This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions of materials related to hard, tribological, and high-temperature coatings and to free-standing structures. It concludes by reviewing the advantages, disadvantages, and applications of CVD.

This article describes the vapor-phase growth techniques applied to the epitaxial deposition of semiconductor films and discusses the fundamental processes involved in metal-organic chemical vapor deposition (MOCVD). It reviews the thermodynamics that determine the driving force behind the overall growth process and the kinetics that define the rates at which the various processes occur. The article provides information on the reactor systems and hardware, MOCVD starting materials, engineering considerations that optimize growth, and the growth parameters for a variety of Group III-V, II-VI, and IV semiconductors.

Chemical vapor deposition (CVD) involves the formation of a coating by the reaction of the coating substance with the substrate. Serving as an introduction to CVD, the article provides information on metals, ceramics, and diamond films formed by the CVD process. It further discusses the characteristics of different pack cementation processes, including aluminizing, siliconizing, chromizing, boronizing, and multicomponent coating.

This article focuses on the process methods and matrix chemistries of ceramic-matrix composites. These methods include pressure-assisted densification, chemical vapor infiltration, melt infiltration, polymer infiltration and pyrolysis, and sol-gel processing. The article discusses the use of a ceramic, preceramic, or metal phase as a fluid or vapor phase reactant to form the matrix. Emphasis is placed on microstructural features that influence ultimate composite properties.

Vapor-deposition processes fall into two major categories, namely, physical vapor deposition (PVD) and chemical vapor deposition (CVD). This article describes major deposition processes such as sputtering, evaporation, ion plating, and CVD. The list of materials that can be vapor deposited is extensive and covers almost any coating requirement. The article provides a table of some corrosion-resistant vapor deposited materials. It concludes with an overview of the applications of CVD and PVD coatings and a discussion on coatings for graphite, the aluminum coating of steel, and alloy coatings for aircraft turbines, marine turbines, and industrial turbines.

This article focuses on transport phenomena and modeling approaches that are specific to vapor-phase processes (VPP). It discusses the VPP for the synthesis of materials. The article reviews the basic notions of molecular collisions and gas flows, and presents transport equations. It describes the modeling of vapor-surface interactions and kinetics of hetereogeneous processes as well as the modeling and kinetics of homogenous reactions in chemical vapor deposition (CVD). The article provides information on the various stages of developing models for numerical simulation of the transport phenomena in continuous media and transition regime flows of VPP. It explains the methods used for molecular modeling in computational materials science. The article also presents examples that illustrate multiscale simulations of CVD or PVD processes and examples that focus on sputtering deposition and reactive or ion beam etching.

Cemented carbides belong to a class of hard, wear-resistant, refractory materials in which the hard carbide particles are bound together, or cemented, by a soft and ductile metal binder. The performance of cemented carbide as a cutting tool lies between that of tool steel and cermets. Almost 50% of the total production of cemented carbides is used for nonmetal cutting applications. Their properties also make them appropriate materials for structural components, including plungers, boring bars, powder compacting dies and punches, high-pressure dies and punches, and pulverizing hammers. This article discusses the manufacture, microstructure, composition, classifications, and physical and mechanical properties of cemented carbides, as well as their machining and nonmachining applications. It examines the relationship between the workpiece material, cutting tool and operational parameters, and provides suggestions to simplify the choice of cutting tool for a given machining application. It also examines new tool geometries, tailored substrates, and the application of thin, hard coatings to cemented carbides by chemical vapor deposition and physical vapor deposition. It discusses the tool wear mechanisms and the methods available for holding the carbide tool. The article is limited to tungsten carbide cobalt-base materials.

Surface treatments are used in a variety of ways to improve the material properties of a component. This article provides information on surface treatments that improve service performance so that the design engineer may consider surface-engineered components as an alternative to more costly materials. It describes solidification surface treatments such as hot dip coatings, weld overlays, and thermal spray coatings. The article discusses deposition surface treatments such as electrochemical plating, chemical vapor deposition, and physical vapor deposition processes. It explains surface hardening and diffusion coatings such as carburizing, nitriding, and carbonitriding. The article also tabulates typical characteristics of carburizing, nitriding, and carbonitriding diffusion treatments.

The classes of tool materials for machining operations are high-speed tool steels, carbides, cermets, ceramics, polycrystalline cubic boron nitrides, and polycrystalline diamonds. This article discusses the expanding role of surface engineering in increasing the manufacturing productivity of carbide, cermet, and ceramic cutting tool materials used in machining operations. The useful life of cutting tools may be limited by a variety of wear processes, such as crater wear, flank wear or abrasive wear, builtup edge, depth-of-cut notching, and thermal cracks. The article provides information on the applicable methods for surface engineering of cutting tools, namely, chemical vapor deposited (CVD) coatings, physical vapor deposited coatings, plasma-assisted CVD coatings, diamond coatings, and ion implantation.

A major cause of failure in components subjected to rolling or rolling/sliding contacts is contact fatigue. This article focuses on the rolling contact fatigue (RCF) performance and failure modes of overlay coatings such as those deposited by physical vapor deposition, chemical vapor deposition, and thermal spraying (TS). It provides a background to RCF in bearing steels in order to develop an understanding of failure modes in overlay coatings. The article describes the underpinning failure mechanisms of TiN and diamond-like carbon coatings. It presents an insight into the design considerations of coating-substrate material properties, coating thickness, and coating processes to combat RCF failure in TS coatings.

Tool steels are carbon, alloy, and high-speed steels that can be hardened and tempered to high hardness and strength values. This article discusses the classifications of commonly used tool steels: water-hardening tool steels, shock-resisting tool steels, cold-work tool steels, and hot-work tool steels. It describes four basic mechanisms of tool steel wear: abrasion, adhesion, corrosion, and contact fatigue wear. The article describes the factors to be considered in the selection of lubrication systems for tool steel applications. It also discusses the surface treatments for tool steels: carburizing, nitriding, ion or plasma nitriding, oxidation, boriding, plating, chemical vapor deposition, and physical vapor deposition. The article describes the properties of high-speed tool steels. It summarizes the important attributes required of dies and the properties of the various materials that make them suitable for particular applications. The article concludes by providing information on abrasive wear and grindability of powder metallurgy steels.

This article describes the eight chemical cleaning methods, namely, circulation, fill and soak, cascade, foam, vapor-phase organic, steam-injected, on-line chemical, and mechanical cleaning. It presents information on deposit types, solvents used to remove them, and construction material incompatibilities in a table. The article summarizes the uses of chemical cleaning solutions, including hydrochloric acid, phosphoric acid, and sulfamic acid, as well as the additives used to neutralize their impact on corrosion. It discusses the chemical cleaning procedures, including selection of cleaning method and solvent, documentation of cleaning, and corrosion monitoring in chemical cleaning.

Carbon-carbon is a unique composite material in which a nonstructural carbonaceous matrix is reinforced by carbon fibers to create a heat-resistant structural material that finds application in the aerospace and defense industries. This article provides a detailed account of the fundamentals of protecting carbon-carbon composites and explains the various coating deposition techniques, namely, pack cementation, chemical vapor deposition, and slurry coatings. It includes information on the practical limitations of coatings for the carbon-carbon composites.

Boriding is a thermochemical diffusion-based surface-hardening process that can be applied to a wide variety of ferrous, nonferrous, and cermet materials. It is performed on metal components as a solution for extending the life of metal parts that wear out too quickly in applications involving severe wear. This article presents a variety of methods and media used for boriding of ferrous materials, and explains their advantages, limitations, and applications. These methods include pack cementation boriding, gas boriding, plasma boriding, electroless salt bath boriding, electrolytic salt bath boriding, and fluidized-bed boriding. The article briefly describes the chemical vapor deposition process, which has emerged to be dominant among metal-boride deposition processes.

This article begins with a list of the factors that influence the properties of physical vapor deposited films. It describes the steps involved in ion plating, namely, surface preparation, nucleation, interface formation, and film growth. The article discusses the factors influencing the properties of ion-plated films. The sources of potential applied on substrate surface, bombarding species, and depositing species are addressed. The article also provides information on the parameters that influence bombardment. It concludes with a discussion on the advantages, limitations, and applications of ion plating.

Cemented carbides belong to a class of hard, wear-resistant, refractory materials in which the hard carbide particles are bound together, or cemented, by a ductile metal binder. Cermet refers to a composite of a ceramic material with a metallic binder. This article discusses the manufacture, composition, classifications, and physical and mechanical properties of cemented carbides. It describes the application of hard coatings to cemented carbides by physical or chemical vapor deposition (PVD or CVD). Tungsten carbide-cobalt alloys, submicron tungsten carbide-cobalt alloys, and alloys containing tungsten carbide, titanium carbide, and cobalt are used for machining applications. The article also provides an overview of cermets used in machining applications.

This article discusses the application of amorphous and crystalline films through plasma-enhanced chemical vapor deposition (PECVD) from the view point of microelectronic device fabrication. It describes the various types of PECVD reactors and deposition techniques. Plasma enhancement of the CVD process is discussed briefly. The article also describes the properties of amorphous and crystalline films deposited by the PECVD process for integrated circuit fabrication.