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ion implantation

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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001292
EISBN: 978-1-62708-170-2
... Abstract Ion implantation involves the bombardment of a solid material with medium-to-high-energy ionized atoms and offers the ability to alloy virtually any elemental species into the near-surface region of any substrate. This article describes the fundamentals of the ion implantation process...
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Published: 01 October 2014
Fig. 37 Schematic of equipment for plasma-immersion ion implantation. RF, radio-frequency. Source: Ref 33 More
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Published: 01 January 1994
Fig. 1 Schematic view of ion implantation process (top) and depiction of the interactions with substrate atoms in a single collision cascade (bottom). Source: Ref 6 More
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Published: 01 January 2002
Fig. 28 Effect of ion implantation on the coefficient of friction in fretting of IMI 550 titanium alloy at 500 °C (930 °F) More
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Published: 01 January 2003
Fig. 1 Schematics of (a) research-type ion implantation system and (b) a production-type semiconductor implanter More
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Published: 01 January 1986
Fig. 102 AEM analysis of ion-implanted stainless steel. (a) Electron-diffraction pattern from bcc particles (inner reflections) in an fcc matrix (outer reflections) of 304 stainless steel implanted with 3 × 10 16 Fe/cm 2 at 160 keV. (b) Dark-field micrograph, showing the bcc particles More
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Published: 01 January 1986
Fig. 18 Phosphorus depth profiles for an ion-implanted silicon substrate. (a) Before quantitative analysis of the positive SIMS data. (b) After quantitative analysis. Obtained using 32 O 2 + bombardment in an ion microscope. Obtained using 33 Cs + beam bombardment in an ion More
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Published: 15 December 2019
Fig. 21 Phosphorus depth profiles for an ion-implanted silicon substrate. (a) Before quantitative analysis of the positive secondary ion mass spectroscopy data. (b) After quantitative analysis. Acquired using 32 O 2 + bombardment in an ion microscope. Acquired using 33 Cs + beam More
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Published: 01 January 2003
Fig. 2 Commercial ion implanter for materials modification. Courtesy of Spire Corporation More
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Published: 01 January 1986
Fig. 2 The physical effects of primary ion bombardment: implantation and sputtering. More
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Published: 15 December 2019
Fig. 2 Physical effects of primary ion bombardment: implantation and sputtering More
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003681
EISBN: 978-1-62708-182-5
... Abstract Surface modification is the alteration of the surface composition or structure using energy or particle beams. This article discusses two different surface modification methods. The first, ion implantation, is the introduction of ionized species into the substrate using kilovolt...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006436
EISBN: 978-1-62708-192-4
... Abstract This article describes the surface modification treatments used to modify the tribological properties of titanium alloys. These include physical vapor deposition and thermochemical conversion treatments. The physical vapor deposition includes ion implantation, sputtering, evaporation...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003219
EISBN: 978-1-62708-199-3
... implantation in the context of research and development applications. corrosion-resistant coatings ion implantation ion plating physical vapor deposition sputtering thermal evaporation wear-resistant coatings PHYSICAL VAPOR DEPOSITION (PVD) processes involve the formation of a coating...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001311
EISBN: 978-1-62708-170-2
... and oxidation resistance through the use of polishing, buffing, and wire brushing operations. The article also covers a wide range of surface modification and coating processes, including ion implantation, diffusion, chemical and physical vapor deposition, plating, anodizing, and chemical conversion coatings...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001774
EISBN: 978-1-62708-178-8
... graphically illustrates the SIMS spectra and depth profiles of various materials. The quantitative analysis of ion-implantation profiles, instrumental features required for secondary ion imaging, the analysis of nonmetallic samples, detection sensitivity, and the applications of SIMS are also discussed...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006683
EISBN: 978-1-62708-213-6
... on the effects of ion implantation and electronic excitation on the charge of the sputtered species. The design and operation of the various instrumental components of SIMS is then reviewed. Details on a depth-profiling analysis of SIMS, the quantitative analysis of SIMS data, and the static mode of operation...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006392
EISBN: 978-1-62708-192-4
... implantation. It concludes with information on interaction of wear and corrosion. abrasive wear austenitic manganese steels corrosion hardness evaluation ion implantation lubricants lubricated wear mechanical properties microstructure nonlubricated wear phosphate coatings steel steel...
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005771
EISBN: 978-1-62708-165-8
..., nitriding, carbonitriding, and austenitic and ferritic nitrocarburizing, as well as selective-hardening methods, such as laser transformation hardening, electron beam hardening, ion implantation, selective carburizing, and surface hardening with arc lamps. The article also discusses the factors affecting...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001320
EISBN: 978-1-62708-170-2
... information on the applicable methods for surface engineering of cutting tools, namely, chemical vapor deposited (CVD) coatings, physical vapor deposited coatings, plasma-assisted CVD coatings, diamond coatings, and ion implantation. builtup edge carbides ceramics cermets chemical vapor deposited...