Skip Nav Destination
Close Modal
By
Prabha K. Tedrow, Rafael Reif
By
Donald M. Mattox
By
Hans J. Fecht, Bernard Billia
By
Manijeh Razeghi
By
Donald M. Mattox
By
Jigneshkumar P. Patel, Yanika Schneider, Malavarayan Sankarasubramanian, Vidya Jayaram
By
Y. Katz, N. Tymiak, W.W. Gerberich
Search Results for
in-situ film growth
Update search
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
Filter
- Title
- Authors
- Author Affiliations
- Full Text
- Abstract
- Keywords
- DOI
- ISBN
- EISBN
- Issue
- ISSN
- EISSN
- Volume
- References
NARROW
Format
Topics
Book Series
Date
Availability
1-20 of 250
Search Results for in-situ film growth
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
1
Sort by
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0001113
EISBN: 978-1-62708-162-7
... describes the in-situ film growth techniques for producing atomic oxygen by radio frequency excitation or microwave discharge or with ozone. electron-beam co-evaporation high-critical-temperature materials in-situ film growth laser ablation low-critical-temperature materials sputtering thin-film...
Abstract
This article focuses on different thin-film deposition techniques used to make superconducting films and discusses the properties and advantages of high-critical-temperature and low-critical-temperature materials in a number of applications, including signal processing and analog electronic devices. The article gives a brief introduction on superconducting materials, substrates and buffer layers and discusses the major deposition techniques such as, electron-beam co-evaporation, sputtering from either a composite target or multiple sources and laser ablation. The article also describes the in-situ film growth techniques for producing atomic oxygen by radio frequency excitation or microwave discharge or with ozone.
Book Chapter
Plasma-Enhanced Chemical Vapor Deposition
Available to PurchaseBook: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... relatively high concentrations of dopant species are introduced in the LPCVD reactor during film growth. When PECVD is used to dope the polycrystalline silicon films in situ, the conductivity of these films can be modulated by six orders of magnitude for both p-type (by adding diborane) and n-type (by adding...
Abstract
This article discusses the application of amorphous and crystalline films through plasma-enhanced chemical vapor deposition (PECVD) from the view point of microelectronic device fabrication. It describes the various types of PECVD reactors and deposition techniques. Plasma enhancement of the CVD process is discussed briefly. The article also describes the properties of amorphous and crystalline films deposited by the PECVD process for integrated circuit fabrication.
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003585
EISBN: 978-1-62708-182-5
... in recent years, resulting in the development of many models of the passive film by the application of a whole array of in situ and ex situ techniques developed over the past 25 to 30 years. Two examples of collections of such models ( Fig. 5 ) have been given by Sato ( Ref 13 ) and Cohen ( Ref 14...
Abstract
This article reviews the types of passivity and presents tactics that employ passivity to control corrosion. Thermodynamics provides a guide to the conditions under which passivation becomes possible. A valuable guide to thermodynamics is the potential-pH diagram and the Pourbaix diagram. The article presents a potential-pH diagram for the iron-water system and an illustration of an idealized anodic polarization curve for a metal surface, which serves as a basis for describing the kinetics of passivation. It discusses five properties of passive films: thickness, composition, structure, electronic properties, and mechanical properties. The article outlines three possible processes that can form passive films: direct film formation, dissolution precipitation, and anodic oxidation of metal ions in solution. It describes the breakdown of the passive film using various models and highlighting the effect of alloy composition and structure.
Book Chapter
Adhesion Testing
Available to PurchaseSeries: ASM Handbook
Volume: 8
Publisher: ASM International
Published: 01 January 2000
DOI: 10.31399/asm.hb.v08.a0003280
EISBN: 978-1-62708-176-4
... interfaces. Testing techniques for <i>in situ</i> environmental testing of thin-film adhesion are also reviewed. adhesion testing interfacial degradation thermodynamic adhesion interfacial adhesion stress-corrosion cracking environmental testing thin-film adhesion ADHESION refers...
Abstract
This article describes measurement techniques for the three basic types of adhesion: fundamental adhesion, thermodynamic adhesion, and practical adhesion. It discusses common measurement methods for each type of adhesion with the main focus on practical adhesion testing of coatings and thin films. The article provides an insight into the mechanisms of environmentally induced interfacial degradation by discussing the fundamental aspects of adhesion between two dissimilar materials. It examines the use of adhesion tests in the evaluation of stress-corrosion cracking within bimaterial interfaces. Testing techniques for <i>in situ</i> environmental testing of thin-film adhesion are also reviewed.
Book Chapter
Growth and Growth-Related Properties of Films Formed by Physical Vapor Deposition
Available to PurchaseBook: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001286
EISBN: 978-1-62708-170-2
... Abstract This article describes eight stages of the atomistic film growth: vaporization of the material, transport of the material to the substrate, condensation and nucleation of the atoms, nuclei growth, interface formation, film growth, changes in structure during the deposition...
Abstract
This article describes eight stages of the atomistic film growth: vaporization of the material, transport of the material to the substrate, condensation and nucleation of the atoms, nuclei growth, interface formation, film growth, changes in structure during the deposition, and postdeposition changes. It also discusses the effects and causes of growth-related properties of films deposited by physical vapor deposition processes, including residual film stress, density, and adhesion.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001294
EISBN: 978-1-62708-170-2
... for the growth of high-quality multicomponent oxide thin films ( Ref 1 , 2 , 3 ). Conceptually, PLD is an extremely simple PVD technique. The output of a short laser pulse (10 to 30 ns) is focused onto a solid target. The laser rapidly raises the surface temperature of a small portion of the target well beyond...
Abstract
This article presents a general description of pulsed-laser deposition. It describes the components of pulsed-laser deposition equipment. The article also discusses the effects of angular distribution of materials. Finally, the article reviews the characteristics of high-temperature superconductors and ferroelectric materials.
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001769
EISBN: 978-1-62708-178-8
... or disordered. Although LEED is the best known and most widely used surface crystallographic technique, other diffraction techniques can provide information on the surface structure. Reflection high-energy electron diffraction (RHEED) is applied widely to the epitaxial growth of films. X-ray diffraction can...
Abstract
Low-energy electron diffraction (LEED) is a technique for investigating the crystallography of surfaces and overlayers adsorbed on surfaces. This article describes the principles of diffraction from surfaces, and elucidates the method of sample preparation to achieve diffraction patterns. The article describes the limitations of surface sensitive electron diffraction and discusses the applications of LEED with examples.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... Abstract This article begins with a list of the factors that influence the properties of physical vapor deposited films. It describes the steps involved in ion plating, namely, surface preparation, nucleation, interface formation, and film growth. The article discusses the factors influencing...
Abstract
This article begins with a list of the factors that influence the properties of physical vapor deposited films. It describes the steps involved in ion plating, namely, surface preparation, nucleation, interface formation, and film growth. The article discusses the factors influencing the properties of ion-plated films. The sources of potential applied on substrate surface, bombarding species, and depositing species are addressed. The article also provides information on the parameters that influence bombardment. It concludes with a discussion on the advantages, limitations, and applications of ion plating.
Book Chapter
Thermophysical Properties of Liquids and Solidification Microstructure Characteristics—Benchmark Data Generated in Microgravity
Available to PurchaseSeries: ASM Handbook
Volume: 22B
Publisher: ASM International
Published: 01 November 2010
DOI: 10.31399/asm.hb.v22b.a0005522
EISBN: 978-1-62708-197-9
... of low-gravity platforms and facilities for solidification processing. It provides a description of dendritic growth studies and electromagnetic levitation. The article concludes with information on the in situ and real-time monitoring of solidification processing. casting metals and alloys...
Abstract
For a wide range of new or better products, solidification processing of metallic materials from the melt is a step of uppermost importance in the industrial production chain. This article discusses the casting and solidification of molten metallic alloy along with the application of low-gravity platforms and facilities for solidification processing. It provides a description of dendritic growth studies and electromagnetic levitation. The article concludes with information on the in situ and real-time monitoring of solidification processing.
Book Chapter
Chemical Vapor Deposition of Semiconductor Materials
Available to PurchaseBook: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
... film purity. The use of UHV has two advantages. First, atoms and molecules reach the growth surface in a very clean condition. Second, the growth process can be monitored by in-situ diagnostic techniques as the crystal grows one atomic layer at a time ( Ref 39 ). The diagnostic techniques that are used...
Abstract
This article describes the vapor-phase growth techniques applied to the epitaxial deposition of semiconductor films and discusses the fundamental processes involved in metal-organic chemical vapor deposition (MOCVD). It reviews the thermodynamics that determine the driving force behind the overall growth process and the kinetics that define the rates at which the various processes occur. The article provides information on the reactor systems and hardware, MOCVD starting materials, engineering considerations that optimize growth, and the growth parameters for a variety of Group III-V, II-VI, and IV semiconductors.
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006655
EISBN: 978-1-62708-213-6
... crystallographic technique, other diffraction techniques can provide information on the surface structure. Reflection high-energy electron diffraction is applied widely to the epitaxial growth of reflection high-energy electron diffraction (RHEED) films. X-ray diffraction also can be used for surface...
Abstract
Low-energy electron diffraction (LEED) is a technique for investigating the crystallography of surfaces and overlayers adsorbed on surfaces. This article provides a brief account of LEED, covering the principles and measurements of diffraction from surfaces. Some of the processes involved in sample preparation are described. In addition, the article discusses the limitations of surface-sensitive electron diffraction and the applications of LEED with examples.
Series: ASM Handbook
Volume: 6
Publisher: ASM International
Published: 01 January 1993
DOI: 10.31399/asm.hb.v06.a0001390
EISBN: 978-1-62708-173-3
... Abstract Diffusion brazing (DFB) is a process that coalesces, or joins, metals by heating them to a suitable brazing temperature at which either a preplaced filler metal will melt and flow by capillary attraction or a liquid phase will form in situ between one faying surface and another...
Abstract
Diffusion brazing (DFB) is a process that coalesces, or joins, metals by heating them to a suitable brazing temperature at which either a preplaced filler metal will melt and flow by capillary attraction or a liquid phase will form in situ between one faying surface and another. This article discusses the two critical aspects of DFB, namely, a liquid filler metal must be formed and become active in the joint area and extensive diffusion of filler metal elements into the base metal must occur. It schematically illustrates a diffusion process that results in the loss of identity of original brazed joint. The article also discusses the advantages of DFB.
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001760
EISBN: 978-1-62708-178-8
... thin film and surface modified structures. The second area of research is material transformations and kinetics of crystal processes. Synchrotron radiation is particularly advantageous for these studies, because the bright beam allows the dynamic processes to be followed in situ. In the third field...
Abstract
X-ray topography is a technique that comprises topography and x-ray diffraction. This article provides a description of the kinematical theory and the dynamical theory of diffraction. It provides useful information on the configurations of reflection and transmission topography. The article explains various topographic methods, namely, divergent beam method, polycrystal rocking curve analysis, line broadening analysis, microbeam method, and polycrystal scattering topography, as well as their instrumentation. It also describes the applications of x-ray topography.
Book Chapter
Vacuum Deposition, Reactive Evaporation, and Gas Evaporation
Available to PurchaseBook: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001287
EISBN: 978-1-62708-170-2
...) to randomize the flux distribution and improve the surface covering ability of evaporated films ( Ref 17 ) have been singularly unsuccessful because of the poor density of the deposited material. Additional information on condensation and growth is available in the article “Growth and Growth-Related...
Abstract
This article discusses the fundamentals of thermal vaporization and condensation and provides information on the various vaporization sources and methods of vacuum deposition. It offers an overview of reactive evaporation and its deposition techniques. The article also explains the advantages, limitations, and applications of vacuum deposition processes. Finally, it provides information on the gas evaporation process, its processing chamber, and related systems.
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006360
EISBN: 978-1-62708-192-4
... for diamond growth. It was recognized that in order to grow diamond films, the rates of nucleation and growth of the two competing carbon phases—graphite and diamond—had to be controlled. In particular, a key finding was that a deposition environment with excess hydrogen and low carbon supersaturation...
Abstract
This article describes two variations of carbon-base coatings: diamondlike carbon (DLC) coatings and polycrystalline diamond (PCD) coatings. It discusses the basics of a few deposition methods as they apply to industrially relevant coatings. The methods include deposition of tungsten-containing hydrogenated amorphous carbon films, deposition of tetrahedral amorphous carbon films, and deposition of silicon-incorporated hydrogenated amorphous carbon films. The most common deposition technologies for diamond films are also discussed. The article provides information on surface preparation for DLC and diamond deposition. It also provides a discussion on the coating composition and structure, mechanical and tribological properties, and applications of DLC and diamond coatings. The quality control techniques for DLC and diamond coatings are specified to meet customer requirements and ensure repeatable quality.
Book Chapter
Fundamentals of Polymer Additives
Available to PurchaseSeries: ASM Handbook
Volume: 11B
Publisher: ASM International
Published: 15 May 2022
DOI: 10.31399/asm.hb.v11B.a0006939
EISBN: 978-1-62708-395-9
... psi) ( Ref 6 , 25 – 27 ). The different methods for producing CNTs are as follows ( Ref 25 – 27 , 29 ): Surface-mediated growth of vertically aligned tubes by plasma-enhanced vapor deposition Chemical vapor deposition Laser ablation High-pressure carbon monoxide Arc discharge...
Abstract
Polymer materials are key building blocks of the modern world, commonly used in packaging, automobiles, building materials, electronics, telecommunications, and many other industries. These commercial applications of polymeric materials would not be possible without the use of additives. This article is divided into five sections: mechanical property modifiers, physical property modifiers, biological function modifiers, processing aids, and colorants. It describes three classes of additives that are used to inhibit biological activity, six classes of mechanical property modifiers, three classes of physical property modifiers, and two classes of both colorants and processing aids.
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006644
EISBN: 978-1-62708-213-6
... of in situ characterization during crystal growth, heat treatment, stress application, device operation, and so on allows for the study of the generation, interaction, and propagation of defects, making it a versatile technique to study many materials processes. The first topographic image of a single...
Abstract
X-ray topography is the general term for a family of x-ray diffraction imaging techniques capable of providing information on the nature and distribution of imperfections. This article provides a detailed account of x-ray topography techniques, providing information on the historical background and development trends in x-ray diffraction topography. The discussion covers the general principles, components of systems, and applications of x-ray topography techniques, namely conventional X-ray topographic techniques and synchrotron x-ray topographic techniques.
Book Chapter
Evaluation of Environmentally Assisted Crack Growth
Available to PurchaseSeries: ASM Handbook
Volume: 8
Publisher: ASM International
Published: 01 January 2000
DOI: 10.31399/asm.hb.v08.a0003309
EISBN: 978-1-62708-176-4
... on the environmentally assisted crack growth of polymers is also included. The article details the evaluation of nanoscale environmental effects and indentation-induced cohesive cracking. It also provides information on scanning probe microscopy. hydrogen embrittlement stress-corrosion cracking corrosion fatigue...
Abstract
This article describes the types, mechanism, and typical test methods along with their configurations for the evaluation of hydrogen embrittlement, stress-corrosion cracking, and corrosion fatigue with an emphasis on fracture mechanics methodologies for metals. An overview on the environmentally assisted crack growth of polymers is also included. The article details the evaluation of nanoscale environmental effects and indentation-induced cohesive cracking. It also provides information on scanning probe microscopy.
Book Chapter
Fatigue of Brittle Materials
Available to PurchaseBook: Fatigue and Fracture
Series: ASM Handbook
Volume: 19
Publisher: ASM International
Published: 01 January 1996
DOI: 10.31399/asm.hb.v19.a0002417
EISBN: 978-1-62708-193-1
... phases that are formed in situ or left over from the processing of the material Creep cavitation Fracture of the reinforcement phase Crack-wake region Bridging of the crack faces by debris particles, unbroken grains, glassy films, or reinforcements Transformation-induced or roughness...
Abstract
This article summarizes the understanding of the mechanisms and mechanical effects of fatigue processes in highly brittle materials, with particular emphasis on ceramics. It provides a discussion on room-temperature fatigue crack growth in monolithic ceramics, transformation-toughened ceramics, and ceramic composites under cyclic compression. The cyclic damage zones ahead of tensile fatigue cracks, crack propagation under cyclic tension or tension-compression loads, and elevated-temperature fatigue crack growth in monotonic and composite ceramics, are discussed. The article presents ceramic fatigue data for fatigue crack growth testing and concludes with a discussion on life prediction for ceramics or ceramic-matrix composites.
Book: Fractography
Series: ASM Handbook Archive
Volume: 12
Publisher: ASM International
Published: 01 January 1987
DOI: 10.31399/asm.hb.v12.a0001835
EISBN: 978-1-62708-181-8
... available for in situ fracture studies and have application in the kinematic analysis of deformation. These features make SEM an ideal tool for the study of fracture surfaces. Different fracture modes exhibit unique features that are easily documented by SEM. This article will discuss the basic...
Abstract
Scanning electron microscopy (SEM) has unique capabilities for analyzing fracture surfaces. This article discusses the basic principles and practice of SEM, with an emphasis on its applications in fractography. The topics include an introduction to SEM instrumentation, imaging and analytical capabilities, specimen preparation, and the interpretation of fracture features. SEM can be subdivided into four systems, namely, illuminating/imaging, information, display, and vacuum systems. The article also describes the major criteria and techniques of SEM specimen preparation, and the general features of ductile and brittle fracture modes.
1