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metal-organic chemical vapor deposition

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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
... Abstract This article describes the vapor-phase growth techniques applied to the epitaxial deposition of semiconductor films and discusses the fundamental processes involved in metal-organic chemical vapor deposition (MOCVD). It reviews the thermodynamics that determine the driving force behind...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... Abstract This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... in the growth rate was observed. Fig. 5 Reactor for plasma-enhanced chemical vapor deposition of epitaxial silicon films. QMS, quadruple mass spectrometer. Source: Ref 48 The deposition of refractory metals and their silicides with the PECVD process has been a subject of investigation...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003219
EISBN: 978-1-62708-199-3
... vacuum without involving a chemical reaction. Today, PVD technology has evolved so that a wide array of inorganic materials (including metals, alloys, compounds, or their mixtures) and organic compounds can be deposited. The PVD process occurs in a vacuum chamber and involves a vapor source and the...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001286
EISBN: 978-1-62708-170-2
... electropositive and electronegative metals that chemically bond to form compounds with a specific composition and crystalline structure. Intermetallic films are often formed by depositing the film material on a hot surface so that the adatoms diffuse and react with the surface material, converting it into a...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001223
EISBN: 978-1-62708-170-2
... recovery solvent waste solvent waste disposal spray system equipment surface preparation temperature baths vapor degreasing SOLVENT CLEANING is a surface preparation process that is especially adept at removing organic compounds such as grease or oil from the surface of a metal. Most organic...
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... in this Handbook. Vapor-phase processes are versatile processes that can be used for preparing a wide number of materials, such as metallic (tungsten, copper, aluminum, gold, platinum, etc.), semiconducting (silicon, germanium, diamond carbon, GaAs, CdTe, etc...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001287
EISBN: 978-1-62708-170-2
... Vacuum deposition has advantages and limitations relative to other physical vapor deposition (PVD) techniques. Applications of evaporation processes include: Electrically conductive coatings for ceramic metallization (for example, Ti-Au, Ti-Pd-Au, Al, Al-Cu-Si, Cr-Au, Ti-Ag), semiconductor...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001324
EISBN: 978-1-62708-170-2
... fluid and rinse water to drain away when the parts are removed from the tank. If these fluids do not drain away properly, it could lead to corrosion of ferrous metals and excessive depletion of the cleaning chemical from the wash tank. The proper racking of parts will help to eliminate this possibility...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003217
EISBN: 978-1-62708-199-3
... significant changes in the appearance and properties of the coating. The chemical compositions of irons and steels, and even the forms in which certain elements such as carbon and silicon are present, determine the suitability of ferrous metals for hot dip galvanizing and may markedly influence the...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006635
EISBN: 978-1-62708-213-6
... identify metal ions, many of which give similar color changes when tested with a particular colorimetric reagent. Although the vast majority of spot tests cannot provide a definitive identification of a compound, they can indicate the presence or absence of classes of compounds in a sample, which helps...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001320
EISBN: 978-1-62708-170-2
... nonmetallic materials that do not react with carbon (e.g., metal-matrix composites and fiber-reinforced plastics). Table 4 Properties of chemical vapor deposited coating materials Material Room-temperature microhardness kg/mm 2 Coefficient of thermal expansion μm/·K Thermal conductivity at 1000...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001304
EISBN: 978-1-62708-170-2
..., hot-dip coating processes, electrogalvanizing, electroplating, metal cladding, organic coatings, zinc-rich coatings, porcelain enameling, thermal spraying, hardfacing, vapor-deposited coatings, surface modification, and surface hardening via heat treatment. alloy steel cadmium plating carbon...
Series: ASM Handbook
Volume: 4B
Publisher: ASM International
Published: 30 September 2014
DOI: 10.31399/asm.hb.v04b.a0005926
EISBN: 978-1-62708-166-5
... scaling when metals are exposed to elevated temperatures remains an important task of the furnace atmosphere. In a more sophisticated view, the atmosphere within the furnace chamber is a full-fledged partner in achieving the chemical reactions that occur during heat treating. Properly applied and...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001318
EISBN: 978-1-62708-170-2
... stresses of any of the ceramic coating candidates. These stresses are still high enough to cause cracking, however. Therefore, it is usually found that deposited ceramic coatings exhibit microcracking and that the crack pattern depends on the coating thickness and deposition temperature. Iridium metal...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001311
EISBN: 978-1-62708-170-2
... °F) Conversion coatings are easily removable without excessive loss of metal by pickling in an aqueous solution containing 20% nitric acid and 2% hydrofluoric acid by weight. Physical vapor deposition (PVD) is a term that covers several processes (including evaporation, ion...
Series: ASM Handbook
Volume: 5B
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v05b.a0006012
EISBN: 978-1-62708-172-6
... carbon nanotubes, silica, metals/metal oxides, ceramics, clays, buckyballs, graphene, polymers, titanium dioxide, and waxes. These can be produced by a variety of methods, including chemical vapor deposition, plasma arcing, electrodeposition, sol-gel synthesis, and ball milling. The application of...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003152
EISBN: 978-1-62708-199-3
... resistance somewhat. Physical or chemical vapor deposition (PVD or CVD) are now used on the majority of metal-cutting inserts and on some wear parts. The coatings are on the order of 5 μm thick and consist of TiC, TiN, Ti(C,N), HfN, AlO, aluminum oxide, or a combination thereof (multilayer coatings...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003820
EISBN: 978-1-62708-183-2
... magnesium alloys to each other and to other metals. In addition, such tests are used to examine the relative merits of protective chemical treatments and coatings and the galvanic compatibilities of dissimilar metals with magnesium. The ASTM B 117 salt spray test ( Ref 12 ) in particular is widely used and...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001280
EISBN: 978-1-62708-170-2
... some variation of the vapor-deposition process. Deposition, diffusion, and reaction of silicon (and any other elements added in small quantities) with the substrate metal at a high temperature produce the silicide-based coating. Oxide coatings are usually applied by the flame or plasma-arc spraying...