Corrosion: Environments and Industries
Corrosion in Semiconductor Wafer Fabrication
This article presents a detailed examination of corrosion at the various production stages of wafer fabrication. The corrosion issues related to batch metal-etch systems and single-wafer metal-etch systems are also discussed. The article provides a case study, which illustrates that the factors outside the normal processing of wafers or tool-specific problems can contribute to metal-line corrosion.
Mercy Thomas, Gary Hanvy, Khuzema Sulemanji, 2006. "Corrosion in Semiconductor Wafer Fabrication", Corrosion: Environments and Industries, Stephen D. Cramer, Bernard S. Covino, Jr.
Download citation file:
ASM Reference Publications Catalog
The new Fall / Winter 2019-2020 Catalog features more than 200 new and upcoming releases and our popular best-selling titles. Save now with prepublication pricing and set sales.