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energy-dispersive spectrometry

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Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006638
EISBN: 978-1-62708-213-6
... Abstract This article is a detailed account of the principles of electron-excited X-ray microanalysis. It begins by discussing the physical basis of electron-excited X-ray microanalysis and the advantages and limitations of energy dispersive spectrometry (EDS) and wavelength dispersive...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003529
EISBN: 978-1-62708-180-1
... spectrometry, and wavelength-dispersive spectrometry. The article concludes with information on specimen handling. backscattered electron imaging economy test elemental composition analysis energy-dispersive spectrometry failure analysis metals microchemical analysis referee test specimen...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001768
EISBN: 978-1-62708-178-8
... a microscopic part of a solid specimen bombarded by a beam of accelerated electrons. It provides information on the various aspects of energy-dispersive spectrometry (EDS) and wavelength-dispersive spectrometry (WDS), and elucidates the qualitative analysis of the major constituents of EDS and WDS. The article...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001733
EISBN: 978-1-62708-178-8
... Abstract This article provides an introduction to x-ray spectrometry, and discusses the role of electromagnetic radiation, x-ray emission, and x-ray absorption. It focuses on the instrumentation of wavelength-dispersive x-ray spectrometers, and energy dispersive x-ray spectrometers (EDS...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003057
EISBN: 978-1-62708-200-6
..., Auger electron spectroscopy; EELS, electron energy-loss spectroscopy; EPMA, electron probe x-ray microanalysis; EDS, energy-dispersive x-ray spectroscopy; FTIR, Fourier transform infrared spectroscopy; RS, Raman spectroscopy; RBS, Rutherford backscattering spectrometry; STEM, scanning transmission...
Series: ASM Handbook
Volume: 23
Publisher: ASM International
Published: 01 June 2012
DOI: 10.31399/asm.hb.v23.a0005685
EISBN: 978-1-62708-198-6
... devices. The methods include light microscopy, scanning electron microscopy, atomic force microscopy, energy-dispersive x-ray spectroscopy, Auger electron spectroscopy, secondary ion mass spectrometry, x-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, and Raman spectroscopy...
Book Chapter

By S. Lampman
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006645
EISBN: 978-1-62708-213-6
... scattering energy-dispersive spectrometry wavelength-dispersive spectrometry References 1. Reece R.M. , Reed A.J. , Clark C.S. , Angoff R.C. , Casey K.R. , Challop R.S. , and McCabe E. , Elevated Blood Lead and the In Situ Analysis...
Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006770
EISBN: 978-1-62708-295-2
... References 1. Newbury D.E. and Ritchie N.W.M. , Performing Elemental Microanalysis with High Accuracy and High Precision by Scanning Electron Microscopy/Silicon Drift Detector Energy-Dispersive X-Ray Spectrometry (SEM/SDD-EDS) , J. Mater. Sci. , Vol 50 ( No. 2 ), Jan 2015...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006652
EISBN: 978-1-62708-213-6
... chromatography/mass spectrometry; LEISS, low-energy ion-scattering spectroscopy; MFS, molecular fluorescence spectroscopy; NAA, neutron activation analysis; NMR, nuclear magnetic resonance; OM, optical metallography; RS, Raman spectroscopy; SAXS, small-angle x-ray scattering; SEM, scanning electron microscopy...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006647
EISBN: 978-1-62708-213-6
..., elemental analysis is used in a diverse range of applications, from research and development to quality-control laboratories. Although a multitude of elemental surface and bulk characterization techniques are available in the market (i.e., x-ray diffraction or energy-dispersive spectroscopy), the accurate...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006678
EISBN: 978-1-62708-213-6
... • … … … • • … … • • • • … … … Electron probe x-ray microanalysis N … … … N N N … N … N N N … … Electron spin resonance N N … … N N N N … … … N N N … Elemental and functional group analysis • … • … • • • • … … • • … … … Energy-dispersive x-ray spectroscopy N … … … N N...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0005693
EISBN: 978-1-62708-178-8
... electron microscopy CBED convergent-beam electron diffraction DRS diffuse reflectance spectroscopy EDS energy-dispersive spectroscopy EELS electron energy loss spectroscopy ENAA epithermal neutron activation analysis EPMA electron probe x-ray microanalysis...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003534
EISBN: 978-1-62708-180-1
... spectroscopy (XPS), and time-of-flight secondary ion mass spectrometry (TOF-SIMS). Chemical characterization of surfaces by energy-dispersive spectroscopy (EDS) instrumentation, which is commonly a module integrated with modern scanning electron microscopes, is discussed in many other articles in this Volume...
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006126
EISBN: 978-1-62708-175-7
... solution for this. Scanning electron microscopy (SEM) using a microscope equipped with an energy-dispersive spectroscopy (EDS) system can provide qualitative analysis of metal particles. If the instrument is calibrated with known standards, the analysis is semiquantitative. Should quantification...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001729
EISBN: 978-1-62708-178-8
... , p 79 • Thompson M. and Walsh J.N. , A Handbook of Inductively Coupled Plasma Spectrometry , Blackie and Son , 1983 Inductively coupled plasma atomic emission spectroscopy (ICP-AES) is an analytical technique for elemental determinations in the concentration range...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006641
EISBN: 978-1-62708-213-6
... Total dose results obtained using laser ablation inductively coupled plasma mass spectrometry Ultralow-energy B + implants, 0.5 keV Ultralow-energy As + implants, 2.5 keV Wafer No. Expected, ions/cm 2 Found, ions/cm 2 Difference, % Expected, ions/cm 2 Found, ions/cm 2 Difference...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006663
EISBN: 978-1-62708-213-6
..., and delayed ion dissociation/fragmentation. The energy-resolved nature of the ion beam entering the magnetic sector generates a cleaner dispersion, thus resulting in a higher mass-resolving power. In practice, both electrostatic and magnetic sectors are scanned together across the m / z range desired...
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003710
EISBN: 978-1-62708-182-5
... at atomic resolution Optical microscopy Reflected light is used to generate a magnified image. Macroscopic surface structure details Chemical identity and composition techniques Energy dispersive x-ray spectroscopy (EDS) Incident electron beam generates emission of x-rays characteristic...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006666
EISBN: 978-1-62708-213-6
... of energetic ions, normally protons of a few mega electron volts, to create inner electron shell vacancies. Regarding detection, the most widely used methods involve wavelength dispersion, which is scattering from a crystal, or energy dispersion, which involves direct conversion of x-ray energy into electronic...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006651
EISBN: 978-1-62708-213-6
... results in kinetic energy transfer and surface atom ejection. Atoms are ionized via multiple ionization mechanisms. The main application for GDMS is in bulk metal analysis ( Ref 12 ). As opposed to inductively coupled plasma mass spectrometry, GDMS can analyze solid samples using very little material...