Skip to Main Content


Rutherford backscattering spectrometry (RBS) is a major materials characterization technique that can provide information in a short analysis time. It is used for quantitative compositional analysis of thin films, layered structures, or bulk materials and to measure surface impurities of heavy elements on substrates of lighter elements. This article focuses on RBS and its principles, such as collision kinematics, scattering cross section, and energy loss. It describes the channeling effect and the operation of the RBS equipment. The article also provides information on the applications of RBS.

You do not currently have access to this chapter.
Don't already have an account? Register

Wei-Kan Chu, Rutherford Backscattering Spectrometry, Materials Characterization, Vol 10, Edited By Ruth E. Whan, ASM International, 1986, p 628–636,

Download citation file:

Close Modal

or Create an Account

Close Modal
Close Modal