Inductively Coupled Plasma Mass Spectrometry
This article discusses the basic principles of inductively coupled plasma mass spectrometry (ICP-MS), covering different instruments used for performing ICP-MS analysis. The instruments covered include the sample-introduction system, ICP ion source, mass analyzer, and ion detector. Emphasis is placed on ICP-MS applications in the semiconductor, photovoltaic, materials science, and other electronics and high-technology areas.
Fuhe Li, Hugh E. Gotts, Inductively Coupled Plasma Mass Spectrometry, Materials Characterization, Vol 10, 2019 ed., ASM Handbook, ASM International, 2019, p 162–172, https://doi.org/10.31399/asm.hb.v10.a0006641
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