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medium current semiconductor implanter

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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001292
EISBN: 978-1-62708-170-2
... and discusses the advantages, limitations, and applications of ion implantation. It also reviews a typical medium current semiconductor implanter adapted for implantation of metals with the aid of illustrations. bombardment ion implantation medium current semiconductor implanter medium-to-high-energy...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006641
EISBN: 978-1-62708-213-6
... Metallurgical High-temperature alloys, high-purity metals Nuclear Hot waste, uranium, nuclear fuel Semiconductor Acids, bases, organic solvents, precursors, ion implants Water ICP-MS is an ideal analytical technique for analysis of deionized water, drinking water, groundwater, natural fresh...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003220
EISBN: 978-1-62708-199-3
...) on plastics and semiconductors Process Description. Ion implantation in- nents for wear resistance. Low-shear Solid film lubricants (for example, volves the bombardment of a solid material with silver and gold) Decorative coatings (TiN yields gold-colored medium-to-high-energy ionized atoms and offers...
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003681
EISBN: 978-1-62708-182-5
... sections. Ion Implantation Surface modification by ion implantation is a technique that was derived from the semiconductor industry. Specimens for corrosion research were initially prepared by using high-energy research instrumentation or commercial semiconductor implanters. Equipment for surface...
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005746
EISBN: 978-1-62708-171-9
... articles from various proceedings from 2006 to 2012. Key ITSC Papers Table 1 Key ITSC Papers Paper title Authors Source Year Ceramic Coatings Prepared by Plasma Spraying for Semiconductor Production Equipment N. Kato, H. Mizuno, H. Ibe, and J. Kitamura Proceedings of the 2006...
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004207
EISBN: 978-1-62708-184-9
... the electrode potentials as well as measuring the generated current response. There are several ASTM International standard test methods for localized corrosion testing, and some are particular for implant materials. Five ASTM standards are concerned with localized corrosion and mechanically assisted...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001295
EISBN: 978-1-62708-170-2
... methods for determining the thickness of a film is that the light must be able to reach the bottom of the film and interact with the underlying layer. Transparent materials such as most oxides qualify throughout the above-mentioned thickness range up to a few micrometers. Many semiconductors are nearly...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006677
EISBN: 978-1-62708-213-6
..., and fidelity that help to define our current usage of the term focused . The population of FIB instrumentation has grown steadily, and it now represents a substantial fraction of the wider “charged particle beam” family that includes scanning electron microscopes (SEMs) and transmission electron...
Series: ASM Handbook
Volume: 20
Publisher: ASM International
Published: 01 January 1997
DOI: 10.31399/asm.hb.v20.a0002466
EISBN: 978-1-62708-194-8
... for strip cladding. There are a large number of processing parameters that must be considered when attempting to optimize welding processes for surface application: All processes Voltage across the arc Current through the arc Current polarity Current pulsing parameters Travel speed...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003062
EISBN: 978-1-62708-200-6
..., and good thermal shock resistance. Alumina is currently the most widely used ceramic substrate material, because it satisfies most requirements. Beryllia, because of its high thermal conductivity, is used where heat dissipation is critical. Aluminum nitride combines high thermal conductivity...
Series: ASM Handbook
Volume: 14A
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v14a.a0003976
EISBN: 978-1-62708-185-6
... resistance to abrasive wear. Air-Hardening Medium-Alloy Tool Steels (A2, A7, A8, A9) Manganese, chromium, molybdenum, and vanadium are the principal alloying elements in this group of tool steels. These steels have moderate resistance to thermal softening and, because of their high carbon content...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001775
EISBN: 978-1-62708-178-8
... taken hold. This has been due to the need for rapid growth of planar technology in semiconductors and the availability of compatible data processing systems. In the mid-1960s, the discovery of channeling phenomena and recognition of ion implantation in material doping and alteration provided additional...
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005707
EISBN: 978-1-62708-171-9
... techniques such as conventional CVD, laser-assisted CVD, cathodic arc deposition, molecular beam epitaxy, ion plating, and sputtering. anodizing case hardening chemical vapor deposition corrosion electroplating hardfacing hot dip coating ion implantation ion plating physical vapor deposition...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003549
EISBN: 978-1-62708-180-1
... (an automobile fender or a steel pier piling are examples). Corrosion occurs. The anodic reaction is: (Eq 14) Fe → Fe 2 + + 2 e Since the medium is exposed to the atmosphere, it contains dissolved oxygen. Water and seawater are nearly neutral, and thus the cathodic reaction is: (Eq 15...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006637
EISBN: 978-1-62708-213-6
... techniques often are used in atomic and nuclear physics to check targets for impurities, thickness, and composition, but only since the late 1960s has ion beam analysis taken hold. This has been due to the need for rapid growth of planar technology in semiconductors and the availability of compatible data...
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006134
EISBN: 978-1-62708-175-7
... for the automotive industry ( Ref 7 ). Porous PM materials are estimated to account for less than 2% of the overall filtration and fluid control markets, which are currently dominated by lower-cost disposable porous media. Despite the small size of the market currently served by porous PM materials, this material...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006432
EISBN: 978-1-62708-192-4
.... Further, utilization possibilities are limited by the need for accessible sensor placement positions. Indirect approaches mainly use a medium, for example, the lubricant, to transport wear particles from the rubbing surfaces to a place where a detection device may be placed or samples taken...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003221
EISBN: 978-1-62708-199-3
... (a) Air pressure mm in. mm in. kPa psi 20–60 Coarse 10–13 3 8 – 1 2 300–500 12–20 205–620 30–90 40–80 Medium 10–13 3 8 – 1 2 200–350 8–14 205–620 30–90 100–200 Fine 6–13 1 4 – 1 2 200–350 8–14 205–515 30–75...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.9781627081702
EISBN: 978-1-62708-170-2
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0005585
EISBN: 978-1-62708-170-2
... cleaning in which the work is the anode. Also called reverse-current cleaning. anodic coating. A protective, decorative, or functional coating, formed by conversion of the surface of a metal in an electrolytic oxidation process. anodic etching. Method of revealing microstructure by selective dissolution...