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metal-organic chemical vapor deposition

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Published: 01 January 1994
Fig. 3 Chemical potential in metal-organic chemical vapor deposition processes. (a) General case. (b) Mass-transport limited growth. Source: Ref 48 More
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Published: 01 January 1994
Fig. 1 Typical reactor design for metal-organic chemical vapor deposition. Source: Ref 7 More
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Published: 01 January 1994
Fig. 2 Fundamental processes involved in metal-organic chemical vapor deposition. Source: Ref 47 More
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
... Abstract This article describes the vapor-phase growth techniques applied to the epitaxial deposition of semiconductor films and discusses the fundamental processes involved in metal-organic chemical vapor deposition (MOCVD). It reviews the thermodynamics that determine the driving force behind...
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Published: 01 December 2009
Fig. 13 Transverse velocities at three axial positions, illustrating the formation of convection rolls inside an adiabatic-wall horizontal metal-organic chemical vapor deposition reactor. Source: Ref 124 More
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... Abstract This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions...
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005749
EISBN: 978-1-62708-171-9
... MMC metal-matrix composite MMI man-machining interface mo month MOCVD metal-organic chemical vapor deposition mPa millipascal MPa megapascal mpg miles per gallon mph miles per hour MPIF Metal Powder Industries Federation ms millisecond MSA...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0005586
EISBN: 978-1-62708-170-2
..., or kg × 10 3 ) MID molded interconnect device MIG metal inert gas (welding) min minute; minimum mL milliliter mm millimeter MMC metal-matrix composite MOCVD metal-organic chemical vapor deposition mp microporous (chromium electroplate...
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004143
EISBN: 978-1-62708-184-9
... Abstract This article describes the eight chemical cleaning methods, namely, circulation, fill and soak, cascade, foam, vapor-phase organic, steam-injected, on-line chemical, and mechanical cleaning. It presents information on deposit types, solvents used to remove them, and construction...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001275
EISBN: 978-1-62708-170-2
.... Laser-irradiated chromium and molybdenum films on pure aluminum have been found to be very resistant to pitting by chloride ion ( Ref 64 ). Metal organic chemical vapor deposition (MOCVD) can also be used to deposit corrosion-resistant oxides onto low-melting metal substrates. MOCVD involves...
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003672
EISBN: 978-1-62708-182-5
..., metallic coatings can sometimes provide cathodic protection when the coating is compromised. Metallic coatings and other inorganic coatings are produced using a variety of techniques, including hot dipping, electroplating, cladding, thermal spraying, chemical vapor deposition, or surface modification using...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003212
EISBN: 978-1-62708-199-3
... the required properties. These processes include solidification treatments such as hot dip coatings, weld-overlay coatings, and thermal spray surfaces; deposition surface treatments such as electrodeposition, chemical vapor deposition, and physical vapor deposition; and heat treatment coatings...
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0001091
EISBN: 978-1-62708-162-7
... principal methods for growing epitaxial layers: liquid-phase epitaxy (LPE), vapor-phase epitaxy (VPE), metal-organic chemical vapor deposition (MOCVD), and molecular beam epitaxy (MBE). Liquid-phase epitaxy is generally not considered suitable for complex semiconductor production because it cannot...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006670
EISBN: 978-1-62708-213-6
... a supersaturated solution during liquid phase epitaxy, and high-temperature chemical reaction between a metal chloride gas or a metal organic liquid precursor vapor and group V hydride gases in the case of vapor phase epitaxy and metal organic chemical vapor deposition. A discussion of semiconductor processing...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... was observed. Fig. 5 Reactor for plasma-enhanced chemical vapor deposition of epitaxial silicon films. QMS, quadruple mass spectrometer. Source: Ref 48 Conductive Films The deposition of refractory metals and their silicides with the PECVD process has been a subject of investigation by many...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003022
EISBN: 978-1-62708-200-6
... with the requirements for metallizing in mind. Electroless Plating Electroless (autocatalytic) plating is the deposition of a metallic coating (usually nickel or copper) by a controlled chemical reduction that is catalyzed by the metal or alloy being deposited. For plastics, it is deposited on a previously...
Series: ASM Handbook
Volume: 20
Publisher: ASM International
Published: 01 January 1997
DOI: 10.31399/asm.hb.v20.a0002494
EISBN: 978-1-62708-194-8
..., walls) that could be distorted by heating, if needed prior to coating deposition Vacuum processes are line-of-sight limited, so similar design precepts to those for ion plating will apply Mask areas not to be coated (a) CVD, chemical vapor deposition; PVD, physical vapor deposition; RVD...
Series: ASM Handbook
Volume: 21
Publisher: ASM International
Published: 01 January 2001
DOI: 10.31399/asm.hb.v21.a0003372
EISBN: 978-1-62708-195-5
... the use of a ceramic, preceramic, or metal phase as a fluid or vapor phase reactant to form the matrix. Emphasis is placed on microstructural features that influence ultimate composite properties. ceramic-matrix composites pressure-assisted densification chemical vapor infiltration melt...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003840
EISBN: 978-1-62708-183-2
... a significant role in the degradation of refractory materials. Some of the factors influencing corrosion resistance are porosity, texture, presence of additives to decrease oxidation of, for example, carbon, and presence of a chemically vapor-deposited layer. The article “Performance of Ceramics in Severe...
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003698
EISBN: 978-1-62708-182-5
... ) is that inhibitors are designated as passivators, organic inhibitors, and vapor-phase inhibitors. Passivating Inhibitors Passivating inhibitors are usually inorganic oxidizing chemicals such as chromates, nitrites, and molybdates that passivate the metal and shift the corrosion potential several tenths...