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Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003529
EISBN: 978-1-62708-180-1
... Schematic of a complete energy-dispersive x-ray spectrometer used in electron-probe x-ray microanalysis. Various pulse processing functions and the multichannel analyzer are shown. FET, field effect transistor Even though the EDS method is more common, the wavelength dispersive spectroscopy (WDS...
Abstract
This article describes some of the common elemental composition analysis methods and explains the concept of referee and economy test methods in failure analysis. It discusses different types of microchemical analyses, including backscattered electron imaging, energy-dispersive spectrometry, and wavelength-dispersive spectrometry. The article concludes with information on specimen handling.
