This article introduces various techniques commonly used in the characterization of semiconductors, namely single-crystal, polycrystalline, amorphous, oxide, organic, and low-dimensional semiconductors and semiconductor devices. The discussion covers material classification, fabrication methods, sample preparation, bulk/elemental characterization methods, microstructural characterization methods, surface characterization methods, and electronic characterization methods.
David T. Schoen, Meredith S. Nevius, Sumit Chaudhary, Semiconductor Characterization, Materials Characterization, Vol 10, 2019 ed., ASM Handbook, ASM International, 2019, p 11–28, https://doi.org/10.31399/asm.hb.v10.a0006670
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