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focused ion beam milling

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Published: 15 December 2019
Fig. 42 Single-crystalline copper sample gallium focused ion beam milled to create cantilevers for testing. Reprinted with permission from Ref 70 More
Image
Published: 30 September 2015
Fig. 4 A single magnesium alloy powder particle showing the focused ion beam milling technique to achieve 100 nm thickness for electron transparency for TEM. Courtesy of University of Central Florida More
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006677
EISBN: 978-1-62708-213-6
... is presented. ion beam interaction focused ion beam imaging focused ion beam milling Overview Introduction Focused ion beam (FIB) instruments can be thought of as the tools that can help humans to see, manipulate, and analyze matter at the smallest length scales. At the most fundamental...
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006126
EISBN: 978-1-62708-175-7
..., showing the dark B 4 C phase dispersed within agglomerates. Courtesy of University of Central Florida To analyze powders using a transmission electron microscope (TEM), the powder is attached to a TEM grid and thinned to electron transparency by focused ion-beam milling (FIB). Figure 4 shows...
Image
Published: 15 December 2019
Fig. 37 (a) Typical focused ion beam (FIB) and scanning electron microscope (SEM) geometry for producing a cross section. (b) Cross section of a spherical particle from an iron powder. SEM image nicely shows the surface newly exposed by FIB milling. Courtesy of Tescan Orsay Holding, a.s. More
Image
Published: 15 December 2019
Fig. 45 (a) Forescattered electron micrograph of iron surface before oxidation. (b, c) Environmental scanning electron microscope/secondary electron micrographs during oxidation. (d) Secondary electron micrograph of focused ion beam (FIB)-milled cross section showing oxide scale thickness More
Series: ASM Handbook
Volume: 22B
Publisher: ASM International
Published: 01 November 2010
DOI: 10.31399/asm.hb.v22b.a0005504
EISBN: 978-1-62708-197-9
... its publication. Due to space limitations, this section focuses exclusively on experimental characterization methods involving serial-sectioning-based 3-D reconstructions centered about sequential planar milling (by either mechanical or ion beam methods); other sections of this article describe how...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003253
EISBN: 978-1-62708-199-3
.... Secondary Ion Mass Spectroscopy (SIMS) Secondary ion mass spectroscopy (SIMS) directs a finely focused beam of energetic ions onto the sample surface, then it collects and analyzes the ionized atoms or clusters of atoms ejected from the sample surface by this beam. Information can be obtained...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006748
EISBN: 978-1-62708-213-6
... or volumetric analysis. Bur- concerned and the energy levels involved. ity of light. ets are usually made from uniform-bore glass tubing in capacities of 5 to 100 mL, charging. In scanning electron microscopy blank. The measured value obtained when a the most common being 50 mL. See also and focused ion beam...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003252
EISBN: 978-1-62708-199-3
... adjacent to the hole are frequently thin enough to be electron transparent. If electropolishing or ion milling are continued too long, the thin electron transparent sections adjacent to the hole will be removed and the remaining material will likely be too thick to be penetrated by the electron beam...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001737
EISBN: 978-1-62708-178-8
... beam to evaporate a small amount of any material, regardless of its electrical conductivity. In this process, a certain number of ions are formed that can be accelerated into a mass spectrometer. The most common arrangement combines a neodymium-doped yttrium-aluminum-garnet (Nd:YAG) laser focused...
Series: ASM Handbook
Volume: 9
Publisher: ASM International
Published: 01 December 2004
DOI: 10.31399/asm.hb.v09.a0003760
EISBN: 978-1-62708-177-1
... sectioning, focused ion beam tomography, atom probe tomography, and X-ray microtomography. Nine case studies are presented that represent the work of the various research groups currently working on 3D microscopy using serial sectioning and illustrate the variants of the basic experimental techniques...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.9781627082136
EISBN: 978-1-62708-213-6
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003681
EISBN: 978-1-62708-182-5
... Abstract Surface modification is the alteration of the surface composition or structure using energy or particle beams. This article discusses two different surface modification methods. The first, ion implantation, is the introduction of ionized species into the substrate using kilovolt...
Series: ASM Handbook
Volume: 2A
Publisher: ASM International
Published: 30 November 2018
DOI: 10.31399/asm.hb.v02a.a0006532
EISBN: 978-1-62708-207-5
... Abstract This article focuses on a variety of laser beam machining (LBM) operations of aluminum and its alloys, namely, laser cutting, laser drilling, laser milling, laser turning, laser grooving, laser scribing, laser marking, and laser micromachining. It presents different approaches...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006668
EISBN: 978-1-62708-213-6
... and images sample surfaces through controlled rastering of a highly focused electron beam across the area of interest. A variety of signals are produced, particularly backscattered and secondary electrons, as the electron beam interacts with the sample surface; these signals provide local topographic...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001766
EISBN: 978-1-62708-178-8
... as analytical electron microscopy (AEM). In one specific operational configuration, the electron beam is focused to a fine probe and scanned over the thin specimen, generating an image on a cathode-ray tube (CRT) in a manner similar to that of a scanning electron microscope. In this configuration...
Book Chapter

Series: ASM Handbook
Volume: 14B
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v14b.a0005106
EISBN: 978-1-62708-186-3
... the oxygen can oxidize and react exothermically with the steel to produce the cutting action. The oxygen also helps to sweep the molten material out of the kerf. In laser cutting, the fuel gas is replaced with a laser beam focused to approximately 0.1 mm (0.004 in.), resulting in a power density of 1 MW/cm 2...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006664
EISBN: 978-1-62708-213-6
... is necessary. When the molecules leave the GC column, they enter an ionization chamber. This article focuses primarily on electron ionization, where the molecules are bombarded in the ionization chamber with a stream of energetic electrons, which ionize and fragment some of the molecules. The ions can include...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006670
EISBN: 978-1-62708-213-6
...-sectioning microelectronics device architecture for analysis of buried layers Ion beams provide an alternative approach to mechanical sectioning (see Fig. 4 , Ion Beam). Ion beam systems include argon ion mills, which produce high-current diffuse beams appropriate for larger-scale sectioning; more...