This article describes the operation and capabilities of surface analysis methods of metals, including scanning electron microscopy, electron probe microanalysis, transmission electron microscopy, secondary ion mass spectroscopy, and X-ray photoelectron spectroscopy. It provides information on the capabilities, typical uses, spatial resolution, elemental analysis detection threshold and precision, limitations, sample requirements, and operating principles of the scanning auger microprobe.
K.H. Eckelmeyer, Surface Analysis, Metals Handbook Desk Edition, 2nd Ed., 2nd ed., Edited By Joseph R. Davis, ASM International, 1998, p 1433–1436, https://doi.org/10.31399/asm.hb.mhde2.a0003253
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