Materials Characterization
Electron or X-Ray Spectroscopic Methods
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Published:1986
Abstract
This article describes the principles and applications of Auger electron spectroscopy (AES). It provides information on the instrumentation typically used in the AES, including an electron gun, an electron spectrometer, a secondary electron detector, and an ion gun. The article also describes experimental methods and limitations of the AES, including elemental detection sensitivity, electron beam artifacts, sample charging, spectral peak overlap, high vapor pressure samples, and sputtering artifacts.
Abstract
This article provides a detailed account of the principles, instrumentation,and applications of x-ray photoelectron spectroscopy (XPS), a technique used for elemental and compositional analysis of surfaces and thin films. It...
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Member Sign InHarris L. Marcus, Electron or X-Ray Spectroscopic Methods, Materials Characterization, Vol 10, Edited By Ruth E. Whan, ASM International, 1986
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