Skip to Main Content
Skip Nav Destination


Low-energy electron diffraction (LEED) is a technique for investigating the crystallography of surfaces and overlayers adsorbed on surfaces. This article provides a brief account of LEED, covering the principles and measurements of diffraction from surfaces. Some of the processes involved in sample preparation are described. In addition, the article discusses the limitations of surface-sensitive electron diffraction and the applications of LEED with examples.

You do not currently have access to this chapter.
Don't already have an account? Register

Amirali Zangiabadi, Low-Energy Electron Diffraction, Materials Characterization, Vol 10, 2019 ed., ASM Handbook, ASM International, 2019, p 699–708,

Download citation file:

Close Modal

or Create an Account

Close Modal
Close Modal