colorimetric reagent. Although the vast majority of spot tests cannot provide a definitive identification of a compound, they can indicate the presence or absence of classes of compounds in a sample, which helps...
Abstract
This article presents a summary of the chemical fundamentals, general techniques, limitations, and applications of chemical spot testing as well as a brief overview of innovations and specialized applications. A list of selected reagents, including abbreviated instructions for preparing the reagent solution(s), for performing the spot test, and for interpreting the results, is also included. The article discusses two specialized applications of qualitative analysis, namely illicit drug identification and spacecraft drinking water quality testing. It also contains tables listing common presumptive tests for detecting anions and cations in aqueous solution.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001320
EISBN: 978-1-62708-170-2
... nonmetallic materials that do not react with carbon (e.g., metal-matrix composites and fiber-reinforced plastics). Table 4 Properties of chemical vapor deposited coating materials Material Room-temperature microhardness kg/mm 2 Coefficient of thermal expansion μm/·K Thermal conductivity at 1000...
Abstract
The classes of tool materials for machining operations are high-speed tool steels, carbides, cermets, ceramics, polycrystalline cubic boron nitrides, and polycrystalline diamonds. This article discusses the expanding role of surface engineering in increasing the manufacturing productivity of carbide, cermet, and ceramic cutting tool materials used in machining operations. The useful life of cutting tools may be limited by a variety of wear processes, such as crater wear, flank wear or abrasive wear, builtup edge, depth-of-cut notching, and thermal cracks. The article provides information on the applicable methods for surface engineering of cutting tools, namely, chemical vapor deposited (CVD) coatings, physical vapor deposited coatings, plasma-assisted CVD coatings, diamond coatings, and ion implantation.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001304
EISBN: 978-1-62708-170-2
..., hot-dip coating processes, electrogalvanizing, electroplating, metal cladding, organic coatings, zinc-rich coatings, porcelain enameling, thermal spraying, hardfacing, vapor-deposited coatings, surface modification, and surface hardening via heat treatment. alloy steel cadmium plating carbon...
Abstract
This article discusses the classifications, compositions, properties, advantages, disadvantages, limitations, and applications of the most commonly used methods for surface engineering of carbon and alloy steels. These include cleaning methods, finishing methods, conversion coatings, hot-dip coating processes, electrogalvanizing, electroplating, metal cladding, organic coatings, zinc-rich coatings, porcelain enameling, thermal spraying, hardfacing, vapor-deposited coatings, surface modification, and surface hardening via heat treatment.
Series: ASM Handbook
Volume: 4B
Publisher: ASM International
Published: 30 September 2014
DOI: 10.31399/asm.hb.v04b.a0005926
EISBN: 978-1-62708-166-5
... scaling when metals are exposed to elevated temperatures remains an important task of the furnace atmosphere. In a more sophisticated view, the atmosphere within the furnace chamber is a full-fledged partner in achieving the chemical reactions that occur during heat treating. Properly applied and...
Abstract
This article provides a detailed discussion on the types of furnace atmospheres required for heat treating. These include generated exothermic-based atmospheres, generated endothermic-based atmospheres, generated exothermic-endothermic-based atmospheres, generated dissociated-ammonia-based atmospheres, industrial gas nitrogen-base atmospheres, argon atmospheres, and hydrogen atmospheres. Atmospheres for backfilling, partial pressure operation, and quenching in vacuum are also discussed. Furnace atmospheres constitute four major groups of safety hazards in heat treating: fire, explosion, toxicity, and asphyxiation. The article reviews the fundamentals of principal gases and vapors. It describes how the evaluation of the atmospheric requirements of heat treating furnaces is influenced by factors such as cost of operation and capital investment.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001318
EISBN: 978-1-62708-170-2
... stresses of any of the ceramic coating candidates. These stresses are still high enough to cause cracking, however. Therefore, it is usually found that deposited ceramic coatings exhibit microcracking and that the crack pattern depends on the coating thickness and deposition temperature. Iridium metal...
Abstract
Coating technology for carbon-carbon has been driven primarily by the aerospace and defense industries, in applications where the composite is exposed to high-temperature oxidizing environments. The most notable application of coated carbon-carbon is for the nose cap and wing leading edges of the Shuttle Orbiter vehicle. This article details the fundamentals of protecting carbon-carbon composites. It explains various coating deposition techniques: pack cementation, chemical vapor deposition, and slurry coatings. The article discusses typical coating architectures in accordance with the process used to deposit the primary oxygen barrier. It also provides information on the practical limitations of coatings for the composites.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001311
EISBN: 978-1-62708-170-2
... °F) Conversion coatings are easily removable without excessive loss of metal by pickling in an aqueous solution containing 20% nitric acid and 2% hydrofluoric acid by weight. Physical vapor deposition (PVD) is a term that covers several processes (including evaporation, ion...
Abstract
This article reviews cleaning and finishing operations that have proven to be effective on titanium, its alloys, and semi-fabricated titanium products. It explains how to remove scale, tarnish films, grease, and other soils and how to achieve required finishes and/or improve wear and oxidation resistance through the use of polishing, buffing, and wire brushing operations. The article also covers a wide range of surface modification and coating processes, including ion implantation, diffusion, chemical and physical vapor deposition, plating, anodizing, and chemical conversion coatings as well as sprayed and sol-gel coatings and laser and electron-beam treatments.
Series: ASM Handbook
Volume: 5B
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v05b.a0006012
EISBN: 978-1-62708-172-6
... carbon nanotubes, silica, metals/metal oxides, ceramics, clays, buckyballs, graphene, polymers, titanium dioxide, and waxes. These can be produced by a variety of methods, including chemical vapor deposition, plasma arcing, electrodeposition, sol-gel synthesis, and ball milling. The application of...
Abstract
Nanotechnology and smart-coating technologies have been reported to show great promise for improved performance in critical areas such as corrosion resistance, durability, and conductivity. This article exemplifies nanofilms and nanomaterials used in coatings applications, including carbon nanotubes, silica, metals/metal oxides, ceramics, clays, buckyballs, graphene, polymers, titanium dioxide, and waxes. These can be produced by a variety of methods, including chemical vapor deposition, plasma arcing, electrodeposition, sol-gel synthesis, and ball milling. The application of nanotechnology and the development of smart coatings have been dependent largely on the availability of analytical and imaging techniques such as Raman spectroscopy, scanning and transmission electron microscopy, atomic force microscopy, and scanning tunneling microscopy.
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003152
EISBN: 978-1-62708-199-3
... resistance somewhat. Physical or chemical vapor deposition (PVD or CVD) are now used on the majority of metal-cutting inserts and on some wear parts. The coatings are on the order of 5 μm thick and consist of TiC, TiN, Ti(C,N), HfN, AlO, aluminum oxide, or a combination thereof (multilayer coatings...
Abstract
Cemented carbides belong to a class of hard, wear-resistant, refractory materials in which the hard carbide particles are bound together, or cemented, by a ductile metal binder. Cermet refers to a composite of a ceramic material with a metallic binder. This article discusses the manufacture, composition, classifications, and physical and mechanical properties of cemented carbides. It describes the application of hard coatings to cemented carbides by physical or chemical vapor deposition (PVD or CVD). Tungsten carbide-cobalt alloys, submicron tungsten carbide-cobalt alloys, and alloys containing tungsten carbide, titanium carbide, and cobalt are used for machining applications. The article also provides an overview of cermets used in machining applications.
Book: Corrosion: Materials
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003820
EISBN: 978-1-62708-183-2
... magnesium alloys to each other and to other metals. In addition, such tests are used to examine the relative merits of protective chemical treatments and coatings and the galvanic compatibilities of dissimilar metals with magnesium. The ASTM B 117 salt spray test ( Ref 12 ) in particular is widely used and...
Abstract
This article begins with a discussion on the environmental factors that induce corrosion in magnesium alloys. It reviews the factors that determine the severity of different forms of localized corrosion, namely, galvanic corrosion, corrosion fatigue, and stress-corrosion. The article discusses the corrosion protection in magnesium assemblies and the protective coating systems used in corrosion protection practices. The protection schemes for specific applications and production of novel magnesium alloys with improved corrosion resistance are also described. The article concludes with a discussion on corrosion of bulk vapor-deposited alloys and magnesium-matrix composites.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001280
EISBN: 978-1-62708-170-2
... some variation of the vapor-deposition process. Deposition, diffusion, and reaction of silicon (and any other elements added in small quantities) with the substrate metal at a high temperature produce the silicide-based coating. Oxide coatings are usually applied by the flame or plasma-arc spraying...
Abstract
Ceramic coatings are applied to metals to protect them against oxidation and corrosion at room temperature and at elevated temperatures. This article provides a detailed account of the factors to be considered when selecting a ceramic coating and describes the characteristics of various coating materials, namely, silicate glasses, oxides, carbides, silicides, and cermets. It reviews ceramic coating methods: brushing, spraying, dipping, flow coating, combustion flame spraying, plasma-arc flame spraying, detonation gun spraying, pack cementation, fluidized-bed deposition, vapor streaming, troweling, and electrophoresis. The article also includes information on the evaluation of the quality of ceramic coatings.