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ion implantation
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Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001292
EISBN: 978-1-62708-170-2
... Abstract Ion implantation involves the bombardment of a solid material with medium-to-high-energy ionized atoms and offers the ability to alloy virtually any elemental species into the near-surface region of any substrate. This article describes the fundamentals of the ion implantation process...
Abstract
Ion implantation involves the bombardment of a solid material with medium-to-high-energy ionized atoms and offers the ability to alloy virtually any elemental species into the near-surface region of any substrate. This article describes the fundamentals of the ion implantation process and discusses the advantages, limitations, and applications of ion implantation. It also reviews a typical medium current semiconductor implanter adapted for implantation of metals with the aid of illustrations.
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Published: 01 January 2002
Fig. 28 Effect of ion implantation on the coefficient of friction in fretting of IMI 550 titanium alloy at 500 °C (930 °F)
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Published: 01 October 2014
Fig. 37 Schematic of equipment for plasma-immersion ion implantation. RF, radio-frequency. Source: Ref 33
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Published: 01 January 1994
Fig. 1 Schematic view of ion implantation process (top) and depiction of the interactions with substrate atoms in a single collision cascade (bottom). Source: Ref 6
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Image
Published: 01 January 2003
Fig. 1 Schematics of (a) research-type ion implantation system and (b) a production-type semiconductor implanter
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Image
Published: 01 January 1986
Fig. 102 AEM analysis of ion-implanted stainless steel. (a) Electron-diffraction pattern from bcc particles (inner reflections) in an fcc matrix (outer reflections) of 304 stainless steel implanted with 3 × 10 16 Fe/cm 2 at 160 keV. (b) Dark-field micrograph, showing the bcc particles
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Image
Published: 01 January 1986
Fig. 18 Phosphorus depth profiles for an ion-implanted silicon substrate. (a) Before quantitative analysis of the positive SIMS data. (b) After quantitative analysis. Obtained using 32 O 2 + bombardment in an ion microscope. Obtained using 33 Cs + beam bombardment in an ion
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Image
Published: 01 January 2003
Image
Published: 15 December 2019
Fig. 21 Phosphorus depth profiles for an ion-implanted silicon substrate. (a) Before quantitative analysis of the positive secondary ion mass spectroscopy data. (b) After quantitative analysis. Acquired using 32 O 2 + bombardment in an ion microscope. Acquired using 33 Cs + beam
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Published: 01 January 1986
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Published: 15 December 2019
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003681
EISBN: 978-1-62708-182-5
... Abstract Surface modification is the alteration of the surface composition or structure using energy or particle beams. This article discusses two different surface modification methods. The first, ion implantation, is the introduction of ionized species into the substrate using kilovolt...
Abstract
Surface modification is the alteration of the surface composition or structure using energy or particle beams. This article discusses two different surface modification methods. The first, ion implantation, is the introduction of ionized species into the substrate using kilovolt to megavolt ion accelerating potentials. The second method, laser processing, is high-power laser melting with or without mixing of materials precoated on the substrate, followed by rapid melt quenching. The article also describes the advantages and disadvantages of the surface modification approach to promote corrosion resistance.
Book Chapter
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006436
EISBN: 978-1-62708-192-4
... Abstract This article describes the surface modification treatments used to modify the tribological properties of titanium alloys. These include physical vapor deposition and thermochemical conversion treatments. The physical vapor deposition includes ion implantation, sputtering, evaporation...
Abstract
This article describes the surface modification treatments used to modify the tribological properties of titanium alloys. These include physical vapor deposition and thermochemical conversion treatments. The physical vapor deposition includes ion implantation, sputtering, evaporation, and ion plating surface modification treatments. The thermochemical conversion surface treatments include nitriding, carburizing, boriding, and solid lubrication.
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003219
EISBN: 978-1-62708-199-3
... implantation in the context of research and development applications. corrosion-resistant coatings ion implantation ion plating physical vapor deposition sputtering thermal evaporation wear-resistant coatings PHYSICAL VAPOR DEPOSITION (PVD) processes involve the formation of a coating...
Abstract
Physical vapor deposition (PVD) coatings are harder than any metal and are used in applications that cannot tolerate even microscopic wear losses. This article describes the three most common PVD processes: thermal evaporation, sputtering, and ion plating. It also discusses ion implantation in the context of research and development applications.
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001774
EISBN: 978-1-62708-178-8
... graphically illustrates the SIMS spectra and depth profiles of various materials. The quantitative analysis of ion-implantation profiles, instrumental features required for secondary ion imaging, the analysis of nonmetallic samples, detection sensitivity, and the applications of SIMS are also discussed...
Abstract
In secondary ion mass spectroscopy (SIMS), an energetic beam of focused ions is directed at the sample surface in a high or ultrahigh vacuum (UHV) environment. The transfer of momentum from the impinging primary ions to the sample surface causes sputtering of surface atoms and molecules. This article focuses on the principles and applications of high sputter rate dynamic SIMS for depth profiling and bulk impurity analysis. It provides information on broad-beam instruments, ion microprobes, and ion microscopes, detailing their system components with illustrations. The article graphically illustrates the SIMS spectra and depth profiles of various materials. The quantitative analysis of ion-implantation profiles, instrumental features required for secondary ion imaging, the analysis of nonmetallic samples, detection sensitivity, and the applications of SIMS are also discussed.
Book Chapter
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006392
EISBN: 978-1-62708-192-4
... implantation. It concludes with information on interaction of wear and corrosion. abrasive wear austenitic manganese steels corrosion hardness evaluation ion implantation lubricants lubricated wear mechanical properties microstructure nonlubricated wear phosphate coatings steel steel...
Abstract
This article discusses the classification of wear based on the presence or absence of effective lubricants, namely, lubricated and nonlubricated wear. Variations in ambient temperature, atmosphere, load, and sliding speed, as well as variations in material bulk composition, microstructure, surface treatment, and surface finish of steel are also considered. The article discusses the types, wear testing, wear evaluation, and hardness evaluation of abrasive wear. It describes the selection criteria of steels for wear resistance. The article also describes the importance of hardness and microstructure as factors in resistance to wear. It provides a discussion on the resistance of various materials to wear in specific applications. The wear resistance of austenitic manganese steels is also discussed. The article discusses the applications of phosphate coatings, wear-resistant coatings, and ion implantation. It concludes with information on interaction of wear and corrosion.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001311
EISBN: 978-1-62708-170-2
... and oxidation resistance through the use of polishing, buffing, and wire brushing operations. The article also covers a wide range of surface modification and coating processes, including ion implantation, diffusion, chemical and physical vapor deposition, plating, anodizing, and chemical conversion coatings...
Abstract
This article reviews cleaning and finishing operations that have proven to be effective on titanium, its alloys, and semi-fabricated titanium products. It explains how to remove scale, tarnish films, grease, and other soils and how to achieve required finishes and/or improve wear and oxidation resistance through the use of polishing, buffing, and wire brushing operations. The article also covers a wide range of surface modification and coating processes, including ion implantation, diffusion, chemical and physical vapor deposition, plating, anodizing, and chemical conversion coatings as well as sprayed and sol-gel coatings and laser and electron-beam treatments.
Book Chapter
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006683
EISBN: 978-1-62708-213-6
... on the effects of ion implantation and electronic excitation on the charge of the sputtered species. The design and operation of the various instrumental components of SIMS is then reviewed. Details on a depth-profiling analysis of SIMS, the quantitative analysis of SIMS data, and the static mode of operation...
Abstract
This article focuses on the principles and applications of high-sputter-rate dynamic secondary ion mass spectroscopy (SIMS) for depth profiling and bulk impurity analysis. It begins with an overview of various factors pertinent to sputtering. This is followed by a discussion on the effects of ion implantation and electronic excitation on the charge of the sputtered species. The design and operation of the various instrumental components of SIMS is then reviewed. Details on a depth-profiling analysis of SIMS, the quantitative analysis of SIMS data, and the static mode of operation of time-of-flight SIMS are covered. Instrumental features required for secondary ion imaging are presented and the differences between quadrupole and high-resolution magnetic mass filters are described. The article also reviews the optimum method for analysis of nonmetallic samples and high detection sensitivity of SIMS. It ends with a discussion on a variety of examples of SIMS applications.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001305
EISBN: 978-1-62708-170-2
..., and buffing, are reviewed. The article also explains the procedures of electrocleaning, electropolishing, electroplating, painting, surface blackening, coloring, terne coatings, and thermal spraying. It includes useful information on the surface modification of stainless steels, namely, ion implantation...
Abstract
Passivation; pickling, that is, acid descaling; electropolishing; and mechanical cleaning are important surface treatments for the successful performance of stainless steel used for piping, pressure vessels, tanks, and machined parts in a wide variety of applications. This article provides an overview of the various types of stainless steels and describes the commonly used cleaning methods, namely, alkaline cleaning, emulsion cleaning, solvent cleaning, vapor degreasing, ultrasonic cleaning, and acid cleaning. Finishing operations of stainless steels, such as grinding, polishing, and buffing, are reviewed. The article also explains the procedures of electrocleaning, electropolishing, electroplating, painting, surface blackening, coloring, terne coatings, and thermal spraying. It includes useful information on the surface modification of stainless steels, namely, ion implantation and laser surface processing. Surface hardening techniques, namely, nitriding, carburizing, boriding, and flame hardening, performed to improve the resistance of stainless steel alloys are also reviewed.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001320
EISBN: 978-1-62708-170-2
... information on the applicable methods for surface engineering of cutting tools, namely, chemical vapor deposited (CVD) coatings, physical vapor deposited coatings, plasma-assisted CVD coatings, diamond coatings, and ion implantation. builtup edge carbides ceramics cermets chemical vapor deposited...
Abstract
The classes of tool materials for machining operations are high-speed tool steels, carbides, cermets, ceramics, polycrystalline cubic boron nitrides, and polycrystalline diamonds. This article discusses the expanding role of surface engineering in increasing the manufacturing productivity of carbide, cermet, and ceramic cutting tool materials used in machining operations. The useful life of cutting tools may be limited by a variety of wear processes, such as crater wear, flank wear or abrasive wear, builtup edge, depth-of-cut notching, and thermal cracks. The article provides information on the applicable methods for surface engineering of cutting tools, namely, chemical vapor deposited (CVD) coatings, physical vapor deposited coatings, plasma-assisted CVD coatings, diamond coatings, and ion implantation.
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