Skip to Main Content

Abstract

This article discusses the fundamentals of thermal vaporization and condensation and provides information on the various vaporization sources and methods of vacuum deposition. It offers an overview of reactive evaporation and its deposition techniques. The article also explains the advantages, limitations, and applications of vacuum deposition processes. Finally, it provides information on the gas evaporation process, its processing chamber, and related systems.

You do not currently have access to this chapter.
Don't already have an account? Register

Donald M. Mattox, 1994. "Vacuum Deposition, Reactive Evaporation, and Gas Evaporation", Surface Engineering, C.M. Cotell, J.A. Sprague, F.A. Smidt, Jr.

Download citation file:


Close
Close Modal
This Feature Is Available To Subscribers Only

Sign In or Create an Account

Close Modal
Close Modal