Arc Deposition
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Published:1994
Abstract
This article describes the characteristics of continuous cathodic arc sources and filtering process for removing macroparticles from a cathodic arc. It provides information on the types of arc sources and the properties of deposited materials. The advantages, limitations, and applications of arc deposition are also discussed.
David M. Sanders, Joseph W. Glaser, Steven Falabella, Arc Deposition, Surface Engineering, Vol 5, ASM Handbook, Edited By C.M. Cotell, J.A. Sprague, F.A. Smidt, Jr., ASM International, 1994, p 602–604, https://doi.org/10.31399/asm.hb.v05.a0001291
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