This article discusses the fundamentals of thermal vaporization and condensation and provides information on the various vaporization sources and methods of vacuum deposition. It offers an overview of reactive evaporation and its deposition techniques. The article also explains the advantages, limitations, and applications of vacuum deposition processes. Finally, it provides information on the gas evaporation process, its processing chamber, and related systems.
ASM Reference Publications Catalog
The new Fall / Winter 2019-2020 Catalog features more than 200 new and upcoming releases and our popular best-selling titles. Save now with prepublication pricing and set sales.