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ASM Handbook
Materials Characterization (2019 Edition)
ASM International
Volume
10
ISBN electronic:
978-1-62708-213-6
Publication date:
2019
Book Chapter
Introduction to Scanning Probe Microscopy
By
Bharat Bhushan
Bharat Bhushan
The Ohio State University
Search for other works by this author on:
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Published:2019
Page range:
709 - 724
Abstract
This article provides an overview of scanning probe microscopes (scanning tunneling microscope and atomic force microscope (AFM)), covering the various operating modes and probes used in these instruments and providing information on AFM instrumentation, applications, and analyses.
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Citation
Bharat Bhushan, Introduction to Scanning Probe Microscopy, Materials Characterization, Vol 10, 2019 ed., ASM Handbook, ASM International, 2019, p 709–724, https://doi.org/10.31399/asm.hb.v10.a0006633
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