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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001290
EISBN: 978-1-62708-170-2
... Abstract Ion-beam-assisted deposition (IBAD) refers to the process wherein evaporated atoms produced by physical vapor deposition are simultaneously struck by an independently generated flux of ions. This article discusses the energy utilization of this process. It describes the physical...
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Published: 01 January 1994
Fig. 1 Two common processing techniques. (a) Ion-beam-assisted deposition (IBAD). (b) Dual-ion-beam sputtering (DIBS) More
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Published: 01 January 2003
Fig. 4 Ion-beam-assisted deposition (IBAD) More
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Published: 01 January 1994
Fig. 2 Physical and chemical processes at the film-vacuum interface during ion-beam-assisted deposition and dual-ion-beam sputtering More
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Published: 01 January 1994
Fig. 3 Two methods used for large-area, high-volume implementation of ion-beam-assisted-deposition. (a) For optical films. (b) For steel sheet More
Book Chapter

Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003685
EISBN: 978-1-62708-182-5
... ) imparting a large increase in the energy of the deposition species, which is atomistic. Fig. 3 Basic ion plating process Ion-beam-assisted deposition (IBAD) and ion- beam-enhanced deposition (IBED) refer to the process wherein evaporated atoms produced by physical vapor deposition (PVD...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0005586
EISBN: 978-1-62708-170-2
...; electrical current; bias current IBAD ion-beam-assisted deposition IC integrated circuit ICB ionized cluster beam (deposition) ID inside diameter in. inch IP conventional ion plating IR infrared ISCC intergranular stress-corrosion cracking...
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005707
EISBN: 978-1-62708-171-9
... techniques such as conventional CVD, laser-assisted CVD, cathodic arc deposition, molecular beam epitaxy, ion plating, and sputtering. anodizing case hardening chemical vapor deposition corrosion electroplating hardfacing hot dip coating ion implantation ion plating physical vapor deposition...
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003681
EISBN: 978-1-62708-182-5
.... Plasma ion deposition: Ion beams are used to create coatings having special phases, especially ion-beam-formed carbon coatings in the diamond phase or ion-beam-formed boron nitride coatings. Ion beam assisted deposition: Ion beams are combined with physical vapor deposition. Materials...
Book Chapter

By Donald M. Mattox
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... ). The bombarding species and the depositing species can be from a number of sources. Bombardment can take place in a plasma or vacuum environment. When a beam of energetic particles is used in vacuum, the process is often called ion-beam-assisted deposition (IBAD). A vacuum can be defined as an environment...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001292
EISBN: 978-1-62708-170-2
... the article “Ion-Beam-Assisted Deposition” in this Volume. Ion implantation is intrinsically a vacuum process requiring background pressures of 10 −5 torr or less. Manipulation of components, through the use of vacuum-compatible fixtures, and thermal heat sinking are often required to ensure both...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0006515
EISBN: 978-1-62708-200-6
...-assisted deposition FM figure of merit LBM laser beam machining FP polycrystalline alumina fiber IC integrated circuit FPI fluorescent penetrant inspection LCD liquid crystal display ICF inertial confinement fusion FRP fiber-reinforced plastic ICI International Commission on LCP liquid crystal polymer fss...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006677
EISBN: 978-1-62708-213-6
... Abstract This article is intended to provide the reader with a good understanding of the underlying science, technology, and the most common applications of focused ion beam (FIB) instruments. It begins with a survey of the various types of FIB instruments and their configurations, discusses...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001287
EISBN: 978-1-62708-170-2
...” in this article), or postdeposition heat treatments in oxygen ( Ref 24 ). In some cases, the state of reaction can be increased by concurrent bombardment with a reactive species from a plasma (activated reactive ion plating) ( Ref 25 ) or an ion source (reactive ion beam assisted deposition). For example, SiO...
Book Chapter

By S.L. Rohde
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001288
EISBN: 978-1-62708-170-2
... in Electronics and Electron Physics , Vol 7 , Academic Press , 1955 , p 239 – 298 5. Weissmantel C.R. , Deposition of Metastable Films by Ion Beam and Plasma Techniques , Proc. 9th Int. Vacuum Congress and 5th Int. Conf. on Solid Surfaces ( Madrid ), 26 Sept-1 Oct 1983 , p 229 – 308 6...
Series: ASM Handbook
Volume: 12
Publisher: ASM International
Published: 01 June 2024
DOI: 10.31399/asm.hb.v12.a0006847
EISBN: 978-1-62708-387-4
... Abstract The introduction of focused ion beam (FIB) microscopy in the 1990s added the capability of studying fracture surfaces in the third dimension and making site-specific and stress-free transmission electron microscope (TEM) specimens in situ. This article reviews the methods for preparing...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006436
EISBN: 978-1-62708-192-4
... ); plating ( Ref 17 , 20 , 23 ); and application of solid lubricants by resin bonding/burnishing ( Ref 20 , 23 ), direct ion beam deposition to produce diamond- like carbon (DLC) ( Ref 24 ), and sputtering (of molybdenum disulfide and titanium nitride, for example) ( Ref 18 , 25 , 26 ). These treatments...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006651
EISBN: 978-1-62708-213-6
..., proteins B, P ~5 μm Laser ionization LIMS Solid Triple quadrupole, time of flight, orbitrap Hard Elemental ions B, P ~10 μm Matrix-assisted laser-desorption ionization MALDI Solid Triple quadrupole, time of flight Soft Small molecules, polymers, proteins B, P ~10 μm Desorption...
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005771
EISBN: 978-1-62708-165-8
..., nitriding, carbonitriding, and austenitic and ferritic nitrocarburizing, as well as selective-hardening methods, such as laser transformation hardening, electron beam hardening, ion implantation, selective carburizing, and surface hardening with arc lamps. The article also discusses the factors affecting...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.9781627081702
EISBN: 978-1-62708-170-2