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Abstract

This article describes the operation and capabilities of surface analysis methods of metals, including scanning electron microscopy, electron probe microanalysis, transmission electron microscopy, secondary ion mass spectroscopy, and X-ray photoelectron spectroscopy. It provides information on the capabilities, typical uses, spatial resolution, elemental analysis detection threshold and precision, limitations, sample requirements, and operating principles of the scanning auger microprobe.

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K.H. Eckelmeyer, Surface Analysis, Metals Handbook Desk Edition, 2nd Ed., 2nd ed., Edited By Joseph R. Davis, ASM International, 1998, p 1433–1436, https://doi.org/10.31399/asm.hb.mhde2.a0003253

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