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sputtering

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Image
Published: 01 December 2019
Fig. 7 Typical Auger spectra of cleavage planes (a) before sputtering and (b) after sputtering More
Image
Published: 01 December 2019
Fig. 6 Typical Auger spectra and profile of grain boundary (plain area). (a) Auger survey spectra before sputtering. (b) Auger survey spectra after sputtering. (c) Depth profile of phosphorous More
Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006771
EISBN: 978-1-62708-295-2
... contamination obscures much of the underlying surface of interest, inert gas sputtering can be employed to remove at least some of the obstructing contamination layer. Care must be taken to avoid sputter removing too much of the sample, or the surface of interest will also be removed. Typically, only a few...
Series: ASM Failure Analysis Case Histories
Volume: 3
Publisher: ASM International
Published: 01 December 2019
DOI: 10.31399/asm.fach.v03.c9001833
EISBN: 978-1-62708-241-9
... … Average 3.58 0.38 … 1.25 … … 1.21 0.75 92.82 … Fig. 6 Typical Auger spectra and profile of grain boundary (plain area). (a) Auger survey spectra before sputtering. (b) Auger survey spectra after sputtering. (c) Depth profile of phosphorous Fig. 7 Typical Auger spectra...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003534
EISBN: 978-1-62708-180-1
..., when excessive atmospheric or handling contamination obscures much of the underlying surface of interest, inert gas sputtering can be employed to remove at least some of the obstructing contamination layer. Care must be taken to prevent sputter removing too much of the sample, or the surface...
Image
Published: 01 December 1993
Fig. 8 Energy dispersive spectra showing titanium and nitrogen on the surface. Sample after gold sputter coating. 500×. More
Image
Published: 01 June 2019
Fig. 6 EDS chemical analysis of the black foam insulation reveals a high level of chlorine. Sample is sputter-coated with gold. More
Series: ASM Failure Analysis Case Histories
Volume: 3
Publisher: ASM International
Published: 01 December 2019
DOI: 10.31399/asm.fach.v03.c9001752
EISBN: 978-1-62708-241-9
... Mn S Sensitivity factors 0.212 0.178 0.076 0.161 0.101 0.161 0.652 LF14 CVN1-4 Sphere #1 44 21 17 10 8 nd b nd Sphere #2 23 13 17 30 17 nd nd Rhombic #1 33 21 34 nd nd 8 5 Sphere #3 as rec’d 17 10 21 34 18 nd nd 1.5 min sputter 9...
Series: ASM Failure Analysis Case Histories
Publisher: ASM International
Published: 01 June 2019
DOI: 10.31399/asm.fach.modes.c9001628
EISBN: 978-1-62708-234-1
... spectroscopy measures the binding energies of the elements on the sample surface and is useful for characterizing the elements that are present on the surface, as well as determining the oxidation state of these elements. Furthermore, a sputtering technique is available through XPS in which layers of atoms can...
Series: ASM Failure Analysis Case Histories
Volume: 1
Publisher: ASM International
Published: 01 December 1992
DOI: 10.31399/asm.fach.v01.c9001038
EISBN: 978-1-62708-214-3
... performed. These techniques proved to be invaluable, identifying the initiation points (bolt holes No. 6, 7, and 9) and the mode of failure (fatigue). The replicated tape specimens were sputter coated with 60Au-40Pd for SEM examination. All of the areas were scanned at varying magnifications. Special...
Series: ASM Failure Analysis Case Histories
Publisher: ASM International
Published: 01 June 2019
DOI: 10.31399/asm.fach.process.c9001629
EISBN: 978-1-62708-235-8
... from the surface and also has the effect of implanting the primary ions into the surface. The nature of this technique makes it feasible for analyzing trace amounts of substances; however, extensive knowledge of the sputtering rate is needed in conjunction with calibration of the obtained signals...
Series: ASM Handbook
Volume: 11B
Publisher: ASM International
Published: 15 May 2022
DOI: 10.31399/asm.hb.v11B.a0006943
EISBN: 978-1-62708-395-9
... of the sputtered particles is the basis of the static secondary ion mass spectrometry technique. Simultaneous x-ray photoelectron spectroscopy analysis of the bottom of the etch crater produces chemical depth profiles. Fig. 59 ToF-SIMS mass spectrum of polyethylene terephthalate Fig. 57 Block...
Series: ASM Failure Analysis Case Histories
Publisher: ASM International
Published: 01 June 2019
DOI: 10.31399/asm.fach.modes.c9001516
EISBN: 978-1-62708-234-1
... magnetic coating is then sputtered by physical vapor deposition process or electrolytically or electroless deposited. In order to protect this magnetic film, which stores the data, a thin carbon film is sputtered. The carbon film acts both as a protective film and lubricant. The carbon overcoat, in its...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003563
EISBN: 978-1-62708-180-1
... coatings can easily outperform conventional bearing materials, whereas other coating materials such as CrN show a promise for the future. Sputtering (either reactive, ionic, or magnetron) and ionic beam deposition have been the preferred PVD coating process for nitride and DLC coatings, respectively...
Series: ASM Failure Analysis Case Histories
Volume: 3
Publisher: ASM International
Published: 01 December 2019
DOI: 10.31399/asm.fach.v03.c9001767
EISBN: 978-1-62708-241-9
... using a scanning electron microscope, which allows for evaluation at high magnification and with great depth of field. Prior to examination, the fracture surface was cleaned and subsequently gold sputter coated. A review of the fracture surface supported multiple origins at the transformer side...
Series: ASM Failure Analysis Case Histories
Volume: 2
Publisher: ASM International
Published: 01 December 1993
DOI: 10.31399/asm.fach.v02.c9001269
EISBN: 978-1-62708-215-0
... on the surface. Sample after gold sputter coating. 500×. Fig. 1 Overall view of titanium nitride-coated hob. Approximately.1× Fig. 2 Closer view of fractured cutting edges. Approximately 5×. Abstract Recurring, premature failures occurred in TiN-coated M2 gear hobs used to produce...
Series: ASM Failure Analysis Case Histories
Volume: 2
Publisher: ASM International
Published: 01 December 1993
DOI: 10.31399/asm.fach.v02.c9001318
EISBN: 978-1-62708-215-0
... the minimum XPS analysis area of 4 mm 2 (0.016 in. 2 ) was inappropriate for analysing the narrow fracture surface of the failed discs, SAM was used. After ion sputtering to remove carbon, which was initially detected along with oxygen, trace quantities of mercury were found on one fracture surface...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003533
EISBN: 978-1-62708-180-1
... and sputter coating. Evaporation coating consists of heating a metal filament to a high temperature in a vacuum chamber to cause evaporation to occur. Atoms that leave the filament travel a line-of-sight trajectory to the surface of the sample where they are adsorbed. A thin coating consisting of a few...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003539
EISBN: 978-1-62708-180-1
..., such as carbon or a metal, to allow examination using a standard SEM. The coating is applied by a method such as vacuum evaporation or sputtering. Coating must be performed carefully to avoid damaging the fracture surface (e.g., by excessive heating) or introducing artifacts associated with the coating process...
Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006769
EISBN: 978-1-62708-295-2
.... If a nonconductive sample is to be examined using a conventional SEM, several methods exist to produce a conductive layer on the surface. The two most common are evaporation and sputter coating. Evaporation coating consists of heating a metal filament to a high temperature in a vacuum chamber to cause evaporation...