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Electron probe analysis

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Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006675
EISBN: 978-1-62708-213-6
... determination of the surface Atom probe tomography Ellipsometry, mostly used for thin-film thickness measurement The techniques covered in this division are based on probing methods using direct probe contact, electron, ion, photon, thermal, or x-ray interaction between the analytical instrument...
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006678
EISBN: 978-1-62708-213-6
... for microstructural analysis of metals, such as scanning electron microscopy, electron probe microanalysis, and transmission electron microscopy, are then reviewed. The article contains tables listing analytical methods used for characterization of metals and alloys and surface analysis techniques. It ends...
Image
Published: 01 January 1994
Fig. 2 Depth of information (depth resolution) and lateral resolution of surface and microanalysis techniques. AES, Auger electron spectroscopy. EPMA, electron probe microanalysis. ESCA, electron spectroscopy for chemical analysis. FIM-AP, field ion microscopy - atom probe. ISS, ion scattering More
Series: ASM Handbook
Volume: 23
Publisher: ASM International
Published: 01 June 2012
DOI: 10.31399/asm.hb.v23.a0005685
EISBN: 978-1-62708-198-6
... the response of the sample to the probe. The most common probe types for surface analysis include photons, electrons, ions, and energy fields. The response can be in the same class as the probe or one of the other types. Each analytical technique has its own capabilities and limitations. Different...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0001768
EISBN: 978-1-62708-178-8
... Abstract Electron probe microanalysis (EPMA) makes it possible to combine structural and compositional analysis in one operation. This article describes the basic concepts of microanalysis and the processing of EPMA that involves the measurement of the characteristic X-rays emitted from...
Series: ASM Handbook
Volume: 7
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v07.a0006126
EISBN: 978-1-62708-175-7
.... The techniques used for performing microanalysis include scanning electron microscopy and electron probe X-ray microanalysis. The article describes surface analysis techniques, including Auger electron spectroscopy, X-ray photoelectron spectroscopy, and ion-scattering spectroscopy. Bulk analysis techniques...
Series: ASM Handbook Archive
Volume: 10
Publisher: ASM International
Published: 01 January 1986
DOI: 10.31399/asm.hb.v10.a0005693
EISBN: 978-1-62708-178-8
... electron microscopy CBED convergent-beam electron diffraction DRS diffuse reflectance spectroscopy EDS energy-dispersive spectroscopy EELS electron energy loss spectroscopy ENAA epithermal neutron activation analysis EPMA electron probe x-ray microanalysis...
Image
Published: 15 December 2019
Fig. 1 Flow charts of common techniques for characterization of organic solids. AES: Auger electron spectroscopy; AFM: atomic force microscopy; COMB: high-temperature combustion; EFG: elemental and functional group analysis; EPMA: electron probe x-ray microanalysis; ESR: electron spin More
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006638
EISBN: 978-1-62708-213-6
... spectrometry for electron probe microanalysis. Key concepts for performing qualitative analysis and quantitative analysis by electron-excited X-ray spectrometry are then presented. Several sources that lead to measurement uncertainties in the k-ratio/matrix corrections protocol are provided, along...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003252
EISBN: 978-1-62708-199-3
..., namely scanning electron microscopy, electron probe microanalysis, and transmission electron microscopy. It briefly describes the operating principles, instrumentation which includes energy dispersive X-ray detectors, spatial resolution, typical use of the techniques, elemental analysis detection...
Image
Published: 15 December 2019
Fig. 1 Flow charts of common techniques for characterization of glasses and ceramics. AAS, atomic absorption spectrometry; AES, Auger electron spectroscopy; EPMA, electron probe x-ray microanalysis; FTIR, Fourier transform infrared spectroscopy; IA, image analysis; IC, ion chromatography; ICP More
Image
Published: 15 December 2019
Fig. 1 Flow charts of common techniques for characterization of metals and alloys. AES: Auger electron spectroscopy; AFM: atomic force microscopy; COMB: high-temperature combustion; EDS: energy-dispersive x-ray spectroscopy; EFG: elemental and functional group analysis; EPMA: electron probe x More
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003253
EISBN: 978-1-62708-199-3
... Abstract This article describes the operation and capabilities of surface analysis methods of metals, including scanning electron microscopy, electron probe microanalysis, transmission electron microscopy, secondary ion mass spectroscopy, and X-ray photoelectron spectroscopy. It provides...
Series: ASM Handbook
Volume: 9
Publisher: ASM International
Published: 01 December 2004
DOI: 10.31399/asm.hb.v09.a0003788
EISBN: 978-1-62708-177-1
... Abstract Microstructural analysis of specialized types of magnetic materials is centered on the examination of optical, electron, and scanning probe metallographic techniques unique to magnetic materials. This article provides a comprehensive overview of magnetic materials...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003522
EISBN: 978-1-62708-180-1
... concludes with a review of the evaluation of polymers and ceramic materials in failure analysis. Auger electron spectroscopy ceramic materials corrosion electron probe microanalysis energy dispersive spectroscopy failure analysis macroscopic examination metallographic specimen preparation...
Image
Published: 15 December 2019
Fig. 1 Flow charts of common techniques for characterization of semiconductors. ICP-MS: inductively coupled mass spectrometry; ESR: electron spin resonance; NMR: nanomagnetic resonance; UV-vis: ultraviolet-visible spectroscopy; XRS: x-ray Raman spectroscopy; NAA: neutron activation analysis More
Image
Published: 01 December 2004
Fig. 31 Scanning electron microscope with polarization analysis (SEMPA) images of a (100) surface of an iron-silicon crystal. (a) Secondary electron intensity image, with little contrast. (b) Image of the x-component of the magnetization, with white coloring for magnetization pointing More
Series: ASM Handbook
Volume: 10
Publisher: ASM International
Published: 15 December 2019
DOI: 10.31399/asm.hb.v10.a0006658
EISBN: 978-1-62708-213-6
...: electron microscopes, including scanning electron microscopes (SEMs) and transmission electron microscopes (TEMs), which use focused electron beams to generate images of surfaces; optical microscopes, which use focused light to generate images of surfaces; and the newest type of scanning probe microscopes...
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003249
EISBN: 978-1-62708-199-3
... Information obtained/method Elemental Structural Morphological Bulk X-ray fluorescence spectroscopy (XRF) Optical emission spectroscopy (OES) Combustion/inert fusion analysis (LECO) X-ray diffraction (XRD) Macrophotography (b) Micro Scanning electron microscopy (SEM) Electron probe...
Series: ASM Handbook
Volume: 11B
Publisher: ASM International
Published: 15 May 2022
DOI: 10.31399/asm.hb.v11B.a0006943
EISBN: 978-1-62708-395-9
...—approximately a few nanometers. X-ray photoelectron spectroscopy is used for the chemical surface analysis of polymers to study the chemical composition. The term surface analysis is traditionally used for surface chemical analysis techniques performed by Auger electron spectroscopy (AES) and XPS, which...