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Abstract

This article describes the characteristics of continuous cathodic arc sources and filtering process for removing macroparticles from a cathodic arc. It provides information on the types of arc sources and the properties of deposited materials. The advantages, limitations, and applications of arc deposition are also discussed.

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David M. Sanders, Joseph W. Glaser, Steven Falabella, 1994. "Arc Deposition", Surface Engineering, C.M. Cotell, J.A. Sprague, F.A. Smidt, Jr.

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