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Anne E. Miller, Paul B. Fischer, Allen D. Feller, Tatyana N. Andryushchenko, Kenneth C. Cadien
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Semiconductor wafer fabrication
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Series: ASM Handbook
Volume: 2A
Publisher: ASM International
Published: 30 November 2018
DOI: 10.31399/asm.hb.v02a.a0006509
EISBN: 978-1-62708-207-5
Abstract
Heat treatment of aluminum alloys frequently refers to the heat treatable aluminum alloys that can be strengthened by solution treatment, quenching, and subsequent hardening. This article introduces the general metallurgy of strengthening aluminum alloys by heat treatment. It discusses various heat treatable alloying elements, such as copper, chromium, iron, magnesium, silicon, zinc, and lithium. The article describes the age-hardening treatments and generalized precipitation sequence for aluminum alloys. It reviews the solution heat treatment in terms of solution heating time and temperature, as well as high-temperature oxidation. The article also discusses quench sensitivity, vacancy loss, grain-boundary precipitates, and quench delay for the heat treatment of aluminum. It concludes with a discussion on the deformation of aluminum alloys prior to aging.
Book Chapter
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006392
EISBN: 978-1-62708-192-4
Abstract
This article discusses the classification of wear based on the presence or absence of effective lubricants, namely, lubricated and nonlubricated wear. Variations in ambient temperature, atmosphere, load, and sliding speed, as well as variations in material bulk composition, microstructure, surface treatment, and surface finish of steel are also considered. The article discusses the types, wear testing, wear evaluation, and hardness evaluation of abrasive wear. It describes the selection criteria of steels for wear resistance. The article also describes the importance of hardness and microstructure as factors in resistance to wear. It provides a discussion on the resistance of various materials to wear in specific applications. The wear resistance of austenitic manganese steels is also discussed. The article discusses the applications of phosphate coatings, wear-resistant coatings, and ion implantation. It concludes with information on interaction of wear and corrosion.
Book Chapter
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006436
EISBN: 978-1-62708-192-4
Abstract
This article describes the surface modification treatments used to modify the tribological properties of titanium alloys. These include physical vapor deposition and thermochemical conversion treatments. The physical vapor deposition includes ion implantation, sputtering, evaporation, and ion plating surface modification treatments. The thermochemical conversion surface treatments include nitriding, carburizing, boriding, and solid lubrication.
Book: Thermal Spray Technology
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005707
EISBN: 978-1-62708-171-9
Abstract
Coatings and other surface modifications are used for a variety of functional, economic, and aesthetic purposes. Two major applications of thermal spray coatings are for wear resistance and corrosion resistance. This article discusses thermal (surface hardening) and thermochemical (carburizing, nitriding, and boriding) surface modifications, electrochemical treatments (electroplating, and anodizing), chemical treatments (electroless plating, phosphating, and hot dip coating), hardfacing, and thermal spray processes. It provides information on chemical and physical vapor deposition techniques such as conventional CVD, laser-assisted CVD, cathodic arc deposition, molecular beam epitaxy, ion plating, and sputtering.
Book Chapter
Series: ASM Handbook
Volume: 23
Publisher: ASM International
Published: 01 June 2012
DOI: 10.31399/asm.hb.v23.a0005673
EISBN: 978-1-62708-198-6
Abstract
Stainless steels are used for medical implants and surgical tools due to the excellent combination of properties, such as cost, strength, corrosion resistance, and ease of cleaning. This article describes the classifications of stainless steels, such as austenitic stainless steels, martensitic stainless steels, ferritic stainless steels, precipitation-hardening stainless steels, and duplex stainless steels. It contains a table that lists common medical device applications for stainless steels. The article discusses the physical metallurgy and physical and mechanical properties of stainless steels. Medical device considerations for stainless steels, such as fatigue strength, corrosion resistance, and passivation techniques, are reviewed. The article explains the process features of implant-grade stainless steels, including type 316L, type 316LVM, nitrogen-strengthened, ASTM F1314, ASTM F1586, ASTM F2229, and ASTM F2581 stainless steels.
Series: ASM Handbook
Volume: 22B
Publisher: ASM International
Published: 01 November 2010
DOI: 10.31399/asm.hb.v22b.a0005539
EISBN: 978-1-62708-197-9
Abstract
This article provides a summary of the overall development of the finite element method (FEM) and its contribution to the materials forming industry. It focuses on the overall philosophy and evolution of the FEM for solving bulk forming issues. A number of applications of FEM are presented in the order they would be used in a typical manufacturing process sequence: primary materials processing, hot forging and cold forming, and product assembly. The article discusses four FEM modules: the deformation model, the heat-transfer model, the microstructural model, and the carbon diffusion model. The article also covers material fracture and die stress analysis and reviews optimization of the design of forming processes.
Series: ASM Handbook
Volume: 22B
Publisher: ASM International
Published: 01 November 2010
DOI: 10.31399/asm.hb.v22b.a0005536
EISBN: 978-1-62708-197-9
Abstract
This article focuses on the modeling and simulation of diffusion-controlled processes related to both materials processing such as heat treatments, and materials degradation from a practical perspective by using the one-dimensional (1-D) sharp interface approach. It describes various diffusion simulation models, such as one-phase simulations, moving phase-boundary simulations, and dispersed system simulations. The article presents case studies that illustrate some examples where diffusion simulations have been applied to industrial-based problems, with an emphasis on the approaches used and the lessons learned from performing such simulations.
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005430
EISBN: 978-1-62708-196-2
Abstract
Diffusion is the process by which molecules, atoms, ions, point defects, or other particle types migrate from a region of higher concentration to one of lower concentration. This article focuses on the diffusivity data and modeling of lattice diffusion in solid-state materials, presenting their diffusion equations. It discusses different methods for evaluating the diffusivity of a material, including the measurement of diffusion coefficients, composition profiles, and layer growth widths. The article reviews the various types of direct and indirect diffusion experiments to extract tracer, intrinsic, and chemical diffusivities. It provides information on the applications of single-phase and multiphase diffusion.
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005413
EISBN: 978-1-62708-196-2
Abstract
This article focuses on the analyzing and modeling of stress-strain behavior of polycrystals of pure face-centered cubic (fcc) metals in the range of temperatures and strain rates where diffusion is not important. It presents a phenomenological description of stress-strain behavior and provides information on the physical background, alternative interpretations, and directions of research. The quantitative description of strain hardening of fcc polycrystals is provided. The article also discusses the modeling of stress-strain behavior in body-centered cubic metals, hexagonal metals, stage IV work hardening, and the various classes of single-phase alloys.
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005433
EISBN: 978-1-62708-196-2
Abstract
This article presents a mechanical description of superplasticity and discusses constitutive equations that are essential for simulating superplastic forming processes, applicable to structural superplasticity. It presents the phenomenological constitutive equations of superplasticity and classical physical constitutive equations. The article also reviews the accommodation mechanisms that are divided into two major groups, namely, diffusional accommodation and accommodation by dislocations.
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004203
EISBN: 978-1-62708-184-9
Abstract
This article discusses the corrosion characteristics of superaustenitic stainless and duplex stainless steels, which are used in pharmaceutical industry. It describes passivation treatments and the electropolishing of stainless steels. The article informs that electropolishing is not a passivation treatment, although the proper execution of the process will result in a passive surface. The article concludes with a discussion on roughing, which is a phenomenon of particular interest to the pharmaceutical industry.
Series: ASM Handbook
Volume: 13C
Publisher: ASM International
Published: 01 January 2006
DOI: 10.31399/asm.hb.v13c.a0004171
EISBN: 978-1-62708-184-9
Abstract
This article presents a detailed examination of corrosion at the various production stages of wafer fabrication. The corrosion issues related to batch metal-etch systems and single-wafer metal-etch systems are also discussed. The article provides a case study, which illustrates that the factors outside the normal processing of wafers or tool-specific problems can contribute to metal-line corrosion.
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003677
EISBN: 978-1-62708-182-5
Abstract
This article provides a background of the complex relationship between titanium and its alloys with aqueous environments, which is dictated by the presence of a passivating oxide film. It describes the corrosion vulnerability of titanium and titanium oxides by the classification of oxide failure mechanisms. The mechanisms are spatially localized oxide film breakdown by the ingress of aggressive anions; spatially local or homogenous chemical dissolution of the oxide in a strong reducing-acid environment; and mechanical disruptions or depassivation such as scratching, abrading, or fretting. Titanium alloys can be classified into three primary groups such as titanium alloys with hexagonal close-packed crystallographic structure; beta titanium alloys with body-centered cubic crystallographic structures; and alpha + beta titanium alloys including near-alpha and near-beta titanium alloys. The article also illustrates the effects of alloying on active anodic corrosion of titanium and repassivation behavior of titanium and titanium-base alloys.
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003620
EISBN: 978-1-62708-182-5
Abstract
Dealloying is a corrosion process in which one or more elements are selectively dissolved, leaving behind a porous residue of the remaining elements. This article describes the dealloying in various systems, namely, dezincification, graphitic corrosion, dealuminification, and noble metal alloys dealloying. The current-potential behavior of a binary alloy undergoing selective dissolution is reviewed. The article highlights the four mechanisms required for the formation of porous metals: ionization-redeposition, surface diffusion, volume diffusion, and percolation model of selective dissolution.
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003583
EISBN: 978-1-62708-182-5
Abstract
This article provides a general introduction to the kinetics of aqueous corrosion with an emphasis on electrochemical principles. It describes the thermodynamic basis for corrosion by determining the equilibrium potentials of electrochemical reactions from the Nernst equation. A corrosion process can be controlled by the electronic conductivity of passive films when the cathodic reaction occurs on the surface of the film and by activation control of corrosion. Passivation becomes thermodynamically possible when the corrosion potential exceeds the potential corresponding to the equilibrium between a metal and one of its oxides/hydroxides. The article schematically illustrates a current-potential or polarization curve for an anodic process.
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003681
EISBN: 978-1-62708-182-5
Abstract
Surface modification is the alteration of the surface composition or structure using energy or particle beams. This article discusses two different surface modification methods. The first, ion implantation, is the introduction of ionized species into the substrate using kilovolt to megavolt ion accelerating potentials. The second method, laser processing, is high-power laser melting with or without mixing of materials precoated on the substrate, followed by rapid melt quenching. The article also describes the advantages and disadvantages of the surface modification approach to promote corrosion resistance.
Book Chapter
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003600
EISBN: 978-1-62708-182-5
Abstract
Chemical-mechanical planarization (CMP) of metals is described as mechanically accelerated corrosion, erosion corrosion, or metallic corrosion enhanced by wear. This article reviews the history, process, chemistry, electrochemistry, and defect issues for CMP. It provides an overview of CMP through a schematic illustration of CMP process equipment. The applications of CMP to tungsten and copper alloys are of prime interest in the semiconductor industry. The article discusses copper CMP and tungsten CMP in detail and analyzes polishing mechanism during CMP by application of direct current potentiodynamic polarization and alternating current impedance measurements. It concludes with information on chemically induced defects such as pitting corrosion, galvanic corrosion, and chemical etching.
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003585
EISBN: 978-1-62708-182-5
Abstract
This article reviews the types of passivity and presents tactics that employ passivity to control corrosion. Thermodynamics provides a guide to the conditions under which passivation becomes possible. A valuable guide to thermodynamics is the potential-pH diagram and the Pourbaix diagram. The article presents a potential-pH diagram for the iron-water system and an illustration of an idealized anodic polarization curve for a metal surface, which serves as a basis for describing the kinetics of passivation. It discusses five properties of passive films: thickness, composition, structure, electronic properties, and mechanical properties. The article outlines three possible processes that can form passive films: direct film formation, dissolution precipitation, and anodic oxidation of metal ions in solution. It describes the breakdown of the passive film using various models and highlighting the effect of alloy composition and structure.
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003219
EISBN: 978-1-62708-199-3
Abstract
Physical vapor deposition (PVD) coatings are harder than any metal and are used in applications that cannot tolerate even microscopic wear losses. This article describes the three most common PVD processes: thermal evaporation, sputtering, and ion plating. It also discusses ion implantation in the context of research and development applications.
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003220
EISBN: 978-1-62708-199-3
Abstract
Although stainless steel is naturally passivated by exposure to air and other oxidizers, additional surface treatments are needed to prevent corrosion. Passivation, pickling, electropolishing, and mechanical cleaning are important surface treatments for the successful performance of stainless steel. This article describes the surface treatment of stainless steels including abrasive blast cleaning, acid pickling, salt bath descaling, passivation treatments, electropolishing, and the necessary coating processes involved. It also describes the surface treatment of heat-resistant alloys including metallic contaminant removal, tarnish removal, oxide and scale removal, finishing, and coating processes.
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