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X-ray microanalysis

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Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006638
EISBN: 978-1-62708-213-6
... Abstract This article is a detailed account of the principles of electron-excited X-ray microanalysis. It begins by discussing the physical basis of electron-excited X-ray microanalysis and the advantages and limitations of energy dispersive spectrometry (EDS) and wavelength dispersive...
Book Chapter

By S. Lampman
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006645
EISBN: 978-1-62708-213-6
... provides a method for characterizing chemical inhomogeneities on a spatial-resolution scale midway between the ~1 cm (0.4 in.) range of bulk XRF and the ~1 μm scale of electron probe microanalysis. Fig. 15 Confocal lensing used in fine-beam x-ray energy-dispersive spectrometry. Adapted from Ref 18...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006639
EISBN: 978-1-62708-213-6
... Abstract This article focuses on the principles and applications of X-ray photoelectron spectroscopy (XPS) for the analysis of elemental and chemical composition. The discussion covers the nomenclature, instruments, and specimen preparation process of XPS. Some of the factors pertinent to the...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006678
EISBN: 978-1-62708-213-6
... • … … … • • … … • • • • … … … Electron probe x-ray microanalysis N … … … N N N … N … N N N … … Electron spin resonance N N … … N N N N … … … N N N … Elemental and functional group analysis • … • … • • • • … … • • … … … Energy-dispersive x-ray spectroscopy N … … … N N...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003252
EISBN: 978-1-62708-199-3
..., namely scanning electron microscopy, electron probe microanalysis, and transmission electron microscopy. It briefly describes the operating principles, instrumentation which includes energy dispersive X-ray detectors, spatial resolution, typical use of the techniques, elemental analysis detection...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003253
EISBN: 978-1-62708-199-3
... Abstract This article describes the operation and capabilities of surface analysis methods of metals, including scanning electron microscopy, electron probe microanalysis, transmission electron microscopy, secondary ion mass spectroscopy, and X-ray photoelectron spectroscopy. It provides...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003057
EISBN: 978-1-62708-200-6
...; EELS, electron energy-loss spectroscopy; EPMA, electron probe x-ray microanalysis; EDS, energy-dispersive x-ray spectroscopy; FTIR, Fourier transform infrared spectroscopy; RS, Raman spectroscopy; RBS, Rutherford backscattering spectrometry; STEM, scanning transmission electron microscopy; XRF, x-ray...
Series: ASM Handbook
Volume: 23
Publisher: ASM International
Published: 01 June 2012
DOI: 10.31399/asm.hb.v23.a0005685
EISBN: 978-1-62708-198-6
... Mechanical and physical property measurements for thin films Imaging of submicrometer phases in metals Microscopic imaging of fragile biological samples Evaluation of physical properties on a microscopic scale Energy-dispersive x-ray spectroscopy (EDS) is a chemical microanalysis technique...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006668
EISBN: 978-1-62708-213-6
... discussion of x-ray analysis can be found in the article “Electron Probe X-Ray Microanalysis” in this Volume. Two approaches for x-ray analysis in the SEM are wavelength-dispersive spectrometers (WDSs) and energy-dispersive spectrometers (EDSs). Most SEMs with x-ray analysis capabilities are equipped...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001301
EISBN: 978-1-62708-170-2
... surface analysis methods, namely, Auger electron spectroscopy, X-ray photoelectron spectroscopy, ion scattering spectroscopy, secondary ion mass spectroscopy, and Rutherford backscattering spectroscopy. It also provides useful information on the applications of surface analysis. Auger electron...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003250
EISBN: 978-1-62708-199-3
... between the ∼1 cm range of “bulk XRF” and the ∼1 μm scale of electron probe microanalysis, for example, characterizing segregation patterns in cross-sectioned ingots. Optical emission spectroscopy (OES) operates on the same atomic principles but bases its analyses on visible light, rather than x-rays...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001300
EISBN: 978-1-62708-170-2
... experimental techniques for microstructural characterization include metallographic technique, X-ray diffraction, electron, microscopies, and porosimetry. coating structure electrodeposition electron microscopy metallographic technique microstructural characterization plasma spraying porosimetry...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003004
EISBN: 978-1-62708-200-6
... AES Auger electron spectroscopy EPMA Electron probe x-ray microanalysis FT-IR Fourier transform infrared spectroscopy IA Image analysis IC Ion chromatography ICP-AES Inductively coupled plasma atomic emission spectroscopy IR Infrared spectroscopy LEISS Low...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006652
EISBN: 978-1-62708-213-6
... solids. AES: Auger electron spectroscopy; AFM: atomic force microscopy; COMB: high-temperature combustion; EFG: elemental and functional group analysis; EPMA: electron probe x-ray microanalysis; ESR: electron spin resonance; FTIR: Fourier transform infrared spectroscopy; GC: gas chromatography; GC/MS...
Series: ASM Handbook
Volume: 12
Publisher: ASM International
Published: 01 January 1987
DOI: 10.31399/asm.hb.v12.a0001835
EISBN: 978-1-62708-181-8
... electron probe x-ray microanalysis than with SEM ( Ref 13 , 14 , 15 ). The advantage of conducting an x-ray analysis with the scanning electron microscope is that the area to be analyzed is visualized directly on the CRT; that is, at low magnification, one may analyze the bulk specimen, then increase...
Series: ASM Handbook
Volume: 12
Publisher: ASM International
Published: 01 January 1987
DOI: 10.31399/asm.hb.v12.a0000600
EISBN: 978-1-62708-181-8
... five line drawings, two of which are graphs containing superimposed electron fractographs. Information on the principles, instrumentation, and applications associated with AES and EDS is provided in the articles “Auger Electron Spectroscopy” and “Electron Probe X-Ray Microanalysis,” respectively...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006671
EISBN: 978-1-62708-213-6
...; AES, Auger electron spectroscopy; EPMA, electron probe x-ray microanalysis; FTIR, Fourier transform infrared spectroscopy; IA, image analysis; IC, ion chromatography; ICP-AES, inductively coupled plasma atomic emission spectroscopy; IR, infrared spectroscopy; LEISS, low-energy ion-scattering...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006675
EISBN: 978-1-62708-213-6
...-dimensional contour determination of the surface Atom probe tomography Ellipsometry, mostly used for thin-film thickness measurement The techniques covered in this division are based on probing methods using direct probe contact, electron, ion, photon, thermal, or x-ray interaction between the...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006649
EISBN: 978-1-62708-213-6
...) … … … ● ● ● … … ● … … … … … Electron backscatter diffraction … ● ● ● … ● ● … ● ● S ● S ● Energy-dispersive x-ray spectroscopy ● ● ● ● … ● ● ● ● ● … … … … Electron probe x-ray microanalysis ● ● ● ● ● … ● ● ● ● … S … … Flowability analyzer...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.a0003002
EISBN: 978-1-62708-200-6
... Ultratrace component (<1 ppm or <0.0001 wt%) Key to characterization technique acronyms AES Auger electron spectroscopy COMB High-temperature combustion EFG Elemental and functional group analysis EPMA Electron probe x-ray microanalysis ESR Electron spin...