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metal-organic chemical vapor deposition
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Image
Published: 01 January 1994
Fig. 3 Chemical potential in metal-organic chemical vapor deposition processes. (a) General case. (b) Mass-transport limited growth. Source: Ref 48
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Image
Published: 01 January 1994
Image
Published: 01 January 1994
Fig. 2 Fundamental processes involved in metal-organic chemical vapor deposition. Source: Ref 47
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Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
... Abstract This article describes the vapor-phase growth techniques applied to the epitaxial deposition of semiconductor films and discusses the fundamental processes involved in metal-organic chemical vapor deposition (MOCVD). It reviews the thermodynamics that determine the driving force behind...
Abstract
This article describes the vapor-phase growth techniques applied to the epitaxial deposition of semiconductor films and discusses the fundamental processes involved in metal-organic chemical vapor deposition (MOCVD). It reviews the thermodynamics that determine the driving force behind the overall growth process and the kinetics that define the rates at which the various processes occur. The article provides information on the reactor systems and hardware, MOCVD starting materials, engineering considerations that optimize growth, and the growth parameters for a variety of Group III-V, II-VI, and IV semiconductors.
Image
Published: 01 December 2009
Fig. 13 Transverse velocities at three axial positions, illustrating the formation of convection rolls inside an adiabatic-wall horizontal metal-organic chemical vapor deposition reactor. Source: Ref 124
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Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... Abstract This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions...
Abstract
This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions of materials related to hard, tribological, and high-temperature coatings and to free-standing structures. It concludes by reviewing the advantages, disadvantages, and applications of CVD.
Book Chapter
Book: Thermal Spray Technology
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005749
EISBN: 978-1-62708-171-9
... MMC metal-matrix composite MMI man-machining interface mo month MOCVD metal-organic chemical vapor deposition mPa millipascal MPa megapascal mpg miles per gallon mph miles per hour MPIF Metal Powder Industries Federation ms millisecond MSA...
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0005586
EISBN: 978-1-62708-170-2
..., or kg × 10 3 ) MID molded interconnect device MIG metal inert gas (welding) min minute; minimum mL milliliter mm millimeter MMC metal-matrix composite MOCVD metal-organic chemical vapor deposition mp microporous (chromium electroplate...
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004143
EISBN: 978-1-62708-184-9
... Abstract This article describes the eight chemical cleaning methods, namely, circulation, fill and soak, cascade, foam, vapor-phase organic, steam-injected, on-line chemical, and mechanical cleaning. It presents information on deposit types, solvents used to remove them, and construction...
Abstract
This article describes the eight chemical cleaning methods, namely, circulation, fill and soak, cascade, foam, vapor-phase organic, steam-injected, on-line chemical, and mechanical cleaning. It presents information on deposit types, solvents used to remove them, and construction material incompatibilities in a table. The article summarizes the uses of chemical cleaning solutions, including hydrochloric acid, phosphoric acid, and sulfamic acid, as well as the additives used to neutralize their impact on corrosion. It discusses the chemical cleaning procedures, including selection of cleaning method and solvent, documentation of cleaning, and corrosion monitoring in chemical cleaning.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001275
EISBN: 978-1-62708-170-2
.... Laser-irradiated chromium and molybdenum films on pure aluminum have been found to be very resistant to pitting by chloride ion ( Ref 64 ). Metal organic chemical vapor deposition (MOCVD) can also be used to deposit corrosion-resistant oxides onto low-melting metal substrates. MOCVD involves...
Abstract
This article briefly describes the basic attributes of chromate conversion coatings and the processes for applying them. It provides information on the influence of substrate microstructure on the performance of coating deposits and on the mechanism of substrate protection supplied by chromate coatings. The article also discusses the development of replacement technologies in response to environmental constraints that have developed around the use of chromium-base compounds.
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003672
EISBN: 978-1-62708-182-5
..., metallic coatings can sometimes provide cathodic protection when the coating is compromised. Metallic coatings and other inorganic coatings are produced using a variety of techniques, including hot dipping, electroplating, cladding, thermal spraying, chemical vapor deposition, or surface modification using...
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003212
EISBN: 978-1-62708-199-3
... the required properties. These processes include solidification treatments such as hot dip coatings, weld-overlay coatings, and thermal spray surfaces; deposition surface treatments such as electrodeposition, chemical vapor deposition, and physical vapor deposition; and heat treatment coatings...
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0001091
EISBN: 978-1-62708-162-7
... principal methods for growing epitaxial layers: liquid-phase epitaxy (LPE), vapor-phase epitaxy (VPE), metal-organic chemical vapor deposition (MOCVD), and molecular beam epitaxy (MBE). Liquid-phase epitaxy is generally not considered suitable for complex semiconductor production because it cannot...
Abstract
Gallium-base components can be found in a variety of products ranging from compact disk players to advanced military electronic warfare systems, owing to the factor that it can emit light, has a greater resistance to radiation and operates at faster speeds and higher temperatures. This article discusses the uses of gallium in optoelectronic devices and integrated circuits and applications of gallium. The article discusses the properties and grades of gallium arsenide and also provides information on resources of gallium. The article talks about the recovery techniques, including recovery from bauxite, zinc ore and secondary recovery process and purification. The article briefly describes the fabrication process of gallium arsenide crystals. Furthermore, the article gives a short note on world supply and demand of gallium and concludes with research and development on gallium arsenide integrated circuits.
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006670
EISBN: 978-1-62708-213-6
... a supersaturated solution during liquid phase epitaxy, and high-temperature chemical reaction between a metal chloride gas or a metal organic liquid precursor vapor and group V hydride gases in the case of vapor phase epitaxy and metal organic chemical vapor deposition. A discussion of semiconductor processing...
Abstract
This article introduces various techniques commonly used in the characterization of semiconductors, namely single-crystal, polycrystalline, amorphous, oxide, organic, and low-dimensional semiconductors and semiconductor devices. The discussion covers material classification, fabrication methods, sample preparation, bulk/elemental characterization methods, microstructural characterization methods, surface characterization methods, and electronic characterization methods.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... was observed. Fig. 5 Reactor for plasma-enhanced chemical vapor deposition of epitaxial silicon films. QMS, quadruple mass spectrometer. Source: Ref 48 Conductive Films The deposition of refractory metals and their silicides with the PECVD process has been a subject of investigation by many...
Abstract
This article discusses the application of amorphous and crystalline films through plasma-enhanced chemical vapor deposition (PECVD) from the view point of microelectronic device fabrication. It describes the various types of PECVD reactors and deposition techniques. Plasma enhancement of the CVD process is discussed briefly. The article also describes the properties of amorphous and crystalline films deposited by the PECVD process for integrated circuit fabrication.
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003022
EISBN: 978-1-62708-200-6
... with the requirements for metallizing in mind. Electroless Plating Electroless (autocatalytic) plating is the deposition of a metallic coating (usually nickel or copper) by a controlled chemical reduction that is catalyzed by the metal or alloy being deposited. For plastics, it is deposited on a previously...
Abstract
The process of coating plastics with metals for functional purposes is called metallizing of plastics. This article discusses the metallizing of plastics, provides information on its history, and gives a short note on applications and adhesion properties of metallic coatings. It also discusses the selection of plastics for plating. This article also describes metallizing techniques, including plating (electrolytic or electroplating), vacuum metallizing and thermal spraying, and environmental considerations. The article discusses the quality assurance procedures for metallized plastic parts which include tests that assess the quality of the finish, coating thickness, adhesion, and corrosion resistance, and gives a short note on service performance, which includes service condition classifications.
Series: ASM Handbook
Volume: 20
Publisher: ASM International
Published: 01 January 1997
DOI: 10.31399/asm.hb.v20.a0002494
EISBN: 978-1-62708-194-8
..., walls) that could be distorted by heating, if needed prior to coating deposition Vacuum processes are line-of-sight limited, so similar design precepts to those for ion plating will apply Mask areas not to be coated (a) CVD, chemical vapor deposition; PVD, physical vapor deposition; RVD...
Abstract
This article presents general design principles for different types of surface-finishing processes, such as cleaning, organic coatings, and inorganic coatings applied by a variety of techniques. It discusses the factors that influence the selection of surface-finishing processes. These include fabrication processes, size, weight, functional requirements, and design features. The article discusses the design as an integral part of manufacturing. It contains tables that summarize the design limitations for selected surface-preparation, organic finishing, and inorganic finishing processes.
Book: Composites
Series: ASM Handbook
Volume: 21
Publisher: ASM International
Published: 01 January 2001
DOI: 10.31399/asm.hb.v21.a0003372
EISBN: 978-1-62708-195-5
... the use of a ceramic, preceramic, or metal phase as a fluid or vapor phase reactant to form the matrix. Emphasis is placed on microstructural features that influence ultimate composite properties. ceramic-matrix composites pressure-assisted densification chemical vapor infiltration melt...
Abstract
This article focuses on the process methods and matrix chemistries of ceramic-matrix composites. These methods include pressure-assisted densification, chemical vapor infiltration, melt infiltration, polymer infiltration and pyrolysis, and sol-gel processing. The article discusses the use of a ceramic, preceramic, or metal phase as a fluid or vapor phase reactant to form the matrix. Emphasis is placed on microstructural features that influence ultimate composite properties.
Book: Corrosion: Materials
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003840
EISBN: 978-1-62708-183-2
... a significant role in the degradation of refractory materials. Some of the factors influencing corrosion resistance are porosity, texture, presence of additives to decrease oxidation of, for example, carbon, and presence of a chemically vapor-deposited layer. The article “Performance of Ceramics in Severe...
Abstract
This article provides an overview of the environmental performance of the most commonly used nonmetallic materials, including elastomers, plastics, thermosetting resins, resin-matrix composites, organic coatings, concrete, refractories, and ceramics. It also discusses the applications and uses of these materials.
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003698
EISBN: 978-1-62708-182-5
... ) is that inhibitors are designated as passivators, organic inhibitors, and vapor-phase inhibitors. Passivating Inhibitors Passivating inhibitors are usually inorganic oxidizing chemicals such as chromates, nitrites, and molybdates that passivate the metal and shift the corrosion potential several tenths...
Abstract
This article discusses the definitions, classifications, structural features, vapor pressure values, corrosion inhibition mechanisms, and methods of evaluation of vapor-phase-corrosion inhibitors or volatile corrosion inhibitors (VCIs). Practical methods of using VCIs for corrosion protection of aluminum, ferrous, and nonferrous alloys are discussed with specific examples. The article contains tables that summarize the applications of different VCIs used for protecting ferrous metals, copper and its alloys, and silver.
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