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energy-dispersive X-ray spectrometers

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Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001733
EISBN: 978-1-62708-178-8
... of wavelength-dispersive x-ray spectrometers, and energy dispersive x-ray spectrometers (EDS) that comprise x-ray tubes, the analyzing system, and detectors. The fundamentals of EDS operation are described. The article also provides useful information on preparation of various samples, explaining...
Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006770
EISBN: 978-1-62708-295-2
... by information on the operating principles and applications of detectors for x-ray spectroscopy, namely energy-dispersive spectrometers, wavelength-dispersive spectrometers, and handheld x-ray fluorescence systems. The processes involved in x-ray analysis in the SEM and handheld x-ray fluorescence analysis...
Book Chapter

By S. Lampman
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006645
EISBN: 978-1-62708-213-6
... Schematic diagram of a complete energy-dispersive x-ray spectrometer. Various pulse-processing functions and the multichannel analyzer (MCA) are shown. FET, field-effect transistor Fig. 14 Schematic diagrams of silicon-lithium semiconductor x-ray detector used in an energy-dispersive x-ray...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001768
EISBN: 978-1-62708-178-8
...-concentration boundary. (d) Plot of concentrations along selected vector. Sample courtesy of D.B. Butrymowicz, National Bureau of Standards Fig. 4 Schematic diagram of a complete energy-dispersive x-ray spectrometer. Various pulse processing functions and the multichannel analyzer are shown. Source...
Book Chapter

By Bo Hu
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006102
EISBN: 978-1-62708-175-7
... on the particles if it is equipped with an energy-dispersive x-ray spectrometer (EDS). Compared to optical scopes, the SEM provides high-resolution images and can present the details of particle morphology ( Fig. 1 ). This article provides brief examples of particle image analysis on metal powders used in the PM...
Series: ASM Handbook
Volume: 23
Publisher: ASM International
Published: 01 June 2012
DOI: 10.31399/asm.hb.v23.a0005685
EISBN: 978-1-62708-198-6
...-dispersive x-ray spectrometer with the SEM. The SEM generates a beam of incident electrons in an electron column above the sample chamber. The electrons are typically produced by a thermal emission source, such as a heated tungsten filament, or a field-emission cathode. The energy of the incident...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006638
EISBN: 978-1-62708-213-6
... fitting residual spectrum revealing the W M-family Fig. 7 Principle of the semiconductor silicon drift detector energy dispersive x-ray spectrometer (SDD-EDS) with the spectrum of YBa 2 Cu 3 O 7 -0.4wt%Al Fig. 14 (a) EDS spectrum and peak fitting residual for MoS 2 at E 0 = 10 keV...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003529
EISBN: 978-1-62708-180-1
... of detector was developed that, with no moving parts, could simultaneously count and determine the energy of the x-rays ( Fig. 6 ). These detectors are the ones used for EDS modules on SEM devices. Fig. 5 Schematic diagram of the components of a wavelength-dispersive x-ray spectrometer Fig. 6...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006678
EISBN: 978-1-62708-213-6
... group analysis • … • … • • • • … … • • … … … Energy-dispersive x-ray spectroscopy N … … … N N … … … N … … … … … Fourier transform infrared spectroscopy N D, • • … • N N • • • • • … • … Gas chromatography … … V … V V V V V … V V V N,S...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001766
EISBN: 978-1-62708-178-8
... in diameter) in the sample by electron microdiffraction. In the past 10 years, energy-dispersive x-ray spectrometers have been added to transmission electron microscope columns, allowing determination of the elemental composition of small volumes (<50 nm in diameter) in the sample. With the ability...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003250
EISBN: 978-1-62708-199-3
... energy dispersive systems cannot readily analyze for elements with atomic number less than 11 (sodium). Some combinations of elements are difficult to analyze because of overlapping x-ray energies. Such problems sometimes can be overcome by using wavelength dispersive spectrometers, rather than energy...
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006126
EISBN: 978-1-62708-175-7
... and scanning Auger microscope with regard to top surface analysis. Comparison summary of signal used in scanning electron beam instruments Table 3 Comparison summary of signal used in scanning electron beam instruments Signal type Type Energy Source Use X-ray Characteristic (fluorescent...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003252
EISBN: 978-1-62708-199-3
... principles. The key differences are that electron microprobes are typically equipped with several crystal spectrometers to facilitate wavelength dispersive x-ray analysis. Qualitative analysis is typically performed using an energy dispersive x-ray analysis. Qualitative analysis is typically performed using...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.9781627081788
EISBN: 978-1-62708-178-8
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001771
EISBN: 978-1-62708-178-8
... analyzer used for XPS. Source: Ref 8 Fig. 1 Energy-level diagrams showing the electron transitions that form the basis for three techniques. (a) XPS. (b) X-ray analysis. (c) AES (Auger electron spectroscopy). ϕ, spectrometer work function Fig. 2 Energy-level diagram of an atom...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001770
EISBN: 978-1-62708-178-8
... of microchemical examination involve use of energy-dispersive or wavelength-dispersive x-ray analysis using a scanning electron microscope or an electron micoprobe. Both techniques are limited in that the analysis volume for the x-ray techniques is large, of the order of 0.5 to 10 μm in depth and diameter...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006639
EISBN: 978-1-62708-213-6
... Fig. 1 The electronic transitions involved in an XPS process are shown. Figure shows aluminum monochromatic x-rays moving from left to a copper sample. Electrons ejected from the shells are knocked off and collected by the XPS spectrometer to produce a spectrum (top right). The peak...
Series: ASM Handbook
Volume: 9
Publisher: ASM International
Published: 01 December 2004
DOI: 10.31399/asm.hb.v09.a0003755
EISBN: 978-1-62708-177-1
... detector (silicon or germanium solid-state detector). Energy-dispersive x-ray spectroscopy enables the qualitative and quantitative chemical analysis of elements with an atomic number ≥5 (boron). x-ray detection may also be carried out by wavelength-dispersive spectrometers, which consist of a crystal...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003522
EISBN: 978-1-62708-180-1
... that can simultaneously count and determine the energy of emitted x-rays. Such an energy-dispersive detector contrasts with the wavelength-dispersive spectrometers used on the original electron probe microanalyzer developed by Castaing in 1948. The x-rays are generated when a sample of the area of interest...
Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006757
EISBN: 978-1-62708-295-2
... of magnitude greater than is obtained using an energy-dispersive spectrometer. In AES, an electron beam is focused on the area of interest on the sample being examined. Weak Auger electrons resulting from a secondary reaction of x-rays with the orbital electrons are detected. The electrons have energies...