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PECVD reactors

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Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
... plasma enhancement. LPCVD, low-pressure chemical deposition; PECVD, plasma-enhanced chemical vapor deposition. Source: Ref 41 Fig. 5 Reactor for plasma-enhanced chemical vapor deposition of epitaxial silicon films. QMS, quadruple mass spectrometer. Source: Ref 48 Fig. 3 Schematic...
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
... for PECVD, such as SiH 4 ( Ref 35 ), data are still lacking for many important reactant molecules. When possible, for example, when reactants are highly diluted in a carrier gas and/or when depletion effects are not important, the plasma discharge and the CVD reactor models can be decoupled. In this case...
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
...) Growth rate, μm/h (μin./h) 1.2 (47) Source: Ref 145 Fig. 5 Different gas flow patterns possible in chemical vapor deposition reactors. (a) Boundary layer of a gas flowing in a pipe and velocity distribution. (b) Stream lines showing adhered flow and break-away flow. (c) Flow patterns...
Book Chapter

By Donald M. Mattox
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001289
EISBN: 978-1-62708-170-2
... D.M. and Bland R.D. , Aluminum Coating of Uranium Reactor Parts for Corrosion Protection , J. Nucl. Mater. , Vol 21 , 1967 , p 349 10.1016/0022-3115(67)90189-4 110. Muehlberger D.E. , Applications of Ion Vapor Deposited Aluminum Coatings, Conf. Proc. , Ion Plating...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.9781627082136
EISBN: 978-1-62708-213-6
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 November 1995
DOI: 10.31399/asm.hb.emde.9781627082006
EISBN: 978-1-62708-200-6