This article reviews the main theoretical and practical aspects of sequence normally followed in digital image-acquisition, processing, analysis, and output for material characterization. It discusses the main methods of digital imaging, image processing, and analysis, as applied to microscopy of materials. The article describes the basic concepts of sampling and resolution and quantization of light microscopy, scanning electron microscopy, and transmission electron microscopy. It discusses the acquisition of a digital image that accurately represents the sample under observation and output of the image to a printer. The methods used to enhance the digital image and to extract quantitative information are also described. Different types of image segmentation, namely, adaptive segmentation and contour-based segmentation, are reviewed. The article also presents case studies on the application of image processing and analysis to materials characterization.

This article introduces the concepts of electron and light microscopy with some general features of imaging systems and the ideas of magnification, resolution, depth of field, depth of focus, and lens aberrations as they apply to simple and familiar light-optical systems. In addition, it describes the differences between electron and light in the context of their respective microscopy techniques.

This article provides information on the basic components of a light microscope, including the illumination system, collector lens, and optical and mechanical components. It describes optical performance in terms of image aberrations, resolution, and depth of field. The article discusses the examination of specimen surfaces using polarized light, phase contrast, oblique illumination, dark-field illumination, bright-field illumination, interference-contrast illumination, and phase contrast illumination. Special techniques and devices that may be used with the optical microscope, to obtain additional information, are also described. The article concludes with information on photomicroscopy and macrophotography.

Microstructural analysis is the combined characterization of the morphology, elemental composition, and crystallography of microstructural features through the use of a microscope. This article reviews three types of the most commonly used electron microscopies in metallurgical studies, namely scanning electron microscopy, electron probe microanalysis, and transmission electron microscopy. It briefly describes the operating principles, instrumentation which includes energy dispersive X-ray detectors, spatial resolution, typical use of the techniques, elemental analysis detection threshold and precision, limitations, sample requirements, and the capabilities of related techniques.

Field ion microscopy (FIM) can be used to study the three-dimensional structure of materials, such as metals and semiconductors, because successive atom layers can be ionized and removed from the surface by field evaporation. The ions removed from the surface by field evaporation can be analyzed chemically by coupling to the microscope a time-of-flight mass spectrometer of single-particle sensitivity, known as the atom probe (AP). This article describes the principles, sample preparation, and quantitative analysis of FIM. It also provides information on the principles, instrument design and operation, mass spectra and their interpretation, and applications of AP microanalysis.

Gas analysis by mass spectrometry, or gas mass spectrometry, is a useful analytical tool for investigations performed in controlled atmospheres or in vacuum. This article provides sufficient information to determine if gas mass spectrometry can produce the data required and to determine the type of instrument necessary for a particular application. It discusses the working operations of gas mass spectrometer components, namely, the introduction system, ion sources, mass analyzers, and the ion detector. The article also provides information on resolution of a gas mass spectrometer determined by the width of the source slit and the collector slit. Finally, it describes the instrument set-up for gas mass spectrometry, and shows how to analyze the test results of gas mass spectrometry.