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ion beam etching

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Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... and reactive or ion beam etching. vapor-phase process vapor-surface interaction hetereogeneous process homogenous reaction chemical vapor deposition numerical simulation molecular modeling multiscale simulation sputtering deposition ion beam etching VAPOR-PHASE PROCESSES (VPP) involve...
Image
Published: 15 December 2019
Fig. 15 Diffraction patterns from oriented pyrolytic graphite. (a) Freshly cleaved sample. (b to d) Increasing surface damage caused by ion beam etching More
Image
Published: 01 January 1986
Fig. 15 Diffraction patterns from oriented pyrolytic graphite. (a) Freshly cleaved sample. (b to d) Increasing surface damage caused by ion beam etching More
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001769
EISBN: 978-1-62708-178-8
... for ion beam etching of the surface and for contact angle measurements in situ. The experiment consisted of ion beam etching the surface to make it atomically rough, observing the changes in the diffraction pattern, and correlating the changes in contact angle to the LEED results. Figure 15 shows...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006655
EISBN: 978-1-62708-213-6
... to determine that the sample surface was clean. The vacuum chamber also has capabilities for ion beam etching of the surface and for contact angle measurements in situ. The experiment consisted of ion beam etching the surface to make it atomically rough, observing the changes in the diffraction pattern...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006677
EISBN: 978-1-62708-213-6
... Abstract This article is intended to provide the reader with a good understanding of the underlying science, technology, and the most common applications of focused ion beam (FIB) instruments. It begins with a survey of the various types of FIB instruments and their configurations, discusses...
Image
Published: 15 December 2019
Fig. 23 Positive secondary ion mass spectroscopy (SIMS) depth profiles. (a) Various constituents. (b) Hydrogen in a calcium-boroaluminosilicate glass ribbon after acid etching 16 h in H 2 SO 4 . Acquired using Ar + primary ion bombardment in a scanning ion microprobe and an electron beam More
Image
Published: 01 January 1986
Fig. 20 Positive SIMS depth profiles. (a) Various constituents. (b) Hydrogen in a calcium-boroaluminosilicate glass ribbon after acid-etching 16 h in H 2 SO 4 . Obtained using Ar + primary ion bombardment in a scanning ion microprobe and an electron beam for charge neutralization More
Book Chapter

By Donald M. Mattox
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... ). The bombarding species and the depositing species can be from a number of sources. Bombardment can take place in a plasma or vacuum environment. When a beam of energetic particles is used in vacuum, the process is often called ion-beam-assisted deposition (IBAD). A vacuum can be defined as an environment...
Image
Published: 31 October 2011
Fig. 13 Sealing patch on microelectromechanical systems-type peristaltic pump etch holes produced by focused ion beam deposition on silicon from a platinum-containing organometallic gas. Source: Ref 46 More
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001774
EISBN: 978-1-62708-178-8
... Abstract In secondary ion mass spectroscopy (SIMS), an energetic beam of focused ions is directed at the sample surface in a high or ultrahigh vacuum (UHV) environment. The transfer of momentum from the impinging primary ions to the sample surface causes sputtering of surface atoms...
Series: ASM Handbook
Volume: 12
Publisher: ASM International
Published: 01 June 2024
DOI: 10.31399/asm.hb.v12.a0006847
EISBN: 978-1-62708-387-4
... Abstract The introduction of focused ion beam (FIB) microscopy in the 1990s added the capability of studying fracture surfaces in the third dimension and making site-specific and stress-free transmission electron microscope (TEM) specimens in situ. This article reviews the methods for preparing...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006683
EISBN: 978-1-62708-213-6
... sensitivity of SIMS. It ends with a discussion on a variety of examples of SIMS applications. secondary ion mass spectroscopy Overview Introduction In secondary ion mass spectroscopy (SIMS), an energetic beam of focused ions is directed at the sample surface in a high- or ultrahigh-vacuum...
Series: ASM Handbook
Volume: 20
Publisher: ASM International
Published: 01 January 1997
DOI: 10.31399/asm.hb.v20.a0002494
EISBN: 978-1-62708-194-8
... become distorted during drying/fusing cycle Mask areas not to be coated Ion implantation Allow for electrical contact to be made on nonsignificant surfaces or use a conductive screen Avoid features that would shield the surface from the beam (line-of-sight limited) unless multiple beams...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001770
EISBN: 978-1-62708-178-8
...). Auger electron emission is also caused by energetic ions, such as those used for ion beam sputtering of solid surfaces, in conjunction with most surface analysis techniques. However, ion-induced Auger yields are pronounced only for some elements, for example, aluminum, and generally from 0 to 100 eV...
Series: ASM Handbook
Volume: 22B
Publisher: ASM International
Published: 01 November 2010
DOI: 10.31399/asm.hb.v22b.a0005504
EISBN: 978-1-62708-197-9
... Abstract This article reviews the characterization methods for producing 3-D microstructural data sets. The methods include serial sectioning by mechanical material removal method and focused ion beam tomography method. The article describes how these data sets are used in realistic 3-D...
Series: ASM Handbook
Volume: 9
Publisher: ASM International
Published: 01 December 2004
DOI: 10.31399/asm.hb.v09.a0003760
EISBN: 978-1-62708-177-1
... sectioning, focused ion beam tomography, atom probe tomography, and X-ray microtomography. Nine case studies are presented that represent the work of the various research groups currently working on 3D microscopy using serial sectioning and illustrate the variants of the basic experimental techniques...
Book Chapter

By S.L. Rohde
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001288
EISBN: 978-1-62708-170-2
.... Harper J.E. , Ion Beam Sputtering , Thin Film Processes , Vossen J.L. and Kern W. , Ed., Academic Press , 1978 , p 175 – 206 10.1016/B978-0-12-728250-3.50010-6 2. Lee R.E. , Microfabrication by Ion Beam Etching , J. Vac. Sci. Technol. , Vol 16 ( No. 2 ), 1979 , p...
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006126
EISBN: 978-1-62708-175-7
.... For high-resolution work, an ultra-fine coating deposit is required. Chromium or gold/palladium sputtered in a special ultra-high-vacuum sputtering system using a macromolecular pump produces fine-grained coatings. Ion beam sputtering produces high-resolution coatings and can deposit multiple material...
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003681
EISBN: 978-1-62708-182-5
... Abstract Surface modification is the alteration of the surface composition or structure using energy or particle beams. This article discusses two different surface modification methods. The first, ion implantation, is the introduction of ionized species into the substrate using kilovolt...