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amorphous silicon films

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Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006360
EISBN: 978-1-62708-192-4
... of tungsten-containing hydrogenated amorphous carbon films, deposition of tetrahedral amorphous carbon films, and deposition of silicon-incorporated hydrogenated amorphous carbon films. The most common deposition technologies for diamond films are also discussed. The article provides information on surface...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... Systems Hybrid PECVD Systems Silicon Nitride Films Silicon Oxide Films Silicon Oxynitride Films Amorphous Silicon Films Polycrystalline Silicon Films Epitaxial Films Conductive Films Process Description Types of PECVD Systems PECVD of Dielectric Films PECVD of Amorphous...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006670
EISBN: 978-1-62708-213-6
... for these purposes are polycrystalline or amorphous. Oxides such as indium tin zinc oxide have also been used within the thin film transistor structures for displays, including large-format OLEDs such as those in televisions, because they are less expensive than their amorphous silicon counterparts. Another...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003836
EISBN: 978-1-62708-183-2
... 10 P 13 X 7 alloys in 0.1 N H 2 SO 4 at 30 °C (85 °F), where (a) X is silicon, boron, carbon, and phosphorus, and (b) X is silicon, boron, and carbon. Source: Ref 78 Fig. 5 Effect of the chromium content on the corrosion rates of amorphous Ni-Cr-P 15 B 5 alloys in 10% FeCl 3...
Book Chapter

By W.L. Johnson
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0001095
EISBN: 978-1-62708-162-7
... of the ferrous-group metals. Source: Ref 63 Fig. 11 High-resolution transmission electron micrograph of a thin-film sample of amorphous Pd 75 Si 25 . Notice the textured appearance on the scale of ∼2 nm, as well as the apparent lattice fringes on the same scale. Fig. 12 The pair...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006369
EISBN: 978-1-62708-192-4
... Amorphous Carbon Coatings during Run-In , Tribol. Lett ., Vol 36 ( No. 1 ), 2009 , p 43 – 53 38. Prasad S.V. , Ohlhausen J.A. , and Scharf T. , “Mechanisms of Friction in Diamond-Like Nanocomposite Films,” SAND2006-2813C, Sandia National Laboratories (SNL-NM) , Albuquerque...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001286
EISBN: 978-1-62708-170-2
..., amorphous carbon films have a high density of defects that act as nucleation sites for gold deposition. When depositing adatoms on electrically insulating substrates, charge sites on the surface can act as preferential nucleation sites. Electron irradiation, ultraviolet radiation (UV), and ion bombardment...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001290
EISBN: 978-1-62708-170-2
..., when compared with similar films prepared by PVD without ion bombardment. When the ion beam or the evaporant is a reactive species, compounds such as refractory silicon nitride (Si 3 N 4 ) can be synthesized at very low temperatures. Furthermore, adjustment of the ratio of reactive ions to atoms...
Series: ASM Handbook
Volume: 9
Publisher: ASM International
Published: 01 December 2004
DOI: 10.31399/asm.hb.v09.a0003788
EISBN: 978-1-62708-177-1
... in (A), rinse, dry; 2 s in (B), rinse, dry; 30 s in (C), rinse, dry. Exposes {100} crystallographic faces in primary recrystallized 3.25% Si steel and nonoriented silicon steels (a) Parts are by volume Electropolishing procedures for preparing TEM thin foils Table 5 Electropolishing procedures...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003049
EISBN: 978-1-62708-200-6
... Deutscher Verlag für Grundstoffindustrie, Leipzig, East Germany , 1965 3. Lucas J. and Moynihan C.T. , Halide Glasses , Trans Tech Publications, Aedermannsdorf , Sweden , 1986 4. Spear W.E. , The Study of Transport and Related Properties of Amorphous Silicon by Transient...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001291
EISBN: 978-1-62708-170-2
... in an electrically neutral state. Adjusting the deposition energy can produce coatings that have greater density, purity, and adhesion. Under favorable circumstances, the quenching of ions can produce coatings with structures that have unusual properties, such as the extremely hard and smooth amorphous diamond...
Series: ASM Handbook
Volume: 13B
Publisher: ASM International
Published: 01 January 2005
DOI: 10.31399/asm.hb.v13b.a0003842
EISBN: 978-1-62708-183-2
... 0.0773 0.4813 Si 3 N 4 -SiO 2 (am) 1 0.0489 0.4974 Si 3 N 4 -SiO 2 (cr) 1 0.0516 0.5245 (a) am, amorphous; cr, cristobalite Linear and parabolic oxidation rate constants for silicon, SiC, and Si<sub>3</sub>N<sub>4</sub> in dry oxygen Table 2 Linear and parabolic oxidation...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006680
EISBN: 978-1-62708-213-6
... 2.09 9 2.54 x 3.49 8 6.39 7 3.69 5 2.76 4 2.13 4 1.38 3 hP8 SmCl 3 12–789 2.09 x 2.54 x 2.59 8 1.28 8 3.85 5 2.46 5 1.63 5 1.60 5 tI10 LaPd 2 P 2 37–994 Diffraction data from unknown phase(s) on silicon substrate Table 3 Diffraction data from unknown...
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003678
EISBN: 978-1-62708-182-5
... adhesion. A comparison of the corrosion behavior of some different types of phosphate layers is given in Fig. 4 . The “crystalline” phosphate layer is not a simple film. The surface consists of an array of distinct phosphate crystals, which are often a mix of crystalline and x-ray amorphous phases...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006434
EISBN: 978-1-62708-192-4
... of the composition and structure of DLC coatings ( Ref 47 ) categorized coating types with the use of the ternary phase diagram shown in Fig. 10 . Different types of DLC films are classified by the relative amounts of sp 2 and sp 3 bonding and their hydrogen content. Figure 10 shows that tetrahedral amorphous...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001300
EISBN: 978-1-62708-170-2
...) into the growing film. They can be hard particles, such as silicon carbide, as well as solid lubricants, such as polytetrafluoroethylene. A nonuniform distribution of codeposited substances can lead to crevices or a banded structure ( Ref 13 ). Fig. 3 Scanning electron micrographs of an electrodeposited...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001757
EISBN: 978-1-62708-178-8
...-in.) x-ray film, a special sample holder, and small collimators ( Fig. 6 ). The sample holder allows flat samples, such as silicon wafers, to be mounted and the angle γ the sample makes to the entrance collimator to be set at any desired value. This camera is well suited to surveying deposited layers...
Series: ASM Handbook
Volume: 20
Publisher: ASM International
Published: 01 January 1997
DOI: 10.31399/asm.hb.v20.a0002475
EISBN: 978-1-62708-194-8
... from the stoichiometric, with the resultant alterations in their properties. Figure 1 shows an example of near-zero dispersion of amorphous Ba x Ti 2− x O y thin films and still very low dispersion of partially and fully crystallized barium-titanate films ( Ref 7 , 8 ). Properties...
Series: ASM Handbook
Volume: 6
Publisher: ASM International
Published: 01 January 1993
DOI: 10.31399/asm.hb.v06.a0001450
EISBN: 978-1-62708-173-3
... (in both solid and liquid states) should be lower than that of the base material. To form a good metallic bond, both filler metal and base material must be similar relative to structure, composition, and physical properties. To remove the oxide film present on the base material, the filler metal must...
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006387
EISBN: 978-1-62708-192-4
... and diamondlike carbon (DLC) film (2 nm in thickness) coated silicon surface measured by contact mode. In AFM tests, the scanned surface can be destroyed if the normal load is imposed and the contact stress is large enough to cause the material removal. The wear scars in Fig. 10 were formed after sliding...