Skip Nav Destination
Close Modal
Search Results for
ion-beam-assisted deposition
Update search
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
NARROW
Format
Topics
Book Series
Date
Availability
1-20 of 201
Search Results for ion-beam-assisted deposition
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
1
Sort by
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001290
EISBN: 978-1-62708-170-2
... Abstract Ion-beam-assisted deposition (IBAD) refers to the process wherein evaporated atoms produced by physical vapor deposition are simultaneously struck by an independently generated flux of ions. This article discusses the energy utilization of this process. It describes the physical...
Abstract
Ion-beam-assisted deposition (IBAD) refers to the process wherein evaporated atoms produced by physical vapor deposition are simultaneously struck by an independently generated flux of ions. This article discusses the energy utilization of this process. It describes the physical and chemical processes occurring at the film-vacuum interface during IBAD and dual-ion-beam sputtering with illustrations. The article also reviews the methods used for large-area, high-volume implementation of IBAD and the modes of film formation for IBAD. It contains a table that presents information on deposition and synthesis of inorganic compounds by IBAD and concludes with a discussion on the improved coating properties, advantages, limitations, and applications of IBAD.
Image
Published: 01 January 1994
Fig. 1 Two common processing techniques. (a) Ion-beam-assisted deposition (IBAD). (b) Dual-ion-beam sputtering (DIBS)
More
Image
Published: 01 January 2003
Image
Published: 01 January 1994
Fig. 2 Physical and chemical processes at the film-vacuum interface during ion-beam-assisted deposition and dual-ion-beam sputtering
More
Image
Published: 01 January 1994
Fig. 3 Two methods used for large-area, high-volume implementation of ion-beam-assisted-deposition. (a) For optical films. (b) For steel sheet
More
Book Chapter
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003685
EISBN: 978-1-62708-182-5
... ) imparting a large increase in the energy of the deposition species, which is atomistic. Fig. 3 Basic ion plating process Ion-beam-assisted deposition (IBAD) and ion- beam-enhanced deposition (IBED) refer to the process wherein evaporated atoms produced by physical vapor deposition (PVD...
Abstract
Vapor-deposition processes fall into two major categories, namely, physical vapor deposition (PVD) and chemical vapor deposition (CVD). This article describes major deposition processes such as sputtering, evaporation, ion plating, and CVD. The list of materials that can be vapor deposited is extensive and covers almost any coating requirement. The article provides a table of some corrosion-resistant vapor deposited materials. It concludes with an overview of the applications of CVD and PVD coatings and a discussion on coatings for graphite, the aluminum coating of steel, and alloy coatings for aircraft turbines, marine turbines, and industrial turbines.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0005586
EISBN: 978-1-62708-170-2
...; electrical current; bias current IBAD ion-beam-assisted deposition IC integrated circuit ICB ionized cluster beam (deposition) ID inside diameter in. inch IP conventional ion plating IR infrared ISCC intergranular stress-corrosion cracking...
Book: Thermal Spray Technology
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005707
EISBN: 978-1-62708-171-9
... techniques such as conventional CVD, laser-assisted CVD, cathodic arc deposition, molecular beam epitaxy, ion plating, and sputtering. anodizing case hardening chemical vapor deposition corrosion electroplating hardfacing hot dip coating ion implantation ion plating physical vapor deposition...
Abstract
Coatings and other surface modifications are used for a variety of functional, economic, and aesthetic purposes. Two major applications of thermal spray coatings are for wear resistance and corrosion resistance. This article discusses thermal (surface hardening) and thermochemical (carburizing, nitriding, and boriding) surface modifications, electrochemical treatments (electroplating, and anodizing), chemical treatments (electroless plating, phosphating, and hot dip coating), hardfacing, and thermal spray processes. It provides information on chemical and physical vapor deposition techniques such as conventional CVD, laser-assisted CVD, cathodic arc deposition, molecular beam epitaxy, ion plating, and sputtering.
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003681
EISBN: 978-1-62708-182-5
.... Plasma ion deposition: Ion beams are used to create coatings having special phases, especially ion-beam-formed carbon coatings in the diamond phase or ion-beam-formed boron nitride coatings. Ion beam assisted deposition: Ion beams are combined with physical vapor deposition. Materials...
Abstract
Surface modification is the alteration of the surface composition or structure using energy or particle beams. This article discusses two different surface modification methods. The first, ion implantation, is the introduction of ionized species into the substrate using kilovolt to megavolt ion accelerating potentials. The second method, laser processing, is high-power laser melting with or without mixing of materials precoated on the substrate, followed by rapid melt quenching. The article also describes the advantages and disadvantages of the surface modification approach to promote corrosion resistance.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... ). The bombarding species and the depositing species can be from a number of sources. Bombardment can take place in a plasma or vacuum environment. When a beam of energetic particles is used in vacuum, the process is often called ion-beam-assisted deposition (IBAD). A vacuum can be defined as an environment...
Abstract
This article begins with a list of the factors that influence the properties of physical vapor deposited films. It describes the steps involved in ion plating, namely, surface preparation, nucleation, interface formation, and film growth. The article discusses the factors influencing the properties of ion-plated films. The sources of potential applied on substrate surface, bombarding species, and depositing species are addressed. The article also provides information on the parameters that influence bombardment. It concludes with a discussion on the advantages, limitations, and applications of ion plating.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001292
EISBN: 978-1-62708-170-2
... the article “Ion-Beam-Assisted Deposition” in this Volume. Ion implantation is intrinsically a vacuum process requiring background pressures of 10 −5 torr or less. Manipulation of components, through the use of vacuum-compatible fixtures, and thermal heat sinking are often required to ensure both...
Abstract
Ion implantation involves the bombardment of a solid material with medium-to-high-energy ionized atoms and offers the ability to alloy virtually any elemental species into the near-surface region of any substrate. This article describes the fundamentals of the ion implantation process and discusses the advantages, limitations, and applications of ion implantation. It also reviews a typical medium current semiconductor implanter adapted for implantation of metals with the aid of illustrations.
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0006515
EISBN: 978-1-62708-200-6
...-assisted deposition FM figure of merit LBM laser beam machining FP polycrystalline alumina fiber IC integrated circuit FPI fluorescent penetrant inspection LCD liquid crystal display ICF inertial confinement fusion FRP fiber-reinforced plastic ICI International Commission on LCP liquid crystal polymer fss...
Abstract
This article is a compilation of abbreviations, symbols, and tradenames for terms related to the properties, selection, processing, and applications of the most widely used nonmetallic engineering materials.
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006677
EISBN: 978-1-62708-213-6
... Abstract This article is intended to provide the reader with a good understanding of the underlying science, technology, and the most common applications of focused ion beam (FIB) instruments. It begins with a survey of the various types of FIB instruments and their configurations, discusses...
Abstract
This article is intended to provide the reader with a good understanding of the underlying science, technology, and the most common applications of focused ion beam (FIB) instruments. It begins with a survey of the various types of FIB instruments and their configurations, discusses the essential components, and explains their function only to the extent that it helps the operator obtain the desired results. An explanation of how the components of ion optical column shape and steer the ion beam to the desired target locations is then provided. The article also reviews the many diverse accessories and options that enable the instrument to realize its full potential across all of the varied applications. This is followed by a detailed analysis of the physical processes associated with the ion beam interacting with the sample. Finally, a complete survey of the most prominent FIB applications is presented.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001287
EISBN: 978-1-62708-170-2
...” in this article), or postdeposition heat treatments in oxygen ( Ref 24 ). In some cases, the state of reaction can be increased by concurrent bombardment with a reactive species from a plasma (activated reactive ion plating) ( Ref 25 ) or an ion source (reactive ion beam assisted deposition). For example, SiO...
Abstract
This article discusses the fundamentals of thermal vaporization and condensation and provides information on the various vaporization sources and methods of vacuum deposition. It offers an overview of reactive evaporation and its deposition techniques. The article also explains the advantages, limitations, and applications of vacuum deposition processes. Finally, it provides information on the gas evaporation process, its processing chamber, and related systems.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001288
EISBN: 978-1-62708-170-2
... in Electronics and Electron Physics , Vol 7 , Academic Press , 1955 , p 239 – 298 5. Weissmantel C.R. , Deposition of Metastable Films by Ion Beam and Plasma Techniques , Proc. 9th Int. Vacuum Congress and 5th Int. Conf. on Solid Surfaces ( Madrid ), 26 Sept-1 Oct 1983 , p 229 – 308 6...
Abstract
Sputtering is a nonthermal vaporization process in which the surface atoms are physically ejected from a surface by momentum transfer from an energetic bombarding species of atomic/molecular size. It uses a glow discharge or an ion beam to generate a flux of ions incident on the target surface. This article provides an overview of the advantages and limitations of sputter deposition. It focuses on the most common sputtering techniques, namely, diode sputtering, radio-frequency sputtering, triode sputtering, magnetron sputtering, and unbalanced magnetron sputtering. The article discusses the fundamentals of plasma formation and the interactions on the target surface. A comparison of reactive and nonreactive sputtering is also provided. The article concludes with a discussion on the several methods of process control and the applications of sputtered films.
Book: Fractography
Series: ASM Handbook
Volume: 12
Publisher: ASM International
Published: 01 June 2024
DOI: 10.31399/asm.hb.v12.a0006847
EISBN: 978-1-62708-387-4
... Abstract The introduction of focused ion beam (FIB) microscopy in the 1990s added the capability of studying fracture surfaces in the third dimension and making site-specific and stress-free transmission electron microscope (TEM) specimens in situ. This article reviews the methods for preparing...
Abstract
The introduction of focused ion beam (FIB) microscopy in the 1990s added the capability of studying fracture surfaces in the third dimension and making site-specific and stress-free transmission electron microscope (TEM) specimens in situ. This article reviews the methods for preparing replicas and the site-specific FIB thin-foil preparation technique. It provides an overview of FIB-TEM specimen preparation.
Book Chapter
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006436
EISBN: 978-1-62708-192-4
... ); plating ( Ref 17 , 20 , 23 ); and application of solid lubricants by resin bonding/burnishing ( Ref 20 , 23 ), direct ion beam deposition to produce diamond- like carbon (DLC) ( Ref 24 ), and sputtering (of molybdenum disulfide and titanium nitride, for example) ( Ref 18 , 25 , 26 ). These treatments...
Abstract
This article describes the surface modification treatments used to modify the tribological properties of titanium alloys. These include physical vapor deposition and thermochemical conversion treatments. The physical vapor deposition includes ion implantation, sputtering, evaporation, and ion plating surface modification treatments. The thermochemical conversion surface treatments include nitriding, carburizing, boriding, and solid lubrication.
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006651
EISBN: 978-1-62708-213-6
..., proteins B, P ~5 μm Laser ionization LIMS Solid Triple quadrupole, time of flight, orbitrap Hard Elemental ions B, P ~10 μm Matrix-assisted laser-desorption ionization MALDI Solid Triple quadrupole, time of flight Soft Small molecules, polymers, proteins B, P ~10 μm Desorption...
Abstract
This article endeavors to familiarize the reader with a selection of different ionization designs and instrument components to provide knowledge for sorting the various analytical strategies in the field of solid analysis by mass spectrometry (MS). It begins with a description of the general principles of MS. This is followed by sections providing a basic understanding of instrumentation and discussing the operating requirements as well as practical considerations related to solid sample analysis by MS. Instrumentation discussed include the triple quadrupole mass spectrometer and the time-of-flight mass spectrometer. Inductively coupled plasma and thermal ionization MS provide atomic information, and direct analysis in real-time and matrix-assisted laser-desorption ionization MS are used to analyze molecular compositions. The article describes various factors pertinent to ionization methods, namely glow discharge mass spectrometry and secondary ion mass spectrometry. It concludes with a section on various examples of applications and interpretation of MS for various materials.
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005771
EISBN: 978-1-62708-165-8
..., nitriding, carbonitriding, and austenitic and ferritic nitrocarburizing, as well as selective-hardening methods, such as laser transformation hardening, electron beam hardening, ion implantation, selective carburizing, and surface hardening with arc lamps. The article also discusses the factors affecting...
Abstract
Surface hardening improves the wear resistance of steel parts. This article focuses exclusively on the methods that involve surface and subsurface modification without any intentional buildup or increase in part dimensions. These include diffusion methods, such as carburizing, nitriding, carbonitriding, and austenitic and ferritic nitrocarburizing, as well as selective-hardening methods, such as laser transformation hardening, electron beam hardening, ion implantation, selective carburizing, and surface hardening with arc lamps. The article also discusses the factors affecting the choice of these surface-hardening methods.
Book
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.9781627081702
EISBN: 978-1-62708-170-2
1