1-20 of 61 Search Results for

ion-beam-assisted deposition

Follow your search
Access your saved searches in your account

Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001290
EISBN: 978-1-62708-170-2
... Abstract Ion-beam-assisted deposition (IBAD) refers to the process wherein evaporated atoms produced by physical vapor deposition are simultaneously struck by an independently generated flux of ions. This article discusses the energy utilization of this process. It describes the physical and...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001287
EISBN: 978-1-62708-170-2
...), or postdeposition heat treatments in oxygen ( Ref 24 ). In some cases, the state of reaction can be increased by concurrent bombardment with a reactive species from a plasma (activated reactive ion plating) ( Ref 25 ) or an ion source (reactive ion beam assisted deposition). For example, SiO, which...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... temperatures lower than in LPCVD, namely, molecular beam epitaxy ( Ref 43 ), ion beam epitaxy ( Ref 44 ), ultrahigh-vacuum CVD ( Ref 45 ), and photo-enhanced CVD ( Ref 46 ). The PECVD process is another exciting option for depositing homoepitaxial or heteroepitaxial films at lower temperatures. PECVD offers...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001286
EISBN: 978-1-62708-170-2
... natural diamond. DLC films are made primarily using PECVD or ion beam techniques with low substrate temperatures ( Ref 81 ). The DLC films are smooth with properties approaching those of natural diamond, except that thermal conductivity is much lower. DLC films can also be deposited by ion bombardment...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
... are atomistic in nature, that is, the deposition species are atoms or molecules, or a combination thereof. Other vapor-transport processes include the physical vapor deposition (PVD) techniques, such as vacuum, evaporation, sputtering, ion plating, ion-beam assist, arc, and ion implantation, which are...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
... evaporation, ion-beam etching, and ion implantation The goal of thermodynamics is to define the composition of various phases in an equilibrium system at a constant temperature and pressure. Although many aspects of MOCVD growth are nonequilibrium, thermodynamics limits the possible outcomes...
Book Chapter

By Donald M. Mattox
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... ). The bombarding species and the depositing species can be from a number of sources. Bombardment can take place in a plasma or vacuum environment. When a beam of energetic particles is used in vacuum, the process is often called ion-beam-assisted deposition (IBAD). A vacuum can be defined as an...
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... reactive or ion beam etching. vapor-phase process vapor-surface interaction hetereogeneous process homogenous reaction chemical vapor deposition numerical simulation molecular modeling multiscale simulation sputtering deposition ion beam etching VAPOR-PHASE PROCESSES (VPP) involve the...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001320
EISBN: 978-1-62708-170-2
... condensation from a flux of neutral or ionized atoms where the metal species are derived from a variety of sources, including electron-beam evaporation, magnetron sputtering, and arc evaporation ( Ref 21 , 22 ). In the ion plating variation of the basic PVD process, the flux of atoms and ions is activated by...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001311
EISBN: 978-1-62708-170-2
... well as sprayed and sol-gel coatings and laser and electron-beam treatments. anodizing buffing chemical conversion coatings chemical vapor deposition cleaning diffusion treatment electron beam treatment finishing grease removal ion implantation laser treatment oxidation resistance...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003836
EISBN: 978-1-62708-183-2
... glassy alloy. Ion implantation, ion beam mixing, and laser pulsing, for example, can produce amorphous surface layers on bulk crystalline substrates. The latter two groups of techniques—molecular deposition and external action techniques—have the advantage of being able to produce considerably thicker...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003815
EISBN: 978-1-62708-183-2
... aluminum-copper alloys results from reduction of copper ions present in the corrosion product of the alloy. Ferric (Fe 3+ ) ion can be reduced by aluminum but does not form a metallic deposit. This ion is rarely encountered in service because it reacts preferentially with oxygen and water to form...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003054
EISBN: 978-1-62708-200-6
... laboratory furnaces or small pilot plant furnaces. Stabilized zirconia is an extremely refractory oxide that conducts electricity via the transport of oxygen ions. It has to be preheated to 1000 to 1200 °C (1830 to 2190 °F) using an auxiliary furnace (often using MoSi 2 or LaCr 2 O 4 heating elements...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0005586
EISBN: 978-1-62708-170-2
...; bias current IBAD ion-beam-assisted deposition IC integrated circuit ICB ionized cluster beam (deposition) ID inside diameter in. inch IP conventional ion plating IR infrared ISCC intergranular stress-corrosion cracking ISO International...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001292
EISBN: 978-1-62708-170-2
... “Ion-Beam-Assisted Deposition” in this Volume. Ion implantation is intrinsically a vacuum process requiring background pressures of 10 −5 torr or less. Manipulation of components, through the use of vacuum-compatible fixtures, and thermal heat sinking are often required to ensure both uniform...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006677
EISBN: 978-1-62708-213-6
... Abstract This article is intended to provide the reader with a good understanding of the underlying science, technology, and the most common applications of focused ion beam (FIB) instruments. It begins with a survey of the various types of FIB instruments and their configurations, discusses...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0006515
EISBN: 978-1-62708-200-6
... HVTR high-voltage track rate Hz hertz i current (measure of number of electrons) I current; emergent intensity IBAD ion-beam-assisted deposition IC integrated circuit ICF inertial confinement fusion ICI International Commission on Illumination...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006651
EISBN: 978-1-62708-213-6
... ions by “wiping off” sample analyte molecules using energetically charged particles, species, or laser beams. Of these methods, DART is one of the most established, with a vast range of applications ranging from pesticide monitoring to detection of explosives and warfare agents and to forensic and...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003022
EISBN: 978-1-62708-200-6
... composition and properties of the coating; and ion-beam-assisted deposition (IBAD), a special version of ion plating where the ions used for bombarding are generated in a separate ion gun. Of these processes, vacuum evaporation and sputter deposition are used for metallizing of plastics. Detailed...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.9781627082136
EISBN: 978-1-62708-213-6