Measuring the thickness of thin films can be accomplished in many ways. This article focuses on the optical method of single-wavelength ellipsometry, two multiple-wavelength methods of reflectometry and spectroscopic ellipsometry for measuring the thickness of thin films. The general capabilities, principles and applications of ellipsometry and reflectometry are discussed in terms of nondestructive methods.
ASM Reference Publications Catalog
The new Fall / Winter 2019-2020 Catalog features more than 200 new and upcoming releases and our popular best-selling titles. Save now with prepublication pricing and set sales.