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Chemical vapor deposition
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Book Chapter
Series: ASM Handbook
Volume: 18
Publisher: ASM International
Published: 31 December 2017
DOI: 10.31399/asm.hb.v18.a0006417
EISBN: 978-1-62708-192-4
Abstract
Tool steels are carbon, alloy, and high-speed steels that can be hardened and tempered to high hardness and strength values. This article discusses the classifications of commonly used tool steels: water-hardening tool steels, shock-resisting tool steels, cold-work tool steels, and hot-work tool steels. It describes four basic mechanisms of tool steel wear: abrasion, adhesion, corrosion, and contact fatigue wear. The article describes the factors to be considered in the selection of lubrication systems for tool steel applications. It also discusses the surface treatments for tool steels: carburizing, nitriding, ion or plasma nitriding, oxidation, boriding, plating, chemical vapor deposition, and physical vapor deposition. The article describes the properties of high-speed tool steels. It summarizes the important attributes required of dies and the properties of the various materials that make them suitable for particular applications. The article concludes by providing information on abrasive wear and grindability of powder metallurgy steels.
Series: ASM Handbook
Volume: 5B
Publisher: ASM International
Published: 30 September 2015
DOI: 10.31399/asm.hb.v05b.a0006012
EISBN: 978-1-62708-172-6
Abstract
Nanotechnology and smart-coating technologies have been reported to show great promise for improved performance in critical areas such as corrosion resistance, durability, and conductivity. This article exemplifies nanofilms and nanomaterials used in coatings applications, including carbon nanotubes, silica, metals/metal oxides, ceramics, clays, buckyballs, graphene, polymers, titanium dioxide, and waxes. These can be produced by a variety of methods, including chemical vapor deposition, plasma arcing, electrodeposition, sol-gel synthesis, and ball milling. The application of nanotechnology and the development of smart coatings have been dependent largely on the availability of analytical and imaging techniques such as Raman spectroscopy, scanning and transmission electron microscopy, atomic force microscopy, and scanning tunneling microscopy.
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005772
EISBN: 978-1-62708-165-8
Abstract
Boriding is a thermochemical diffusion-based surface-hardening process that can be applied to a wide variety of ferrous, nonferrous, and cermet materials. It is performed on metal components as a solution for extending the life of metal parts that wear out too quickly in applications involving severe wear. This article presents a variety of methods and media used for boriding of ferrous materials, and explains their advantages, limitations, and applications. These methods include pack cementation boriding, gas boriding, plasma boriding, electroless salt bath boriding, electrolytic salt bath boriding, and fluidized-bed boriding. The article briefly describes the chemical vapor deposition process, which has emerged to be dominant among metal-boride deposition processes.
Series: ASM Handbook
Volume: 4A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v04a.a0005808
EISBN: 978-1-62708-165-8
Abstract
Laser surface hardening is a noncontact process that provides a chemically inert and clean environment as well as flexible integration with operating systems. This article provides a brief discussion on the various conventional surface-modification techniques to enhance the surface and mechanical properties of ferrous and nonferrous alloys. The techniques are physical vapor deposition, chemical vapor deposition, sputtering, ion plating, electroplating, electroless plating, and displacement plating. The article describes five categories of laser surface modification, namely, laser surface heat treatment, laser surface melting such as skin melting or glazing, laser direct metal deposition such as cladding, alloying, and hardfacing, laser physical vapor deposition, and laser shock peening. The article provides detailed information on absorptivity, laser scanning technology, and thermokinetic phase transformations. It also describes the influence of cooling rate on laser heat treatment and the effect of processing parameters on temperature, microstructure, and case depth hardness.
Book: Thermal Spray Technology
Series: ASM Handbook
Volume: 5A
Publisher: ASM International
Published: 01 August 2013
DOI: 10.31399/asm.hb.v05a.a0005707
EISBN: 978-1-62708-171-9
Abstract
Coatings and other surface modifications are used for a variety of functional, economic, and aesthetic purposes. Two major applications of thermal spray coatings are for wear resistance and corrosion resistance. This article discusses thermal (surface hardening) and thermochemical (carburizing, nitriding, and boriding) surface modifications, electrochemical treatments (electroplating, and anodizing), chemical treatments (electroless plating, phosphating, and hot dip coating), hardfacing, and thermal spray processes. It provides information on chemical and physical vapor deposition techniques such as conventional CVD, laser-assisted CVD, cathodic arc deposition, molecular beam epitaxy, ion plating, and sputtering.
Series: ASM Handbook
Volume: 22A
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.hb.v22a.a0005434
EISBN: 978-1-62708-196-2
Abstract
This article focuses on transport phenomena and modeling approaches that are specific to vapor-phase processes (VPP). It discusses the VPP for the synthesis of materials. The article reviews the basic notions of molecular collisions and gas flows, and presents transport equations. It describes the modeling of vapor-surface interactions and kinetics of hetereogeneous processes as well as the modeling and kinetics of homogenous reactions in chemical vapor deposition (CVD). The article provides information on the various stages of developing models for numerical simulation of the transport phenomena in continuous media and transition regime flows of VPP. It explains the methods used for molecular modeling in computational materials science. The article also presents examples that illustrate multiscale simulations of CVD or PVD processes and examples that focus on sputtering deposition and reactive or ion beam etching.
Book Chapter
Series: ASM Handbook
Volume: 13A
Publisher: ASM International
Published: 01 January 2003
DOI: 10.31399/asm.hb.v13a.a0003685
EISBN: 978-1-62708-182-5
Abstract
Vapor-deposition processes fall into two major categories, namely, physical vapor deposition (PVD) and chemical vapor deposition (CVD). This article describes major deposition processes such as sputtering, evaporation, ion plating, and CVD. The list of materials that can be vapor deposited is extensive and covers almost any coating requirement. The article provides a table of some corrosion-resistant vapor deposited materials. It concludes with an overview of the applications of CVD and PVD coatings and a discussion on coatings for graphite, the aluminum coating of steel, and alloy coatings for aircraft turbines, marine turbines, and industrial turbines.
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003563
EISBN: 978-1-62708-180-1
Abstract
A major cause of failure in components subjected to rolling or rolling/sliding contacts is contact fatigue. This article focuses on the rolling contact fatigue (RCF) performance and failure modes of overlay coatings such as those deposited by physical vapor deposition, chemical vapor deposition, and thermal spraying (TS). It provides a background to RCF in bearing steels in order to develop an understanding of failure modes in overlay coatings. The article describes the underpinning failure mechanisms of TiN and diamond-like carbon coatings. It presents an insight into the design considerations of coating-substrate material properties, coating thickness, and coating processes to combat RCF failure in TS coatings.
Book Chapter
Book: Composites
Series: ASM Handbook
Volume: 21
Publisher: ASM International
Published: 01 January 2001
DOI: 10.31399/asm.hb.v21.a0003422
EISBN: 978-1-62708-195-5
Abstract
This article describes the manufacture, post-processing, fabrication, and properties of carbon-carbon composites (CCCs). Manufacturing techniques with respect to the processibility of different geometries of two-directional and multiaxial carbon fibers are listed in a table. The article discusses matrix precursor impregnants, liquid impregnation, and chemical vapor infiltration (CVI) for densification of CCCs. It presents various coating approaches for protecting CCCs, including pack cementation, chemical vapor deposition, and slurry coating. Practical limitations of coatings are also discussed. The article concludes with information on the mechanical properties of CCCs.
Book Chapter
Series: ASM Desk Editions
Publisher: ASM International
Published: 01 December 1998
DOI: 10.31399/asm.hb.mhde2.a0003218
EISBN: 978-1-62708-199-3
Abstract
Chemical vapor deposition (CVD) involves the formation of a coating by the reaction of the coating substance with the substrate. Serving as an introduction to CVD, the article provides information on metals, ceramics, and diamond films formed by the CVD process. It further discusses the characteristics of different pack cementation processes, including aluminizing, siliconizing, chromizing, boronizing, and multicomponent coating.
Series: ASM Handbook
Volume: 20
Publisher: ASM International
Published: 01 January 1997
DOI: 10.31399/asm.hb.v20.a0002466
EISBN: 978-1-62708-194-8
Abstract
Surface treatments are used in a variety of ways to improve the material properties of a component. This article provides information on surface treatments that improve service performance so that the design engineer may consider surface-engineered components as an alternative to more costly materials. It describes solidification surface treatments such as hot dip coatings, weld overlays, and thermal spray coatings. The article discusses deposition surface treatments such as electrochemical plating, chemical vapor deposition, and physical vapor deposition processes. It explains surface hardening and diffusion coatings such as carburizing, nitriding, and carbonitriding. The article also tabulates typical characteristics of carburizing, nitriding, and carbonitriding diffusion treatments.
Book
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.9781627081702
EISBN: 978-1-62708-170-2
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001311
EISBN: 978-1-62708-170-2
Abstract
This article reviews cleaning and finishing operations that have proven to be effective on titanium, its alloys, and semi-fabricated titanium products. It explains how to remove scale, tarnish films, grease, and other soils and how to achieve required finishes and/or improve wear and oxidation resistance through the use of polishing, buffing, and wire brushing operations. The article also covers a wide range of surface modification and coating processes, including ion implantation, diffusion, chemical and physical vapor deposition, plating, anodizing, and chemical conversion coatings as well as sprayed and sol-gel coatings and laser and electron-beam treatments.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001318
EISBN: 978-1-62708-170-2
Abstract
Carbon-carbon is a unique composite material in which a nonstructural carbonaceous matrix is reinforced by carbon fibers to create a heat-resistant structural material that finds application in the aerospace and defense industries. This article provides a detailed account of the fundamentals of protecting carbon-carbon composites and explains the various coating deposition techniques, namely, pack cementation, chemical vapor deposition, and slurry coatings. It includes information on the practical limitations of coatings for the carbon-carbon composites.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001320
EISBN: 978-1-62708-170-2
Abstract
The classes of tool materials for machining operations are high-speed tool steels, carbides, cermets, ceramics, polycrystalline cubic boron nitrides, and polycrystalline diamonds. This article discusses the expanding role of surface engineering in increasing the manufacturing productivity of carbide, cermet, and ceramic cutting tool materials used in machining operations. The useful life of cutting tools may be limited by a variety of wear processes, such as crater wear, flank wear or abrasive wear, builtup edge, depth-of-cut notching, and thermal cracks. The article provides information on the applicable methods for surface engineering of cutting tools, namely, chemical vapor deposited (CVD) coatings, physical vapor deposited coatings, plasma-assisted CVD coatings, diamond coatings, and ion implantation.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001283
EISBN: 978-1-62708-170-2
Abstract
This article presents the principles of chemical vapor deposition (CVD) with illustrations. It discusses the types of CVD processes, namely, thermal CVD, plasma CVD, laser CVD, closed-reactor CVD, chemical vapor infiltration, and metal-organic CVD. The article reviews the CVD reactions of materials related to hard, tribological, and high-temperature coatings and to free-standing structures. It concludes by reviewing the advantages, disadvantages, and applications of CVD.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001284
EISBN: 978-1-62708-170-2
Abstract
This article describes the vapor-phase growth techniques applied to the epitaxial deposition of semiconductor films and discusses the fundamental processes involved in metal-organic chemical vapor deposition (MOCVD). It reviews the thermodynamics that determine the driving force behind the overall growth process and the kinetics that define the rates at which the various processes occur. The article provides information on the reactor systems and hardware, MOCVD starting materials, engineering considerations that optimize growth, and the growth parameters for a variety of Group III-V, II-VI, and IV semiconductors.
Book: Surface Engineering
Series: ASM Handbook
Volume: 5
Publisher: ASM International
Published: 01 January 1994
DOI: 10.31399/asm.hb.v05.a0001285
EISBN: 978-1-62708-170-2
Abstract
This article discusses the application of amorphous and crystalline films through plasma-enhanced chemical vapor deposition (PECVD) from the view point of microelectronic device fabrication. It describes the various types of PECVD reactors and deposition techniques. Plasma enhancement of the CVD process is discussed briefly. The article also describes the properties of amorphous and crystalline films deposited by the PECVD process for integrated circuit fabrication.
Series: ASM Handbook
Volume: 2
Publisher: ASM International
Published: 01 January 1990
DOI: 10.31399/asm.hb.v02.a0001115
EISBN: 978-1-62708-162-7
Abstract
The electronic microcircuit industry has placed severe demands on metal suppliers to provide metals of the highest reproducible purity attainable as a result of the constant quest for the true values of physical and chemical properties of metals. This article describes the commonly used methods for ultrapurification of metals produced by electrolytic processes, including fractional crystallization, zone refining, vacuum melting, distillation, chemical vapor deposition, and solid state refining techniques. In addition, it describes the trace element analysis and resistance-ratio test methods used to characterize purity. Tables list the values for resistance ratios of zone-refined metals and their corresponding chemical compositions, and provide an example of the detection of impurities to concentrations in the parts per billion range, utilizing a combination of the glow discharge mass spectroscopy method and Leco combustion methods.
Book: Machining
Series: ASM Handbook
Volume: 16
Publisher: ASM International
Published: 01 January 1989
DOI: 10.31399/asm.hb.v16.a0002124
EISBN: 978-1-62708-188-7
Abstract
This article discusses the manufacturing steps and compositions of cemented carbides, as well as their microstructure, classifications, applications, and physical and mechanical properties. It provides information on new tool geometries, tailored substrates, and the application of thin and hard coatings to cemented carbides by chemical vapor deposition and physical vapor deposition. The article also discusses tool wear mechanisms and the methods available for holding the carbide tool.