Surface Engineering
Arc Deposition
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Published:1994
Abstract
This article describes the characteristics of continuous cathodic arc sources and filtering process for removing macroparticles from a cathodic arc. It provides information on the types of arc sources and the properties of deposited materials. The advantages, limitations, and applications of arc deposition are also discussed.
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Member Sign InDavid M. Sanders, Joseph W. Glaser, Steven Falabella, Arc Deposition, Surface Engineering, Vol 5, ASM Handbook, Edited By C.M. Cotell, J.A. Sprague, F.A. Smidt, Jr., ASM International, 1994, p 602–604, https://doi.org/10.31399/asm.hb.v05.a0001291
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