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ASM Handbook
Materials Characterization (2019 Edition)
ASM International
Volume
10
ISBN electronic:
978-1-62708-213-6
Publication date:
2019
Book Chapter
Semiconductor Characterization
-
Published:2019
Page range:
11 - 28
Abstract
This article introduces various techniques commonly used in the characterization of semiconductors, namely single-crystal, polycrystalline, amorphous, oxide, organic, and low-dimensional semiconductors and semiconductor devices. The discussion covers material classification, fabrication methods, sample preparation, bulk/elemental characterization methods, microstructural characterization methods, surface characterization methods, and electronic characterization methods.
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Citation
David T. Schoen, Meredith S. Nevius, Sumit Chaudhary, Semiconductor Characterization, Materials Characterization, Vol 10, 2019 ed., ASM Handbook, ASM International, 2019, p 11–28, https://doi.org/10.31399/asm.hb.v10.a0006670
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