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dynamic secondary ion mass spectroscopy

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Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006683
EISBN: 978-1-62708-213-6
... Abstract This article focuses on the principles and applications of high-sputter-rate dynamic secondary ion mass spectroscopy (SIMS) for depth profiling and bulk impurity analysis. It begins with an overview of various factors pertinent to sputtering. This is followed by a discussion...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001774
EISBN: 978-1-62708-178-8
... Abstract In secondary ion mass spectroscopy (SIMS), an energetic beam of focused ions is directed at the sample surface in a high or ultrahigh vacuum (UHV) environment. The transfer of momentum from the impinging primary ions to the sample surface causes sputtering of surface atoms...
Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006771
EISBN: 978-1-62708-295-2
... Abstract This article covers the three most popular techniques used to characterize the very outermost layers of solid surfaces: Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), and time-of-flight secondary ion mass spectrometry (TOF-SIMS). Some of the more important...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003534
EISBN: 978-1-62708-180-1
... Abstract This article provides information on the chemical characterization of surfaces by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), and time-of-flight secondary ion mass spectrometry (TOF-SIMS). It describes the basic theory behind each of these techniques...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001301
EISBN: 978-1-62708-170-2
... surface analysis methods, namely, Auger electron spectroscopy, X-ray photoelectron spectroscopy, ion scattering spectroscopy, secondary ion mass spectroscopy, and Rutherford backscattering spectroscopy. It also provides useful information on the applications of surface analysis. Auger electron...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006652
EISBN: 978-1-62708-213-6
... metallography; RS, Raman spectroscopy; SAXS, small-angle x-ray scattering; SEM, scanning electron microscopy; SIMS, secondary ion mass spectroscopy; TEM, transmission electron microscopy; UV/VIS, ultraviolet/visible absorption spectroscopy; XPS, x-ray photoelectron spectroscopy; XRD, x-ray diffraction; XRS, x...
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006126
EISBN: 978-1-62708-175-7
... are summarized in Table 5 . Surface analytical techniques Table 5 Surface analytical techniques Testing parameters Auger electron spectroscopy/scanning Auger microscopy X-ray photoelectron spectroscopy or electron spectroscopy for chemical analysis Secondary ion mass spectroscopy Ion-scattering...
Series: ASM Handbook
Volume: 11B
Publisher: ASM International
Published: 15 May 2022
DOI: 10.31399/asm.hb.v11B.a0006945
EISBN: 978-1-62708-395-9
...-styrene size-exclusion chromatography scanning electron microscope short ber reinforced polymer secondary ion mass spectroscopy styrene-maleic anhydride sheet molding compound Society of Plastics Engineers superplastic forming structural reaction injection molding scanning transmission electron...
Series: ASM Handbook
Volume: 23
Publisher: ASM International
Published: 01 June 2012
DOI: 10.31399/asm.hb.v23.a0005685
EISBN: 978-1-62708-198-6
.... These methods include light microscopy, scanning electron microscopy, atomic force microscopy, energy-dispersive X-ray spectroscopy, Auger electron spectroscopy, secondary ion mass spectrometry, X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, and Raman spectroscopy. atomic force...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006678
EISBN: 978-1-62708-213-6
... … … … … … … … • • … … … … … • Raman spectroscopy N D, • D,• … D,• D,• D,• • • S • • … • … Scanning electron microscopy … … … … … … … … • … N N … … • Secondary ion mass spectroscopy • … S • • N … … • • • • • N N,S Small-angle x-ray scattering...
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003710
EISBN: 978-1-62708-182-5
... bonding, and elemental depth profile Ion scattering spectroscopy (ISS) The energy of scattered primary ions from the surface allows identification of surface atoms. Chemical composition of the surface films at atomic and a molecular level Secondary ion mass spectrometry (SIMS) Incident ion beam...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.9781627081801
EISBN: 978-1-62708-180-1
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0006548
EISBN: 978-1-62708-180-1
... SIMS secondary ion mass spectroscopy SLC sustained load cracking SMAW shielded metal arc welding SMIE solid metal induced embrittlement S-N stress-number of cycles SRB sulfate-reducing bacteria SSC sulfide-stress cracking tc critical thickness T thickness T throat T temperature Tc recrystallization...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006748
EISBN: 978-1-62708-213-6
... perpendicular planes as peaks in the energy spectra of the secondary arriving at different foci. electrons generated. backscattered ion. An ion that has entered a Auger electron spectroscopy (AES). A tech- sample and, through one or more collisions, atom. The smallest particle of an element that nique...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006402
EISBN: 978-1-62708-192-4
...) can define chemical states down to 10 μm. Both analyze the outermost atom layers and, with sputter depth profiling, layers up to 1 μm thick. Dynamic secondary ion mass spectroscopy (SIMS) incorporates depth profiling and can detect atomic compositions significantly below 1 ppm. Static SIMS retains...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001773
EISBN: 978-1-62708-178-8
...), and secondary ion mass spectroscopy (SIMS), which are discussed in articles elsewhere in this Volume. The primary advantages of LEISS are its sampling depth of only 1 to 2 monolayers (0.2 to 0.4 nm, or 2 to 4 Å), its ability to analyze insulators, its ability to depth profile ultrathin films, and its ability...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006648
EISBN: 978-1-62708-213-6
..., minor, and trace elements in the sample are highlighted. m/z, mass/charge number of ions Major drawbacks of GD-TOFMS are the reduced linear dynamic range (typically 10 5 to 10 7 ) in comparison to that of GD-SFMS (up to 10 12 ) and the high levels of abundance sensitivity. Intense ion signals...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006628
EISBN: 978-1-62708-213-6
...-energy electron diffraction (surface atomic structure in Size: j5 Â 0.5 mm (minimum size); j25 Â 0.5 mm the rst 0.1 to 1 nm) (maximum size) Secondary ion mass spectroscopy (mass/charge identi cation Minimum size is determined by the probing beam size of elements in the rst 0.2 to 2 nm) Maximum size...
Series: ASM Handbook
Volume: 11B
Publisher: ASM International
Published: 15 May 2022
DOI: 10.31399/asm.hb.v11B.a0006943
EISBN: 978-1-62708-395-9
... Abstract This article discusses the operating principles, advantages, and limitations of scanning electron microscopy, atomic force microscopy, x-ray photoelectron spectroscopy, and secondary ion mass spectroscopy that are used to analyze the surface chemistry of plastics. atomic force...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0006515
EISBN: 978-1-62708-200-6
...; Systeme International d'Unites tsi tons per square inch SIMS secondary ion mass spectroscopy TTT time-temperature-transformation ° angular measure; degree sineh sine hyperbolic °c degree Celsius (centigrade) SIMA styrene-maleic anhydride TTU through-transmission ultrasonics SMC sheet molding compound TTZ...