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ASM Handbook
Materials Characterization (2019 Edition)
ASM International
Volume
10
ISBN electronic:
978-1-62708-213-6
Publication date:
2019
Book Chapter
Inductively Coupled Plasma Mass Spectrometry
By
Fuhe Li
;
Fuhe Li
Air Liquide Electronics—Balazs NanoAnalysis
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Hugh E. Gotts
Hugh E. Gotts
Air Liquide Electronics—Balazs NanoAnalysis
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-
Published:2019
Page range:
162 - 172
Abstract
This article discusses the basic principles of inductively coupled plasma mass spectrometry (ICP-MS), covering different instruments used for performing ICP-MS analysis. The instruments covered include the sample-introduction system, ICP ion source, mass analyzer, and ion detector. Emphasis is placed on ICP-MS applications in the semiconductor, photovoltaic, materials science, and other electronics and high-technology areas.
Topics
Mass spectroscopy
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Citation
Fuhe Li, Hugh E. Gotts, Inductively Coupled Plasma Mass Spectrometry, Materials Characterization, Vol 10, 2019 ed., ASM Handbook, ASM International, 2019, p 162–172, https://doi.org/10.31399/asm.hb.v10.a0006641
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