This article focuses on the evaluation of mechanical properties of freestanding films and films adherent to their substrates. Common methods of testing freestanding films, including uniaxial tensile testing, uniaxial creep testing, biaxial testing, and beam-bending methods, are discussed. For films which are adherent to their substrates, indentation testing is used to evaluate hardness, creep, and strength.
Franz R. Brotzen, Evaluation of Mechanical Properties of Thin Films, Surface Engineering, Vol 5, ASM Handbook, Edited By C.M. Cotell, J.A. Sprague, F.A. Smidt, Jr., ASM International, 1994, p 642–646, https://doi.org/10.31399/asm.hb.v05.a0001297
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